Tegal
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Tegal PlasmaLine 200 Plasma Barrel Etcher w/ Comdel CPS-200AX RF Power Supply
Tegal
$3,500.00Was: $7,000.00Tegal PlasmaLine 200 Plasma Barrel Etcher w/ Comdel CPS-200AX RF Power SupplyBenchtop plasma barrel etcher with cylindrical quartz chamber designed for semiconductor processing applications. Unit...52023- SKU:
- 52023
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 100.00 LBS
- Brand:
- Tegal
- Model:
- PlasmaLine 200
- MPN:
- 200
- Type:
- Plasma Barrel Etcher / Plasma Asher
- SKU:
- 52023
- Included RF Power Supply Brand:
- Comdel
- Included RF Power Supply Model:
- CPS-200AX
- RF Power Supply Serial Number (Comdel):
- AX-86
- RF Power Supply Date of Manufacture:
- 1/3/94
- Main Unit Serial Number:
- 0238
- Main Unit Date of Manufacture:
- 5/79
- Country/Region of Manufacture:
- United States
- Power Requirements (Comdel RF Supply):
- 115V AC
- RF Section Configuration:
- OEM RF section disconnected; rewired for Comdel CPS-200AX RF supply
- Control Power Source:
- Original Tegal supply (control power only)
- Application:
- Plasma barrel etching, photoresist ashing, semiconductor processing
- Form Factor:
- Benchtop / Tabletop
- Chamber Type:
- Barrel/Tunnel — cylindrical quartz chamber with wafer rack
- Front Panel Controls:
- Power On, PWR Supply Enable, Power Adjust, Start/Stop, Tuning, Flow Adj
- Gas Flow Control:
- Flow meter / flow adjustment knob visible on front
- Meter:
- Analog FWD/REF/PRES/FLOW meter on front panel
- Rear Panel:
- DANGER HIGH VOLTAGE section, SENS MIN/MAX, PROC MONITOR, fuse holders, J2 connector
- FCC Certification:
- FCC Regulation 18 (ISM band)
- Seller Notes:
- Includes Comdel CPS-200AX RF power supply (interconnected). Tegal RF section disconnected; Tegal supply provides control power only.
- Condition Notes:
- This Tegal PlasmaLine 200 Plasma Barrel Etcher has been tested with the included Comdel CPS-200AX RF power supply and is working as intended. Note that the original RF section of the Tegal power supply has been disconnected and the system has been
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$3,500.00Was: $7,000.00 -
Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch System
Tegal
$3,000.00Was: $6,000.00Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch SystemRF plasma dry etch tool designed for automated inline semiconductor wafer processing. Performs plasma-based material removal...42618- SKU:
- 42618
- Availability:
- Usually ships within 3-5 business days via freight carrier; contact us to arrange shipping.
- Weight:
- 370.00 LBS
- Brand:
- Tegal
- Model:
- 803
- MPN:
- 803
- Type:
- Inline Automatic Wafer RF Plasma Etcher
- SKU:
- 42618
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- RF power supply intact; sold as-is for parts or repair; freight shipping required
- Country/Region of Manufacture:
- United States
- Application / Use Case:
- Semiconductor wafer plasma etching, dry etch processing
- Process Type:
- RF Plasma Etch (Dry Etch)
- Wafer Handling:
- Inline automatic wafer transport
- Gas Inputs:
- Multiple gas channels (Gas 1, Gas 2, Gas 3, Gas 4, Cleaning Gas)
- Mass Flow Controller:
- Mass flow controller module present (visible internally)
- RF Power Supply:
- Intact (confirmed present)
- Form Factor:
- Freestanding benchtop/floor unit on casters
- Control Interface:
- Front panel digital displays and switches
- Approximate Weight:
- ~400 lbs (freight shipping required)
- Condition Notes:
- Tegal 803 RF Plasma Etcher sold as-is for parts or repair. We were unable to test it; no functionality guaranteed. RF power supply intact. Power cable ends show corrosion. ~400 lbs, freight required.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$3,000.00Was: $6,000.00 -
Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For Parts
Tegal
$1,500.00Was: $3,000.00Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For PartsInline RF plasma wafer etcher designed for semiconductor processing. This motorized system performs reactive ion etching (RIE)...42622- SKU:
- 42622
- Availability:
- Usually ships within 3-5 business days via freight carrier — contact us to arrange.
