Semiconductor Tools

Semiconductor Tools

Semiconductor tools are specialized equipment used in the manufacturing and testing of semiconductor devices. These tools are vital for the production of integrated circuits and other electronic components. Common examples include wafer fabrication tools, semiconductor metrology tools, and packaging equipment. Semiconductor tools are designed to ensure precision, accuracy, and efficiency in the semiconductor manufacturing process. They help in etching, deposition, patterning, and testing of semiconductor materials. These tools play a crucial role in the semiconductor industry, enabling the development of cutting-edge technology. Investing in high-quality semiconductor tools is essential for achieving optimal results in semiconductor manufacturing.

  • Tegal 803 Inline Automatic Wafer RF Plasma Etcher – front and right side view showing front panel controls, digital displays, and partial cover open on wafer load station Tegal 803 Plasma Etcher – rear view showing wiring harnesses, large rotary disconnect switch, multiple gas/utility fittings, and power cable

    Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch System

    Tegal

    $3,000.00
    Was: $6,000.00
    Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch SystemRF plasma dry etch tool designed for automated inline semiconductor wafer processing. Performs plasma-based material removal and surface modification on silicon wafers during...
    42618
    SKU:
    42618
    Availability:
    Usually ships within 3-5 business days via freight carrier; contact us to arrange shipping.
    Weight:
    370.00 LBS
    Brand:
    Tegal
    Model:
    803
    MPN:
    803
    Type:
    Inline Automatic Wafer RF Plasma Etcher
    SKU:
    42618
    Condition:
    As-Is / For Parts or Not Working
    Seller Notes:
    RF power supply intact; sold as-is for parts or repair; freight shipping required
    Country/Region of Manufacture:
    United States
    Application / Use Case:
    Semiconductor wafer plasma etching, dry etch processing
    Process Type:
    RF Plasma Etch (Dry Etch)
    Wafer Handling:
    Inline automatic wafer transport
    Gas Inputs:
    Multiple gas channels (Gas 1, Gas 2, Gas 3, Gas 4, Cleaning Gas)
    Mass Flow Controller:
    Mass flow controller module present (visible internally)
    RF Power Supply:
    Intact (confirmed present)
    Form Factor:
    Freestanding benchtop/floor unit on casters
    Control Interface:
    Front panel digital displays and switches
    Approximate Weight:
    ~400 lbs (freight shipping required)
    Condition Notes:
    Tegal 803 RF Plasma Etcher sold as-is for parts or repair. We were unable to test it; no functionality guaranteed. RF power supply intact. Power cable ends show corrosion. ~400 lbs, freight required.
    $3,000.00
    Was: $6,000.00
  • Tegal 803 Plasma Inline RF Wafer Etcher front view with cover on showing control panel and wafer handler arms Tegal 803 interior left side with cover removed showing control PCB and wafer elevator/transport mechanism

    Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For Parts

    Tegal

    $1,500.00
    Was: $3,000.00
    Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For PartsInline RF plasma wafer etcher designed for semiconductor processing. This motorized system performs reactive ion etching (RIE) on wafers using four process gas lines and automated...
    42622
    SKU:
    42622
    Availability:
    Usually ships within 3-5 business days via freight carrier — contact us to arrange.
    Weight:
    350.00 LBS
    Brand:
    Tegal
    Model:
    803
    MPN:
    803
    Type:
    Inline RF Plasma Wafer Etcher
    SKU:
    42622
    Condition:
    As-Is / For Parts or Not Working
    Seller Notes:
    Sold as-is for parts or repair. Cover removed; all major components present.
    Country/Region of Manufacture:
    United States
    Serial Number (Internal):
    8030293
    Application / Use Case:
    RF Plasma Etching, Semiconductor Wafer Processing
    Process Type:
    RF Plasma Etch (Reactive Ion Etch / RIE)
    Configuration:
    Inline Automatic
    Gas Inputs:
    4 process gas lines (GAS 1, GAS 2, GAS 3, GAS 4) + cleaning gas
    Control Panel:
    Volts/Torr, % Flow/MFC, Temperature, Watts, Process Status, Wafer Status
    Vacuum Connection:
    To Vacuum Pump port visible on rear panel
    Coolant Connections:
    Coolant In / Coolant Out ports on rear panel
    Power Connection:
    Heavy-duty multi-pin plug (visible in photos)
    Power Outlets:
    Chart & Service Power Outlets, 24 VAC, DC Supply on control chassis
    Form Factor:
    Freestanding Inline System
    Approximate Weight:
    ~400 lbs — freight shipping required
    Wafer Handler:
    Motorized inline wafer transport with end effectors on both sides
    Interlock:
    Top cover interlock and Interlock Reset present
    Compatible With:
    Tegal 803 series plasma etch process modules
    Manufacturer Location:
    Tegal Corporation, Novato, CA 94947
    Condition Notes:
    Tegal 803 Plasma Inline RF Wafer Etcher sold as-is for parts or repair. Untested, no functionality guaranteed. Major internal components present. ~400 lbs, freight required. Please review photos and contact us with questions.
    $1,500.00
    Was: $3,000.00
  • Tegal 701D Plasma Inline Wafer RF Etcher front view showing load and unload cassette stations and control panel on casters Tegal 701D plasma etcher rear view with covers open showing internal wiring, control boards, high voltage section, and vacuum plumbing

