Tegal 903e 40-297-002 Plasma Etcher Pin 54mm x 3mm Quartz Lift Pin Part

Tegal 903e 40-297-002 Plasma Etcher Pin 54mm x 3mm Quartz Lift Pin Part

This is a new lift pin for the Tegal 903e plasma etcher, manufactured by Tegal Corporation under part number 40-297-002. The pin is a slender cylindrical quartz rod — transparent and smooth — measuring 54mm in length and 3mm in diameter, with lightly tapered ends visible in the photos. Lift pins like this one are critical consumable components inside plasma etch chambers, used to raise and lower semiconductor wafers onto and off of the chuck without mechanical contact damage.

Specifications & What's Included

• Manufacturer: Tegal Corporation
• Compatible System: Tegal 903e Plasma Etcher
• Part Number: 40-297-002
• Material: Quartz (transparent, as visible in photos)
• Length: 54mm (approximately 2.125 in)
• Diameter: 3mm (approximately 0.125 in)
• End Profile: Lightly tapered/rounded ends (visible in photos)
• Quantity: 1 pin
• Condition: New — unused; may be out of original manufacturer packaging

Applications

Lift pins are a standard wear item in dry plasma etch systems. Inside the process chamber, they pass through holes in the wafer chuck and extend upward to lift the wafer clear of the chuck surface during robot transfer, then retract flush so the wafer seats for processing. The Tegal 903e is a single-wafer reactive ion etcher (RIE) that was widely used in semiconductor fabrication and MEMS research labs from the 1980s through the 2000s for dielectric and polysilicon etch processes. Quartz pins are used in these systems because quartz withstands the corrosive plasma chemistry and elevated chamber temperatures without contaminating the process. Replacement pins are a routine maintenance item — they chip or break over time from repeated wafer contact — making new-old-stock originals like this part especially useful for labs still running 903e tools.