Tegal
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Tegal PlasmaLine 200 Plasma Barrel Etcher w/ Comdel CPS-200AX RF Power Supply
Tegal
$1,200.00Was: $2,400.00Tegal PlasmaLine 200 Plasma Barrel Etcher w/ Comdel CPS-200AX RF Power SupplyBenchtop plasma barrel etcher with cylindrical quartz chamber designed for semiconductor processing applications. Unit...52023- SKU:
- 52023
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 100.00 LBS
- Brand:
- Tegal
- Model:
- PlasmaLine 200
- MPN:
- 200
- Type:
- Plasma Barrel Etcher / Plasma Asher
- SKU:
- 52023
- Included RF Power Supply Brand:
- Comdel
- Included RF Power Supply Model:
- CPS-200AX
- RF Power Supply Serial Number (Comdel):
- AX-86
- RF Power Supply Date of Manufacture:
- 1/3/94
- Main Unit Serial Number:
- 0238
- Main Unit Date of Manufacture:
- 5/79
- Country/Region of Manufacture:
- United States
- Power Requirements (Comdel RF Supply):
- 115V AC
- RF Section Configuration:
- OEM RF section disconnected; rewired for Comdel CPS-200AX RF supply
- Control Power Source:
- Original Tegal supply (control power only)
- Application:
- Plasma barrel etching, photoresist ashing, semiconductor processing
- Form Factor:
- Benchtop / Tabletop
- Chamber Type:
- Barrel/Tunnel — cylindrical quartz chamber with wafer rack
- Front Panel Controls:
- Power On, PWR Supply Enable, Power Adjust, Start/Stop, Tuning, Flow Adj
- Gas Flow Control:
- Flow meter / flow adjustment knob visible on front
- Meter:
- Analog FWD/REF/PRES/FLOW meter on front panel
- Rear Panel:
- DANGER HIGH VOLTAGE section, SENS MIN/MAX, PROC MONITOR, fuse holders, J2 connector
- FCC Certification:
- FCC Regulation 18 (ISM band)
- Seller Notes:
- Includes Comdel CPS-200AX RF power supply (interconnected). Tegal RF section disconnected; Tegal supply provides control power only.
- Condition:
- Used – Inspected and Tested
- Condition Notes:
- Tegal PlasmaLine 200 Plasma Barrel Etcher tested with included Comdel CPS-200AX RF supply — working as intended. Original Tegal RF section disconnected; Tegal supply provides control power only. Cosmetic wear consistent with age. Used.
$1,200.00Was: $2,400.00 -
Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch System
Tegal
$3,000.00Was: $6,000.00Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch SystemRF plasma dry etch tool designed for automated inline semiconductor wafer processing. Performs plasma-based material removal...42618- SKU:
- 42618
- Availability:
- Usually ships within 3-5 business days via freight carrier; contact us to arrange shipping.
- Weight:
- 370.00 LBS
- Brand:
- Tegal
- Model:
- 803
- MPN:
- 803
- Type:
- Inline Automatic Wafer RF Plasma Etcher
- SKU:
- 42618
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- RF power supply intact; sold as-is for parts or repair; freight shipping required
- Country/Region of Manufacture:
- United States
- Application / Use Case:
- Semiconductor wafer plasma etching, dry etch processing
- Process Type:
- RF Plasma Etch (Dry Etch)
- Wafer Handling:
- Inline automatic wafer transport
- Gas Inputs:
- Multiple gas channels (Gas 1, Gas 2, Gas 3, Gas 4, Cleaning Gas)
- Mass Flow Controller:
- Mass flow controller module present (visible internally)
- RF Power Supply:
- Intact (confirmed present)
- Form Factor:
- Freestanding benchtop/floor unit on casters
- Control Interface:
- Front panel digital displays and switches
- Approximate Weight:
- ~400 lbs (freight shipping required)
- Condition Notes:
- Tegal 803 RF Plasma Etcher sold as-is for parts or repair. We were unable to test it; no functionality guaranteed. RF power supply intact. Power cable ends show corrosion. ~400 lbs, freight required.
