Semiconductor Tools
Semiconductor tools are specialized equipment used in the manufacturing and testing of semiconductor devices. These tools are vital for the production of integrated circuits and other electronic components. Common examples include wafer fabrication tools, semiconductor metrology tools, and packaging equipment. Semiconductor tools are designed to ensure precision, accuracy, and efficiency in the semiconductor manufacturing process. They help in etching, deposition, patterning, and testing of semiconductor materials. These tools play a crucial role in the semiconductor industry, enabling the development of cutting-edge technology. Investing in high-quality semiconductor tools is essential for achieving optimal results in semiconductor manufacturing.
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Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch System
Tegal
$3,000.00Was: $6,000.00Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch SystemRF plasma dry etch tool designed for automated inline semiconductor wafer processing. Performs plasma-based material removal and surface modification on silicon wafers during...42618- SKU:
- 42618
- Availability:
- Usually ships within 3-5 business days via freight carrier; contact us to arrange shipping.
- Weight:
- 370.00 LBS
- Brand:
- Tegal
- Model:
- 803
- MPN:
- 803
- Type:
- Inline Automatic Wafer RF Plasma Etcher
- SKU:
- 42618
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- RF power supply intact; sold as-is for parts or repair; freight shipping required
- Country/Region of Manufacture:
- United States
- Application / Use Case:
- Semiconductor wafer plasma etching, dry etch processing
- Process Type:
- RF Plasma Etch (Dry Etch)
- Wafer Handling:
- Inline automatic wafer transport
- Gas Inputs:
- Multiple gas channels (Gas 1, Gas 2, Gas 3, Gas 4, Cleaning Gas)
- Mass Flow Controller:
- Mass flow controller module present (visible internally)
- RF Power Supply:
- Intact (confirmed present)
- Form Factor:
- Freestanding benchtop/floor unit on casters
- Control Interface:
- Front panel digital displays and switches
- Approximate Weight:
- ~400 lbs (freight shipping required)
- Condition Notes:
- Tegal 803 RF Plasma Etcher sold as-is for parts or repair. We were unable to test it; no functionality guaranteed. RF power supply intact. Power cable ends show corrosion. ~400 lbs, freight required.
$3,000.00Was: $6,000.00 -
Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For Parts
Tegal
$1,500.00Was: $3,000.00Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For PartsInline RF plasma wafer etcher designed for semiconductor processing. This motorized system performs reactive ion etching (RIE) on wafers using four process gas lines and automated...42622- SKU:
- 42622
- Availability:
- Usually ships within 3-5 business days via freight carrier — contact us to arrange.
- Weight:
- 350.00 LBS
- Brand:
- Tegal
- Model:
- 803
- MPN:
- 803
- Type:
- Inline RF Plasma Wafer Etcher
- SKU:
- 42622
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold as-is for parts or repair. Cover removed; all major components present.
- Country/Region of Manufacture:
- United States
- Serial Number (Internal):
- 8030293
- Application / Use Case:
- RF Plasma Etching, Semiconductor Wafer Processing
- Process Type:
- RF Plasma Etch (Reactive Ion Etch / RIE)
- Configuration:
- Inline Automatic
- Gas Inputs:
- 4 process gas lines (GAS 1, GAS 2, GAS 3, GAS 4) + cleaning gas
- Control Panel:
- Volts/Torr, % Flow/MFC, Temperature, Watts, Process Status, Wafer Status
- Vacuum Connection:
- To Vacuum Pump port visible on rear panel
- Coolant Connections:
- Coolant In / Coolant Out ports on rear panel
- Power Connection:
- Heavy-duty multi-pin plug (visible in photos)
- Power Outlets:
- Chart & Service Power Outlets, 24 VAC, DC Supply on control chassis
- Form Factor:
- Freestanding Inline System
- Approximate Weight:
- ~400 lbs — freight shipping required
- Wafer Handler:
- Motorized inline wafer transport with end effectors on both sides
- Interlock:
- Top cover interlock and Interlock Reset present
- Compatible With:
- Tegal 803 series plasma etch process modules
- Manufacturer Location:
- Tegal Corporation, Novato, CA 94947
- Condition Notes:
- Tegal 803 Plasma Inline RF Wafer Etcher sold as-is for parts or repair. Untested, no functionality guaranteed. Major internal components present. ~400 lbs, freight required. Please review photos and contact us with questions.