    Tegal 701D Plasma Inline Wafer RF Etcher Semiconductor Etch System Parts

    Tegal

    $1,200.00
    Was: $2,400.00
    Tegal 701D Plasma Inline Wafer RF Etcher Semiconductor Etch System PartsThe Tegal 701D is a plasma inline RF etcher designed for dry plasma etching of semiconductor wafers in a production fab environment. Built by Tegal Corporation of Novato, California,...
    42625
    SKU:
    42625
    Availability:
    Usually ships within 1-2 business days of cleared payment.
    Weight:
    320.00 LBS
    Brand:
    Tegal
    Model:
    701D
    MPN:
    701
    Secondary Model:
    T701D
    SKU:
    42625
    Type:
    Plasma Inline Wafer RF Etcher
    Condition:
    As-Is / For Parts or Not Working
    Application:
    Plasma Etch / Semiconductor Wafer Processing
    Process Type:
    RF Plasma Etch (Dry Etch)
    Configuration:
    Inline with Load and Unload Cassette Stations
    RF Channels:
    2 (Chan I and Chan II)
    Power Requirements:
    115V AC, 60Hz (Service 1A, RF 7A SB, Logic 6A)
    Gas System:
    Multi-channel gas manifold, 500 PSI max, N2 80 PSI, N2 37 PSI
    Mass Flow Controller:
    Unit Instruments UFC-1000, 0-5VDC set point
    Cooling:
    Liquid coolant in/out connections on rear
    Vacuum Connection:
    To Vacuum Pump port on rear
    DC Bias:
    DC Bias control and display (front panel)
    Front Panel Controls:
    Pressure, Flow, Temp displays; Chamber Pressure meter; RF On, Chan I/II selectors
    Seller Notes:
    Sold as-is for parts. Includes mass flow controller, control boards, gas plumbing, load/unload stations, and power cable.
    Country/Region of Manufacture:
    United States
    Form Factor:
    Freestanding Console on Casters
    Condition Notes:
    Tegal 701D Plasma Inline RF Etcher sold as-is for parts or repair. Not tested or guaranteed functional. Includes mass flow controller, control PCBs, gas manifold, load/unload stations, and power cable. Please contact us with questions.
    $1,200.00
    Was: $2,400.00
  • Pacific Western Systems P5NMS semi-automatic wafer prober full system view on pallet with Dell CRT monitor mounted on top shelf Pacific Western Systems PWS nameplate showing Model No. P5NMS and Serial No. 356420602, Made in USA

    Pacific Western Systems P5NMS Wafer Prober Semi-Automatic PWS P50 Semiconductor

    Pacific Western Systems

    $4,500.00
    Was: $9,000.00
    Pacific Western Systems P5NMS Wafer Prober Semi-Automatic PWS P50 SemiconductorSemi-automatic wafer prober designed for semiconductor wafer probing and inspection applications. Features a circular vacuum chuck with rotation capability and manual X/Y step...
    44945
    SKU:
    44945
    Availability:
    Freight shipment required; contact us for a shipping quote or to arrange local pickup.
    Weight:
    865.00 LBS
    Brand:
    Pacific Western Systems
    Model:
    P5NMS
    MPN:
    P5NMS
    Secondary Model:
    P50
    SKU:
    44945
    Type:
    Semi-Automatic Wafer Prober
    Condition:
    As-Is / For Parts or Not Working
    Application:
    Semiconductor Wafer Probing / Wafer Inspection
    Automation Level:
    Semi-Automatic
    Sub-System:
    PWS P50
    Included Monitor:
    Dell E770P 17" CRT Monitor
    Included Keyboard:
    Logitech USB Keyboard
    Overall Dimensions:
    51" W x 41" D x 65" H
    Approximate Weight:
    865 lbs
    Country/Region of Manufacture:
    United States
    Stepper Motor:
    Compumotor Powermax II (model not fully legible)
    Control Panel Features:
    X/Y Step dials, VAC, Reset, Store, Ink controls
    Loader Interface:
    Output/Input elevator, centering fingers, flat finder
    Wafer Chuck:
    Circular vacuum chuck with rotation (CW/CCW)
    Shipping Method:
    Freight required
    Seller Notes:
    Sold AS-IS. Includes Dell E770P 17" CRT monitor and Logitech keyboard. Missing some parts.
    Condition Notes:
    Pacific Western Systems P5NMS Wafer Prober sold AS-IS for parts or repair. Has not been tested; appears to be missing some parts. Not guaranteed functional. Includes Dell 17" CRT monitor and keyboard. Freight shipping required.
    $4,500.00
    Was: $9,000.00
  • Semiconductor Equipment Corp 4450 Hot Gas Rework Wire Bond Inspection Station — right-front three-quarter view showing full unit with stage, articulating arm, and inspection lamp Semiconductor Equipment Corp 4450 — rear view showing black panel with label, power cable, and gooseneck inspection lamp