- Weight:
- 350.00 LBS
- Brand:
- Tegal
- Model:
- 803
- MPN:
- 803
- Type:
- Inline RF Plasma Wafer Etcher
- SKU:
- 42622
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold as-is for parts or repair. Cover removed; all major components present.
- Country/Region of Manufacture:
- United States
- Serial Number (Internal):
- 8030293
- Application / Use Case:
- RF Plasma Etching, Semiconductor Wafer Processing
- Process Type:
- RF Plasma Etch (Reactive Ion Etch / RIE)
- Configuration:
- Inline Automatic
- Gas Inputs:
- 4 process gas lines (GAS 1, GAS 2, GAS 3, GAS 4) + cleaning gas
- Control Panel:
- Volts/Torr, % Flow/MFC, Temperature, Watts, Process Status, Wafer Status
- Vacuum Connection:
- To Vacuum Pump port visible on rear panel
- Coolant Connections:
- Coolant In / Coolant Out ports on rear panel
- Power Connection:
- Heavy-duty multi-pin plug (visible in photos)
- Power Outlets:
- Chart & Service Power Outlets, 24 VAC, DC Supply on control chassis
- Form Factor:
- Freestanding Inline System
- Approximate Weight:
- ~400 lbs — freight shipping required
- Wafer Handler:
- Motorized inline wafer transport with end effectors on both sides
- Interlock:
- Top cover interlock and Interlock Reset present
- Compatible With:
- Tegal 803 series plasma etch process modules
- Manufacturer Location:
- Tegal Corporation, Novato, CA 94947
- Condition Notes:
- Tegal 803 Plasma Inline RF Wafer Etcher sold as-is for parts or repair. Untested, no functionality guaranteed. Major internal components present. ~400 lbs, freight required. Please review photos and contact us with questions.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$1,500.00Was: $3,000.00 -
Tegal 701D Plasma Inline Wafer RF Etcher Semiconductor Etch System Parts
Tegal
$1,200.00Was: $2,400.00Tegal 701D Plasma Inline Wafer RF Etcher Semiconductor Etch System PartsThe Tegal 701D is a plasma inline RF etcher designed for dry plasma etching of semiconductor wafers in a production fab...42625- SKU:
- 42625
- Availability:
- Usually ships within 1-2 business days of cleared payment.
- Weight:
- 320.00 LBS
- Brand:
- Tegal
- Model:
- 701D
- MPN:
- 701
- Secondary Model:
- T701D
- SKU:
- 42625
- Type:
- Plasma Inline Wafer RF Etcher
- Condition:
- As-Is / For Parts or Not Working
- Application:
- Plasma Etch / Semiconductor Wafer Processing
- Process Type:
- RF Plasma Etch (Dry Etch)
- Configuration:
- Inline with Load and Unload Cassette Stations
- RF Channels:
- 2 (Chan I and Chan II)
- Power Requirements:
- 115V AC, 60Hz (Service 1A, RF 7A SB, Logic 6A)
- Gas System:
- Multi-channel gas manifold, 500 PSI max, N2 80 PSI, N2 37 PSI
- Mass Flow Controller:
- Unit Instruments UFC-1000, 0-5VDC set point
- Cooling:
- Liquid coolant in/out connections on rear
- Vacuum Connection:
- To Vacuum Pump port on rear
- DC Bias:
- DC Bias control and display (front panel)
- Front Panel Controls:
- Pressure, Flow, Temp displays; Chamber Pressure meter; RF On, Chan I/II selectors
- Seller Notes:
- Sold as-is for parts. Includes mass flow controller, control boards, gas plumbing, load/unload stations, and power cable.