$1,500.00Was: $3,000.00 -
Tegal 701D Plasma Inline Wafer RF Etcher Semiconductor Etch System Parts
Tegal
$1,200.00Was: $2,400.00Tegal 701D Plasma Inline Wafer RF Etcher Semiconductor Etch System PartsThe Tegal 701D is a plasma inline RF etcher designed for dry plasma etching of semiconductor wafers in a production fab environment. Built by Tegal Corporation of Novato, California,...42625- SKU:
- 42625
- Availability:
- Usually ships within 1-2 business days of cleared payment.
- Weight:
- 320.00 LBS
- Brand:
- Tegal
- Model:
- 701D
- MPN:
- 701
- Secondary Model:
- T701D
- SKU:
- 42625
- Type:
- Plasma Inline Wafer RF Etcher
- Condition:
- As-Is / For Parts or Not Working
- Application:
- Plasma Etch / Semiconductor Wafer Processing
- Process Type:
- RF Plasma Etch (Dry Etch)
- Configuration:
- Inline with Load and Unload Cassette Stations
- RF Channels:
- 2 (Chan I and Chan II)
- Power Requirements:
- 115V AC, 60Hz (Service 1A, RF 7A SB, Logic 6A)
- Gas System:
- Multi-channel gas manifold, 500 PSI max, N2 80 PSI, N2 37 PSI
- Mass Flow Controller:
- Unit Instruments UFC-1000, 0-5VDC set point
- Cooling:
- Liquid coolant in/out connections on rear
- Vacuum Connection:
- To Vacuum Pump port on rear
- DC Bias:
- DC Bias control and display (front panel)
- Front Panel Controls:
- Pressure, Flow, Temp displays; Chamber Pressure meter; RF On, Chan I/II selectors
- Seller Notes:
- Sold as-is for parts. Includes mass flow controller, control boards, gas plumbing, load/unload stations, and power cable.
- Country/Region of Manufacture:
- United States
- Form Factor:
- Freestanding Console on Casters
- Condition Notes:
- Tegal 701D Plasma Inline RF Etcher sold as-is for parts or repair. Not tested or guaranteed functional. Includes mass flow controller, control PCBs, gas manifold, load/unload stations, and power cable. Please contact us with questions.
$1,200.00Was: $2,400.00 -
Pacific Western Systems P5NMS Wafer Prober Semi-Automatic PWS P50 Semiconductor
Pacific Western Systems
$4,500.00Was: $9,000.00Pacific Western Systems P5NMS Wafer Prober Semi-Automatic PWS P50 SemiconductorSemi-automatic wafer prober designed for semiconductor wafer probing and inspection applications. Features a circular vacuum chuck with rotation capability and manual X/Y step...44945- SKU:
- 44945
- Availability:
- Freight shipment required; contact us for a shipping quote or to arrange local pickup.
- Weight:
- 865.00 LBS
- Brand:
- Pacific Western Systems
- Model:
- P5NMS
- MPN:
- P5NMS
- Secondary Model:
- P50
- SKU:
- 44945
- Type:
- Semi-Automatic Wafer Prober
- Condition:
- As-Is / For Parts or Not Working
- Application:
- Semiconductor Wafer Probing / Wafer Inspection
- Automation Level:
- Semi-Automatic
- Sub-System:
- PWS P50
- Included Monitor:
- Dell E770P 17" CRT Monitor
- Included Keyboard:
- Logitech USB Keyboard
- Overall Dimensions:
- 51" W x 41" D x 65" H
- Approximate Weight:
- 865 lbs
- Country/Region of Manufacture:
- United States
- Stepper Motor:
- Compumotor Powermax II (model not fully legible)
- Control Panel Features:
- X/Y Step dials, VAC, Reset, Store, Ink controls
- Loader Interface:
- Output/Input elevator, centering fingers, flat finder
- Wafer Chuck:
- Circular vacuum chuck with rotation (CW/CCW)
- Shipping Method:
- Freight required
- Seller Notes:
- Sold AS-IS. Includes Dell E770P 17" CRT monitor and Logitech keyboard. Missing some parts.