    Semiconductor Equipment Corp 4450 Hot Gas Rework Wire Bond Inspection Station

    Semiconductor Equip

    $325.00
    Was: $650.00
    Semiconductor Equipment Corp 4450 Hot Gas Rework Wire Bond Inspection StationBenchtop station designed for wire bond rework and hot gas rework operations on semiconductor components. Combines inspection and rework capabilities with integrated gas flow...
    46476
    SKU:
    46476
    Availability:
    Usually ships within 1-2 business days.
    Weight:
    30.00 LBS
    Brand:
    Semiconductor Equipment Corp
    Model:
    4450
    MPN:
    4450
    Type:
    Hot Gas Rework & Wire Bond Inspection Station
    SKU:
    46476
    Condition:
    As-Is / For Parts or Not Working
    Seller Notes:
    Includes all components shown in photos: stage, inspection lamp, gas flow meter, pressure gauge, articulating arm, cables
    Country/Region of Manufacture:
    United States
    Power Requirements:
    110V AC, 1A, 60Hz, Single Phase
    Voltage:
    110V AC
    Amperage:
    1A
    Phase:
    Single Phase
    Frequency:
    60 Hz
    Form Factor:
    Benchtop
    Application:
    Wire Bond Rework, Hot Gas Rework, Semiconductor Inspection
    Gas Controls:
    Gas Temperature control, Gas Flow meter (Dwyer rotameter, 0–20 scale)
    Stage:
    Flat work stage with articulating inspection/bond arm
    Included Components:
    Gooseneck inspection lamp, pressure gauge, gas flow rotameter, work stage, articulating arm, power cable
    Condition Notes:
    Semiconductor Equipment Corp 4450 Hot Gas Wire Bond Station sold as-is for parts/repair. Not tested or guaranteed functional. All components in photos included: console, stage, arm, lamp, gas controls, cables. Cosmetic wear throughout.
    $325.00
    Was: $650.00
  • Headway Research EC100A EC101 Photo-Resist Spinner Controller front panel view showing Motomatic tachometer meter, timer dial, speed knob, and ON/OFF toggle Headway Research EC100A front panel close-up showing red indicator light, speed knob, EC 100 Photo-Resist Spinner label, fuse holder, and 5 AMP rating

    Headway Research EC100A Photo-Resist Spinner Controller EC101 0-10000 RPM 5A

    Headway Research

    $275.00
    Was: $550.00
    Headway Research EC100A Photo-Resist Spinner Controller EC101 0-10000 RPM 5ABenchtop controller for photoresist spin coating equipment used in semiconductor wafer fabrication. Operates spinners at variable speeds from 0 to 10,000 RPM with programmable...
    47419
    SKU:
    47419
    Availability:
    Usually ships within 1-2 business days.
    Weight:
    14.00 LBS
    Brand:
    Headway Research
    Model:
    EC100A
    MPN:
    EC100A CB15-7
    Secondary Model:
    EC101
    Type:
    Photo-Resist Spinner Controller
    SKU:
    47419
    Speed Range:
    0-10000 RPM
    Fuse Rating:
    5 Amp
    Timer Range:
    0-120 Seconds
    Tachometer:
    Motomatic (Electro-Craft) analog tachometer
    Timer Type:
    Haydon at Torrington / General Time analog dial
    Form Factor:
    Benchtop / Portable
    Rear Connections:
    VAC Spinner, VAC Pump, Tach Cal, Ungrounded Sig, Int Ref, Ext Ref, J3, J4, J1
    Controls:
    ON/OFF toggle, Speed knob, Timer dial (0-120 sec)
    Application:
    Photoresist spin coating, semiconductor wafer fabrication
    Manufacture Date:
    April 30, 1970
    Serial Number Range:
    S/N 20415 (see internal fields)
    Country/Region of Manufacture:
    United States
    Condition:
    Used – Powers On
    Seller Notes:
    Includes attached power cable. Powers on and indicator light illuminates; not tested further.
    Condition Notes:
    Headway Research EC100A EC101 Photo-Resist Spinner Controller powers on and indicator light illuminates; not tested further. Shows cosmetic wear and patina consistent with vintage 1970 manufacture. Power cable included.
    $275.00
    Was: $550.00
  • Top-down view of HDPE tank filled with assorted broken and whole silicon wafers of various sizes and colors Exterior side view of 30-gallon white HDPE tank on a wheeled dolly, RGI label visible on dolly