- Country/Region of Manufacture:
- United States
- Form Factor:
- Freestanding Console on Casters
- Condition Notes:
- Tegal 701D Plasma Inline RF Etcher sold as-is for parts or repair. Not tested or guaranteed functional. Includes mass flow controller, control PCBs, gas manifold, load/unload stations, and power cable. Please contact us with questions.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$1,200.00Was: $2,400.00 -
Tegal 903e 40-297-002 Plasma Etcher Pin 54mm x 3mm Quartz Lift Pin Part
Tegal
$30.00Was: $60.00Tegal 903e 40-297-002 Plasma Etcher Pin 54mm x 3mm Quartz Lift Pin PartThis is a new lift pin for the Tegal 903e plasma etcher, manufactured by Tegal Corporation under part number 40-297-002. The pin...27387- SKU:
- 27387
- Availability:
- Usually ships within 1–2 business days.
- Weight:
- 2.00 LBS
- Brand:
- Tegal
- Model:
- 903e
- MPN:
- 40-297-002
- Type:
- Plasma Etcher Lift Pin
- SKU:
- 27387
- Compatible With:
- Tegal 903e Plasma Etcher
- Material:
- Quartz
- Length:
- 54mm (2.125 in)
- Diameter:
- 3mm (0.125 in)
- Application:
- Plasma Etch / Semiconductor Wafer Processing
- Seller Notes:
- New part; may be out of original manufacturer packaging.
- Country/Region of Manufacture:
- United States
- Condition Notes:
- Tegal 903e lift pin (40-297-002) is new and unused. May be out of original packaging but the part itself is unissued and in new condition. No wear or defects visible.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$30.00Was: $60.00 -
Tegal 99-200-005 903e Sensor Interface Spatula SIS-5 Rev G PCB Module
Tegal
$295.00Was: $600.00Tegal 99-200-005 903e Sensor Interface Spatula SIS-5 Rev G PCB ModuleSensor Interface PCB module designed for the Tegal 903e Plasma Etch System. This card handles sensor signal processing and...27385- SKU:
- 27385
- Availability:
- Usually ships within 1–2 business days.
- Weight:
- 5.00 LBS
- Brand:
- Tegal
- Model:
- 99-200-005
- MPN:
- 99-200-005
- Secondary Model:
- M300353
- Type:
- Sensor Interface PCB Module
- SKU:
- 27385
- Revision:
- Rev G
- Sub-Model / Designation:
- SIS-5
- Compatible With:
- Tegal 903e Plasma Etch System
- Application:
- Plasma Etch / Semiconductor Fabrication
- Form Factor:
- PCB Card / Module
- Condition:
- New – Old Stock, may be out of original box
- Seller Notes:
- New old stock PCB module in anti-static bag with Tegal label tag attached.
- Country/Region of Manufacture:
- United States
- Condition Notes:
- Tegal 99-200-005 SIS-5 Rev G Sensor Interface PCB is new old stock — unused, uninstalled, in anti-static bag with Tegal label tag. May be out of original box. No signs of use.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$295.00Was: $600.00 -
Tegal 903e IGC-5 PCB Module 99-126-005 Rev P Plasma Etcher Semiconductor Card
Tegal
$300.00Was: $600.00Tegal 903e IGC-5 PCB Module 99-126-005 Rev P Plasma Etcher Semiconductor CardPCB module designed for the Tegal 903e plasma etcher system. This circuit board is a core component used in semiconductor...27382- SKU:
- 27382
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 4.00 LBS
- Brand:
- Tegal
- Model:
- 903e
- MPN:
- 99-126-005
- Secondary Model:
- IGC-5
- Hardware Revision:
- Rev P
- Type:
- PCB Module / Circuit Board
- SKU:
- 27382
- Compatible With:
- Tegal 903e Plasma Etcher
- Application:
- Plasma Etch / Semiconductor Processing
- Form Factor:
- PCB Card / Module
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Board only; pulled from working Tegal 903e plasma etcher system.
- Country/Region of Manufacture:
- United States
- Condition Notes:
- Tegal 903e IGC-5 PCB module 99-126-005 Rev P pulled from a working plasma etcher. Inspected and in good condition — no visible burns or damage. Functional when removed from service.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$300.00Was: $600.00