- Condition Notes:
- Pacific Western Systems P5NMS Wafer Prober sold AS-IS for parts or repair. Has not been tested; appears to be missing some parts. Not guaranteed functional. Includes Dell 17" CRT monitor and keyboard. Freight shipping required.
$4,500.00Was: $9,000.00 -
Semiconductor Equipment Corp 4450 Hot Gas Rework Wire Bond Inspection Station
Semiconductor Equip
$325.00Was: $650.00Semiconductor Equipment Corp 4450 Hot Gas Rework Wire Bond Inspection StationBenchtop station designed for wire bond rework and hot gas rework operations on semiconductor components. Combines inspection and rework capabilities with integrated gas flow...46476- SKU:
- 46476
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 30.00 LBS
- Brand:
- Semiconductor Equipment Corp
- Model:
- 4450
- MPN:
- 4450
- Type:
- Hot Gas Rework & Wire Bond Inspection Station
- SKU:
- 46476
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Includes all components shown in photos: stage, inspection lamp, gas flow meter, pressure gauge, articulating arm, cables
- Country/Region of Manufacture:
- United States
- Power Requirements:
- 110V AC, 1A, 60Hz, Single Phase
- Voltage:
- 110V AC
- Amperage:
- 1A
- Phase:
- Single Phase
- Frequency:
- 60 Hz
- Form Factor:
- Benchtop
- Application:
- Wire Bond Rework, Hot Gas Rework, Semiconductor Inspection
- Gas Controls:
- Gas Temperature control, Gas Flow meter (Dwyer rotameter, 0–20 scale)
- Stage:
- Flat work stage with articulating inspection/bond arm
- Included Components:
- Gooseneck inspection lamp, pressure gauge, gas flow rotameter, work stage, articulating arm, power cable
- Condition Notes:
- Semiconductor Equipment Corp 4450 Hot Gas Wire Bond Station sold as-is for parts/repair. Not tested or guaranteed functional. All components in photos included: console, stage, arm, lamp, gas controls, cables. Cosmetic wear throughout.
$325.00Was: $650.00 -
Headway Research EC100A Photo-Resist Spinner Controller EC101 0-10000 RPM 5A
Headway Research
$275.00Was: $550.00Headway Research EC100A Photo-Resist Spinner Controller EC101 0-10000 RPM 5ABenchtop controller for photoresist spin coating equipment used in semiconductor wafer fabrication. Operates spinners at variable speeds from 0 to 10,000 RPM with programmable...47419- SKU:
- 47419
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 14.00 LBS
- Brand:
- Headway Research
- Model:
- EC100A
- MPN:
- EC100A CB15-7
- Secondary Model:
- EC101
- Type:
- Photo-Resist Spinner Controller
- SKU:
- 47419
- Speed Range:
- 0-10000 RPM
- Fuse Rating:
- 5 Amp
- Timer Range:
- 0-120 Seconds
- Tachometer:
- Motomatic (Electro-Craft) analog tachometer
- Timer Type:
- Haydon at Torrington / General Time analog dial
- Form Factor:
- Benchtop / Portable
- Rear Connections:
- VAC Spinner, VAC Pump, Tach Cal, Ungrounded Sig, Int Ref, Ext Ref, J3, J4, J1
- Controls:
- ON/OFF toggle, Speed knob, Timer dial (0-120 sec)
- Application:
- Photoresist spin coating, semiconductor wafer fabrication
- Manufacture Date:
- April 30, 1970
- Serial Number Range:
- S/N 20415 (see internal fields)
- Country/Region of Manufacture:
- United States
- Condition:
- Used – Powers On
- Seller Notes:
- Includes attached power cable. Powers on and indicator light illuminates; not tested further.