$3,000.00Was: $6,000.00 -
Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For Parts
Tegal
$1,500.00Was: $3,000.00Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For PartsInline RF plasma wafer etcher designed for semiconductor processing. This motorized system performs reactive ion etching (RIE)...42622- SKU:
- 42622
- Availability:
- Usually ships within 3-5 business days via freight carrier — contact us to arrange.
- Weight:
- 350.00 LBS
- Brand:
- Tegal
- Model:
- 803
- MPN:
- 803
- Type:
- Inline RF Plasma Wafer Etcher
- SKU:
- 42622
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold as-is for parts or repair. Cover removed; all major components present.
- Country/Region of Manufacture:
- United States
- Serial Number (Internal):
- 8030293
- Application / Use Case:
- RF Plasma Etching, Semiconductor Wafer Processing
- Process Type:
- RF Plasma Etch (Reactive Ion Etch / RIE)
- Configuration:
- Inline Automatic
- Gas Inputs:
- 4 process gas lines (GAS 1, GAS 2, GAS 3, GAS 4) + cleaning gas
- Control Panel:
- Volts/Torr, % Flow/MFC, Temperature, Watts, Process Status, Wafer Status
- Vacuum Connection:
- To Vacuum Pump port visible on rear panel
- Coolant Connections:
- Coolant In / Coolant Out ports on rear panel
- Power Connection:
- Heavy-duty multi-pin plug (visible in photos)
- Power Outlets:
- Chart & Service Power Outlets, 24 VAC, DC Supply on control chassis
- Form Factor:
- Freestanding Inline System
- Approximate Weight:
- ~400 lbs — freight shipping required
- Wafer Handler:
- Motorized inline wafer transport with end effectors on both sides
- Interlock:
- Top cover interlock and Interlock Reset present
- Compatible With:
- Tegal 803 series plasma etch process modules
- Manufacturer Location:
- Tegal Corporation, Novato, CA 94947
- Condition Notes:
- Tegal 803 Plasma Inline RF Wafer Etcher sold as-is for parts or repair. Untested, no functionality guaranteed. Major internal components present. ~400 lbs, freight required. Please review photos and contact us with questions.
$1,500.00Was: $3,000.00 -
Tegal 701D Plasma Inline Wafer RF Etcher Semiconductor Etch System Parts
Tegal
$1,200.00Was: $2,400.00Tegal 701D Plasma Inline Wafer RF Etcher Semiconductor Etch System PartsThe Tegal 701D is a plasma inline RF etcher designed for dry plasma etching of semiconductor wafers in a production fab...42625- SKU:
- 42625
- Availability:
- Usually ships within 1-2 business days of cleared payment.
- Weight:
- 320.00 LBS
- Brand:
- Tegal
- Model:
- 701D
- MPN:
- 701
- Secondary Model:
- T701D
- SKU:
- 42625
- Type:
- Plasma Inline Wafer RF Etcher
- Condition:
- As-Is / For Parts or Not Working
- Application:
- Plasma Etch / Semiconductor Wafer Processing
- Process Type:
- RF Plasma Etch (Dry Etch)
- Configuration:
- Inline with Load and Unload Cassette Stations
- RF Channels:
- 2 (Chan I and Chan II)
- Power Requirements:
- 115V AC, 60Hz (Service 1A, RF 7A SB, Logic 6A)
- Gas System:
- Multi-channel gas manifold, 500 PSI max, N2 80 PSI, N2 37 PSI
- Mass Flow Controller:
- Unit Instruments UFC-1000, 0-5VDC set point
- Cooling:
- Liquid coolant in/out connections on rear
- Vacuum Connection:
- To Vacuum Pump port on rear
- DC Bias:
- DC Bias control and display (front panel)
- Front Panel Controls:
- Pressure, Flow, Temp displays; Chamber Pressure meter; RF On, Chan I/II selectors
- Seller Notes:
- Sold as-is for parts. Includes mass flow controller, control boards, gas plumbing, load/unload stations, and power cable.
