Vacuum Deposition Chambers
Vacuum deposition chambers are specialized equipment used in the manufacturing and research industries to deposit thin films of materials onto a substrate surface. These chambers create a low-pressure environment by removing gases and other contaminants, allowing for precise control over the deposition process. The vacuum deposition chambers utilize techniques such as physical vapor deposition (PVD) and chemical vapor deposition (CVD) to apply coatings of metals, ceramics, and other materials onto various substrates. By maintaining a vacuum environment, these chambers ensure high-quality and uniform deposition, making them essential tools for industries such as electronics, optics, and materials science.
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CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System 208/240V 3-Phase
CHA Industries
$10,000.00Was: $20,000.00CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System 208/240V 3-Phase The CHA Industries SEC-600 is a cryogenic electron-beam (e-beam) physical vapor deposition (PVD) system designed for thin film coating applications in research, optical...52813- SKU:
- 52813
- Availability:
- This item is available and typically ships within 3-5 business days after purchase; please contact us to arrange freight.
- Weight:
- 1,250.00 LBS
- Brand:
- CHA Industries
- Model:
- SEC-600
- MPN:
- SEC-600
- Type:
- E-Beam Cryo Vacuum Deposition System
- SKU:
- 52813
- Condition:
- Used – Inspected, Sold As-Is, Missing Components
- Seller Notes:
- Includes CV-14, IC6000, MPS-3000FC, Auto-Tech II, bell jar. Missing external cryo compressor and e-beam gun/supply.
- Power Requirements:
- 208/240V, 70A, 50/60Hz, 3-Phase, 3 Wire & Ground
- Voltage:
- 208/240V
- Current Rating:
- 70A
- Phase:
- Three Phase
- Frequency:
- 50/60Hz
- Application / Use Case:
- Thin Film Deposition, E-Beam Evaporation, Optical Coating, Semiconductor
- Deposition Method:
- Electron Beam (E-Beam) Evaporation, Ion Beam Assist
- Vacuum Type:
- Cryogenic High Vacuum
- High Vacuum Pump:
- CTI-Cryogenics Cryo-Torr 8, P/N 8033167
- Electron Beam Power Supply:
- Airco Temescal CV-14
- Deposition Controller:
- Inficon IC6000, Model 013-093 (120/220V)
- Ion Gun Power Source:
- IonTech MPS-3000FC
- System Controller:
- CHA Industries Auto-Tech II
- Chamber Type:
- Stainless Steel Bell Jar
- Form Factor:
- Freestanding Cabinet System with Separate Bell Jar
- Gas Inlets:
- Gas 1, Gas 2, Gas 3, Gas 4 plus Vent, Air Out, Air In
- Compatible With:
- CHA Industries SEC series vacuum deposition platforms
- Country/Region of Manufacture:
- United States
- Condition Notes:
- This CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System has been visually inspected and is in good overall cosmetic condition for its age. The system is being sold as-is and as a partial configuration: the external cryopump compressor is
$10,000.00Was: $20,000.00 -
MRC 603-III RF DC Sputtering System 3-Target 208V 3-Phase PVD Thin Film
Material Research Corp
$18,000.00Was: $36,000.00MRC 603-III RF DC Sputtering System 3-Target 208V 3-Phase PVD Thin Film Three-target RF/DC magnetron sputtering system for physical vapor deposition of thin films. Freestanding floor system with load-lock chamber, cryogenic vacuum pumping, and substrate...50528- SKU:
- 50528
- Availability:
- This item requires freight shipping on two pallets. Contact us for a freight quote and to arrange inspection in Ventura, CA.
- Weight:
- 5,000.00 LBS
- Brand:
- Materials Research Corporation (MRC)
- Model:
- 603-III
- MPN:
- 1620-8
- SKU:
- 50528
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Includes CTI cryopump, LN2 cryotrap, 3kW power supply, Omega pyrometer, vacuum control panel
- Country of Manufacture:
- USA
- Form Factor:
- Freestanding Floor System, Multi-Cabinet
- Power Requirements:
- 208V, 160A, 60Hz, 3-Phase
- Application / Use Case:
- RF/DC Magnetron Sputtering, PVD Thin Film Deposition
- Number of Targets:
- 3
- Sputtering Modes:
- RF, DC, DC Magnetron
- RF Power Supply:
- 1.5 kW RF
- DC Sputtering Power Supply:
- 3kW
- Vacuum System:
- 8-inch CTI Cryogenics Cryo-Tor Cryopump
- Additional Vacuum:
- LN2 Cryotrap for water vapor pumping
- Load-Lock:
- Yes — approx. 13 x 13 inch work holder capacity
- Substrate Heating:
- Yes — substrate heater included
- Temperature Measurement:
- Omega Optical Pyrometer
- RF Bias:
- RF bias on substrate supported; adjustable RF phase
- Compatible With:
- PVD semiconductor, solar, and optical coating processes
- Shipping Method:
- Freight — two pallets required
- Inspection Available:
- Yes — Ventura, CA
- Condition Notes:
- MRC 603-III RF/DC Sputtering System sold as-is. System was moved into storage and never powered or tested after last move. Vacuum leak check required before use. Inspection available in Ventura, CA. No functionality guaranteed.