    Lot Assorted Silicon Wafers Broken & Whole w/ 30 Gal HDPE Tank 150 LBS

    LOT

    $1,100.00
    Was: $2,300.00
    Lot Assorted Silicon Wafers Broken & Whole w/ 30 Gal HDPE Tank 150 LBSThis is a bulk lot of assorted silicon wafers — a mix of broken pieces and whole wafers — stored in a 30-gallon HDPE tank. The lot weighs approximately 150 lbs in total. Wafers...
    47509
    SKU:
    47509
    Availability:
    Usually ships within 1-2 business days.
    Weight:
    150.00 LBS
    Brand:
    Unbranded
    Model:
    N/A – Bulk Lot
    Type:
    Silicon Wafer Lot – Broken and Whole
    SKU:
    47509
    Condition:
    As-Is / For Parts or Not Working
    Seller Notes:
    Approx. 150 lbs of assorted silicon wafers in a 30-gal HDPE tank. Sold as-is.
    Material:
    Silicon (Si)
    Container Material:
    HDPE (High-Density Polyethylene)
    Container Capacity:
    30 Gallon
    Container Outer Dimensions:
    20 in Diameter x 30 in Tall
    Container Inner Dimensions:
    18 in Diameter x 28 in Tall
    Approximate Weight:
    150 lbs (total lot including tank)
    Wafer Condition:
    Mixed – Broken and Whole
    Wafer Sizes:
    Mixed / Assorted (multiple diameters visible)
    Application:
    Semiconductor scrap, research, material reclaim, education
    Lot Size:
    Bulk lot – quantity varies (sold by tank)
    Country/Region of Manufacture:
    Unknown
    Condition Notes:
    Lot of assorted broken and whole silicon wafers in a 30-gal HDPE tank, approx. 150 lbs. Sold as-is / as photographed. Not sorted or tested. No guarantees on count, size, or specs. Please contact us with questions.
    $1,100.00
    Was: $2,300.00
  • Robotic rotation cylinder 230mm with 560mm stainless steel positioning shaft extended — side profile view showing full length Robotic pick-n-place rotation cylinder with 560mm arm and end effector bracket with rubber roller — three-quarter side view

    Robotic Rotation Cylinder 230mm Pick-n-Place 560mm Positioning Arm THK LTR20

    Robotic

    $275.00
    Was: $550.00
    Robotic Rotation Cylinder 230mm Pick-n-Place 560mm Positioning Arm THK LTR20Inline rotary cylinder with 560mm extended positioning arm for pick-and-place robotic systems. Used as an actuator and positioning component in automated material handling and...
    48702
    SKU:
    48702
    Availability:
    Usually ships within 1-2 business days.
    Weight:
    18.00 LBS
    Brand:
    Unbranded
    Model:
    LTR20
    MPN:
    LTR20
    Type:
    Robotic Rotation Cylinder / Pick-n-Place Actuator
    SKU:
    48702
    Seller Notes:
    Rotation cylinder and 560mm positioning arm included as shown
    Cylinder Length:
    230 mm
    Shaft / Arm Length:
    560 mm
    Mounting Flange Diameter:
    110 mm
    Mounting Flange Thickness:
    15 mm
    Mounting Hole Size:
    9 mm (4 holes on flange)
    Body Diameter (above flange):
    72 mm
    Body Diameter (below flange):
    72 mm
    Overall Cylinder Dimensions:
    230 mm L x 110 mm x 100 mm
    Shaft Diameter:
    20 mm (main arm shaft)
    Shaft Mounting End:
    18 mm diameter x 30 mm long
    End Effector / Hand Attachment:
    11 mm internal radius, 30 mm deep
    Linear Guide Component:
    THK LTR20
    Application:
    Pick-n-Place Robotic System, Semiconductor Automation
    Compatible With:
    Pick-n-Place SMT / semiconductor handling systems
    Material:
    Stainless steel and aluminum body construction
    Form Factor:
    Inline rotary cylinder with extending shaft arm
    Condition Notes:
    This Robotic Rotation Cylinder with 560mm Positioning Arm was pulled from a working pick-n-place system and is in good used condition. Normal wear visible on body and shaft. Flange, bracket, and THK LTR20 bushing intact.
    $275.00
    Was: $550.00