- Condition Notes:
- Headway Research EC100A EC101 Photo-Resist Spinner Controller powers on and indicator light illuminates; not tested further. Shows cosmetic wear and patina consistent with vintage 1970 manufacture. Power cable included.
$275.00Was: $550.00 -
Lot Assorted Silicon Wafers Broken & Whole w/ 30 Gal HDPE Tank 150 LBS
LOT
$1,100.00Was: $2,300.00Lot Assorted Silicon Wafers Broken & Whole w/ 30 Gal HDPE Tank 150 LBSThis is a bulk lot of assorted silicon wafers — a mix of broken pieces and whole wafers — stored in a 30-gallon HDPE tank. The lot weighs approximately 150 lbs in total. Wafers...47509- SKU:
- 47509
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 150.00 LBS
- Brand:
- Unbranded
- Model:
- N/A – Bulk Lot
- Type:
- Silicon Wafer Lot – Broken and Whole
- SKU:
- 47509
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Approx. 150 lbs of assorted silicon wafers in a 30-gal HDPE tank. Sold as-is.
- Material:
- Silicon (Si)
- Container Material:
- HDPE (High-Density Polyethylene)
- Container Capacity:
- 30 Gallon
- Container Outer Dimensions:
- 20 in Diameter x 30 in Tall
- Container Inner Dimensions:
- 18 in Diameter x 28 in Tall
- Approximate Weight:
- 150 lbs (total lot including tank)
- Wafer Condition:
- Mixed – Broken and Whole
- Wafer Sizes:
- Mixed / Assorted (multiple diameters visible)
- Application:
- Semiconductor scrap, research, material reclaim, education
- Lot Size:
- Bulk lot – quantity varies (sold by tank)
- Country/Region of Manufacture:
- Unknown
- Condition Notes:
- Lot of assorted broken and whole silicon wafers in a 30-gal HDPE tank, approx. 150 lbs. Sold as-is / as photographed. Not sorted or tested. No guarantees on count, size, or specs. Please contact us with questions.
$1,100.00Was: $2,300.00 -
Robotic Rotation Cylinder 230mm Pick-n-Place 560mm Positioning Arm THK LTR20
Robotic
$275.00Was: $550.00Robotic Rotation Cylinder 230mm Pick-n-Place 560mm Positioning Arm THK LTR20Inline rotary cylinder with 560mm extended positioning arm for pick-and-place robotic systems. Used as an actuator and positioning component in automated material handling and...48702- SKU:
- 48702
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 18.00 LBS
- Brand:
- Unbranded
- Model:
- LTR20
- MPN:
- LTR20
- Type:
- Robotic Rotation Cylinder / Pick-n-Place Actuator
- SKU:
- 48702
- Seller Notes:
- Rotation cylinder and 560mm positioning arm included as shown
- Cylinder Length:
- 230 mm
- Shaft / Arm Length:
- 560 mm
- Mounting Flange Diameter:
- 110 mm
- Mounting Flange Thickness:
- 15 mm
- Mounting Hole Size:
- 9 mm (4 holes on flange)
- Body Diameter (above flange):
- 72 mm
- Body Diameter (below flange):
- 72 mm
- Overall Cylinder Dimensions:
- 230 mm L x 110 mm x 100 mm
- Shaft Diameter:
- 20 mm (main arm shaft)
- Shaft Mounting End:
- 18 mm diameter x 30 mm long
- End Effector / Hand Attachment:
- 11 mm internal radius, 30 mm deep
- Linear Guide Component:
- THK LTR20
- Application:
- Pick-n-Place Robotic System, Semiconductor Automation
- Compatible With:
- Pick-n-Place SMT / semiconductor handling systems
- Material:
- Stainless steel and aluminum body construction
- Form Factor:
- Inline rotary cylinder with extending shaft arm
- Condition Notes:
- This Robotic Rotation Cylinder with 560mm Positioning Arm was pulled from a working pick-n-place system and is in good used condition. Normal wear visible on body and shaft. Flange, bracket, and THK LTR20 bushing intact.
$275.00Was: $550.00