$18,000.00Was: $36,000.00 -
Chemtron Vacuum Pot Chamber w/ Tube-Turns T-Bolt Closures
Chemtron
$956.00Was: $2,880.00Chemtron Vacuum Pot Chamber w/ Tube-Turns T-Bolt Closures Left Chamber: 12" Diameter x 4" Tall with 9.75" Diameter lip Right Chamber: 17" Diameter x 6.5" Tall Overall Dimensions: 60" x 30" x 63" Tall -- 580 LBS Condition: UsedThis USED chamber...50510- SKU:
- 50510
- Weight:
- 580.00 LBS
$956.00Was: $2,880.00 -
NRC 3114 Sputtering Chamber Varian SD-700 Vacuum Pump 5KW 115/230V For Parts
NRC
$1,000.00Was: $3,200.00NRC 3114 Sputtering Chamber Varian SD-700 Vacuum Pump 5KW 115/230V For Parts The NRC 3114 is a vacuum sputtering deposition system manufactured by NRC Equipment Corp of Palo Alto, California. This class of equipment is used in physical vapor deposition...50209- SKU:
- 50209
- Availability:
- Usually ships within 3-5 business days due to size and weight; contact us for freight arrangements.
- Weight:
- 660.00 LBS
- Brand:
- NRC Equipment Corp
- Model:
- 3114
- MPN:
- 3114
- Type:
- Vacuum Sputtering Deposition Chamber
- SKU:
- 50209
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Includes Varian SD-700 pump, Varian 843 gauge; bell jar cracked
- Country/Region of Manufacture:
- United States
- Power Requirements:
- 115/230V AC, 1-Phase, 60Hz, 5 kW
- Voltage Rating:
- 115 / 230V AC
- Power Rating:
- 5 kW
- Frequency:
- 60 Hz
- Phase:
- Single Phase
- Inlet Water Requirement:
- 0.25 GPM
- Bell Jar Base Plate Diameter:
- Approx. 20 inches
- Vacuum Pump Model:
- Varian SD-700 Rotary Vacuum Pump
- Pump Motor:
- Leroy Somer LS90L
- Vacuum Gauge:
- Varian 843 Vacuum Ionization Gauge
- Deposition Method:
- Diffusion Pump / RF or DC Sputtering
- Application:
- Thin Film Deposition, PVD, Semiconductor Research
- Form Factor:
- Freestanding Cabinet with Bell Jar Assembly
- Overall Dimensions:
- 37 x 36 x 78 inches (H includes bell jar)
- Condition Notes:
- This NRC 3114 Vacuum Sputtering Chamber is being sold as-is for parts or repair. The glass bell jar is cracked (clearly visible in our photo set) and will require replacement or repair before the system can be returned to service.
$1,000.00Was: $3,200.00 -
Anatech Hummer VII Gold Sputtering Coating Machine with Vacuum Pump - AS IS
Anatech
$1,946.00Was: $5,500.00Anatech Hummer VII Gold Sputtering Coating Machine with Vacuum Pump - AS IS Condition: UsedThis item is being sold in As-Is condition and includes many useful parts. Please review description and photos and contact us with any questions.41414- SKU:
- 41414
- Weight:
- 49.00 LBS
$1,946.00Was: $5,500.00 -
Balzers Swivel 98 1.5 Metalizer w/Pfeiffer TMH 260 Leybold D10E and D2.5E Pumps
Balzers
$2,723.00Was: $6,500.00Balzers Swivel 98 1.5 Metalizer w/Pfeiffer TMH 260 Leybold D10E and D2.5E Pumps Pfeiffer TMH 260 Asslar Turbo Vacuum Pump ( D-35614) Leybold Trivac D10E Vacuum Pump (140042) Leybold Trivac D2.5E Vacuum Pump (T1211111212) Uses Advanced Energy B5181854DD...45594- SKU:
- 45594
- Weight:
- 525.00 LBS
$2,723.00Was: $6,500.00 -
BOC Edwards NXJ96800 Auto 500 Thermal Resistance Evaporator Coater 210V 60Hz
BOC Edwards
$5,057.00Was: $14,300.00BOC Edwards NXJ96800 Auto 500 Thermal Resistance Evaporator Coater 210V 60Hz Edwards EXT 255H / ISO 100K PN: B75301000S Turbo Pump (180-230 L/S) Edwards EXC 300 Turbo Pump Controller Edwards FL20K Foreline Trap Edwards PV25EKA Vacuum Valve Edwards RV12...45171- SKU:
- 45171
- Weight:
- 910.00 LBS
$5,057.00Was: $14,300.00 -
Ion Tech ID-3500 Advanced Energy w/Large Bell Jar Ion Beam Coater Evaporator
ION Tech
$3,826.00Was: $8,000.00Ion Tech Ion Beam Coater Advanced Energy ID-3500 ION Beam Drive and 16 by 22 Bell Jar Advanced Energy ID-3500 Ion Beam Drive Ion Tech Inc Plasma Bridge Neutralizer And Density Monitor Granville-Phillips Gauge Controller Series 270 Stainless Steel Bell...44784- SKU:
- 44784
- Weight:
- 935.00 LBS
$3,826.00Was: $8,000.00