- Country/Region of Manufacture:
- United States
- Form Factor:
- Freestanding Console on Casters
- Condition Notes:
- Tegal 701D Plasma Inline RF Etcher sold as-is for parts or repair. Not tested or guaranteed functional. Includes mass flow controller, control PCBs, gas manifold, load/unload stations, and power cable. Please contact us with questions.
$1,200.00Was: $2,400.00 -
Tegal 903e 40-297-002 Plasma Etcher Pin 54mm x 3mm Quartz Lift Pin Part
Tegal
$30.00Was: $60.00Tegal 903e 40-297-002 Plasma Etcher Pin 54mm x 3mm Quartz Lift Pin PartThis is a new lift pin for the Tegal 903e plasma etcher, manufactured by Tegal Corporation under part number 40-297-002. The pin...27387- SKU:
- 27387
- Availability:
- Usually ships within 1–2 business days.
- Weight:
- 2.00 LBS
- Brand:
- Tegal
- Model:
- 903e
- MPN:
- 40-297-002
- Type:
- Plasma Etcher Lift Pin
- SKU:
- 27387
- Compatible With:
- Tegal 903e Plasma Etcher
- Material:
- Quartz
- Length:
- 54mm (2.125 in)
- Diameter:
- 3mm (0.125 in)
- Application:
- Plasma Etch / Semiconductor Wafer Processing
- Seller Notes:
- New part; may be out of original manufacturer packaging.
- Country/Region of Manufacture:
- United States
- Condition Notes:
- Tegal 903e lift pin (40-297-002) is new and unused. May be out of original packaging but the part itself is unissued and in new condition. No wear or defects visible.
$30.00Was: $60.00 -
Tegal 99-200-005 903e Sensor Interface Spatula SIS-5 Rev G PCB Module
Tegal
$295.00Was: $600.00Tegal 99-200-005 903e Sensor Interface Spatula SIS-5 Rev G PCB ModuleSensor Interface PCB module designed for the Tegal 903e Plasma Etch System. This card handles sensor signal processing and...27385- SKU:
- 27385
- Availability:
- Usually ships within 1–2 business days.
- Weight:
- 5.00 LBS
- Brand:
- Tegal
- Model:
- 99-200-005
- MPN:
- 99-200-005
- Secondary Model:
- M300353
- Type:
- Sensor Interface PCB Module
- SKU:
- 27385
- Revision:
- Rev G
- Sub-Model / Designation:
- SIS-5
- Compatible With:
- Tegal 903e Plasma Etch System
- Application:
- Plasma Etch / Semiconductor Fabrication
- Form Factor:
- PCB Card / Module
- Condition:
- New – Old Stock, may be out of original box
- Seller Notes:
- New old stock PCB module in anti-static bag with Tegal label tag attached.
- Country/Region of Manufacture:
- United States
- Condition Notes:
- Tegal 99-200-005 SIS-5 Rev G Sensor Interface PCB is new old stock — unused, uninstalled, in anti-static bag with Tegal label tag. May be out of original box. No signs of use.
$295.00Was: $600.00 -
Tegal 903e IGC-5 PCB Module 99-126-005 Rev P Plasma Etcher Semiconductor Card
Tegal
$300.00Was: $600.00Tegal 903e IGC-5 PCB Module 99-126-005 Rev P Plasma Etcher Semiconductor CardPCB module designed for the Tegal 903e plasma etcher system. This circuit board is a core component used in semiconductor...27382- SKU:
- 27382
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 4.00 LBS
- Brand:
- Tegal
- Model:
- 903e
- MPN:
- 99-126-005
- Secondary Model:
- IGC-5
- Hardware Revision:
- Rev P
- Type:
- PCB Module / Circuit Board
- SKU:
- 27382
- Compatible With:
- Tegal 903e Plasma Etcher
- Application:
- Plasma Etch / Semiconductor Processing
- Form Factor:
- PCB Card / Module
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Board only; pulled from working Tegal 903e plasma etcher system.
- Country/Region of Manufacture:
- United States
- Condition Notes:
- Tegal 903e IGC-5 PCB module 99-126-005 Rev P pulled from a working plasma etcher. Inspected and in good condition — no visible burns or damage. Functional when removed from service.
$300.00Was: $600.00