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Vacuum Deposition Chambers

Vacuum Deposition Chambers

Vacuum deposition chambers are specialized equipment used in the manufacturing and research industries to deposit thin films of materials onto a substrate surface. These chambers create a low-pressure environment by removing gases and other contaminants, allowing for precise control over the deposition process. The vacuum deposition chambers utilize techniques such as physical vapor deposition (PVD) and chemical vapor deposition (CVD) to apply coatings of metals, ceramics, and other materials onto various substrates. By maintaining a vacuum environment, these chambers ensure high-quality and uniform deposition, making them essential tools for industries such as electronics, optics, and materials science.

  • CHA Industries SEC-600 vacuum deposition system overview — bell jar in foreground on pallet, main cabinet and power unit in background CHA Industries SEC-600 system front view — main black cabinet with panels, Airco Temescal control rack, and separate beige power unit on casters

    CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System 208/240V 3-Phase

    CHA Industries

    $10,000.00
    Was: $20,000.00
    CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System 208/240V 3-Phase The CHA Industries SEC-600 is a cryogenic electron-beam (e-beam) physical vapor deposition (PVD) system designed for thin film coating applications in research, optical...
    52813
    SKU:
    52813
    Availability:
    This item is available and typically ships within 3-5 business days after purchase; please contact us to arrange freight.
    Weight:
    1,250.00 LBS
    Brand:
    CHA Industries
    Model:
    SEC-600
    MPN:
    SEC-600
    Type:
    E-Beam Cryo Vacuum Deposition System
    SKU:
    52813
    Condition:
    Used – Inspected, Sold As-Is, Missing Components
    Seller Notes:
    Includes CV-14, IC6000, MPS-3000FC, Auto-Tech II, bell jar. Missing external cryo compressor and e-beam gun/supply.
    Power Requirements:
    208/240V, 70A, 50/60Hz, 3-Phase, 3 Wire & Ground
    Voltage:
    208/240V
    Current Rating:
    70A
    Phase:
    Three Phase
    Frequency:
    50/60Hz
    Application / Use Case:
    Thin Film Deposition, E-Beam Evaporation, Optical Coating, Semiconductor
    Deposition Method:
    Electron Beam (E-Beam) Evaporation, Ion Beam Assist
    Vacuum Type:
    Cryogenic High Vacuum
    High Vacuum Pump:
    CTI-Cryogenics Cryo-Torr 8, P/N 8033167
    Electron Beam Power Supply:
    Airco Temescal CV-14
    Deposition Controller:
    Inficon IC6000, Model 013-093 (120/220V)
    Ion Gun Power Source:
    IonTech MPS-3000FC
    System Controller:
    CHA Industries Auto-Tech II
    Chamber Type:
    Stainless Steel Bell Jar
    Form Factor:
    Freestanding Cabinet System with Separate Bell Jar
    Gas Inlets:
    Gas 1, Gas 2, Gas 3, Gas 4 plus Vent, Air Out, Air In
    Compatible With:
    CHA Industries SEC series vacuum deposition platforms
    Country/Region of Manufacture:
    United States
    Condition Notes:
    This CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System has been visually inspected and is in good overall cosmetic condition for its age. The system is being sold as-is and as a partial configuration: the external cryopump compressor is
    $10,000.00
    Was: $20,000.00
  • MRC 603-III sputtering system full front view showing main chamber, load-lock, control cabinet, and CTI cryopump compressor on dolly MRC 603-III sputtering system rear view with wiring harness exposed, high-voltage power cabinet visible, CTI cryopump compressor on dolly

    MRC 603-III RF DC Sputtering System 3-Target 208V 3-Phase PVD Thin Film

    Material Research Corp

    $18,000.00
    Was: $36,000.00
    MRC 603-III RF DC Sputtering System 3-Target 208V 3-Phase PVD Thin Film Three-target RF/DC magnetron sputtering system for physical vapor deposition of thin films. Freestanding floor system with load-lock chamber, cryogenic vacuum pumping, and substrate...
    50528
    SKU:
    50528
    Availability:
    This item requires freight shipping on two pallets. Contact us for a freight quote and to arrange inspection in Ventura, CA.
    Weight:
    5,000.00 LBS
    Brand:
    Materials Research Corporation (MRC)
    Model:
    603-III
    MPN:
    1620-8
    SKU:
    50528
    Condition:
    As-Is / For Parts or Not Working
    Seller Notes:
    Includes CTI cryopump, LN2 cryotrap, 3kW power supply, Omega pyrometer, vacuum control panel
    Country of Manufacture:
    USA
    Form Factor:
    Freestanding Floor System, Multi-Cabinet
    Power Requirements:
    208V, 160A, 60Hz, 3-Phase
    Application / Use Case:
    RF/DC Magnetron Sputtering, PVD Thin Film Deposition
    Number of Targets:
    3
    Sputtering Modes:
    RF, DC, DC Magnetron
    RF Power Supply:
    1.5 kW RF
    DC Sputtering Power Supply:
    3kW
    Vacuum System:
    8-inch CTI Cryogenics Cryo-Tor Cryopump
    Additional Vacuum:
    LN2 Cryotrap for water vapor pumping
    Load-Lock:
    Yes — approx. 13 x 13 inch work holder capacity
    Substrate Heating:
    Yes — substrate heater included
    Temperature Measurement:
    Omega Optical Pyrometer
    RF Bias:
    RF bias on substrate supported; adjustable RF phase
    Compatible With:
    PVD semiconductor, solar, and optical coating processes
    Shipping Method:
    Freight — two pallets required
    Inspection Available:
    Yes — Ventura, CA
    Condition Notes:
    MRC 603-III RF/DC Sputtering System sold as-is. System was moved into storage and never powered or tested after last move. Vacuum leak check required before use. Inspection available in Ventura, CA. No functionality guaranteed.
    $18,000.00
    Was: $36,000.00
  • NRC 3114 Sputtering Chamber front view showing cracked glass bell jar mounted on base cabinet with front control panel NRC 3114 Sputtering Chamber side view with cabinet open showing Varian SD-700 rotary vacuum pump, yellow power cable, and internal plumbing

    NRC 3114 Sputtering Chamber Varian SD-700 Vacuum Pump 5KW 115/230V For Parts

    NRC

    $1,000.00
    Was: $3,200.00
    NRC 3114 Sputtering Chamber Varian SD-700 Vacuum Pump 5KW 115/230V For Parts The NRC 3114 is a vacuum sputtering deposition system manufactured by NRC Equipment Corp of Palo Alto, California. This class of equipment is used in physical vapor deposition...
    50209
    SKU:
    50209
    Availability:
    Usually ships within 3-5 business days due to size and weight; contact us for freight arrangements.
    Weight:
    660.00 LBS
    Brand:
    NRC Equipment Corp
    Model:
    3114
    MPN:
    3114
    Type:
    Vacuum Sputtering Deposition Chamber
    SKU:
    50209
    Condition:
    As-Is / For Parts or Not Working
    Seller Notes:
    Includes Varian SD-700 pump, Varian 843 gauge; bell jar cracked
    Country/Region of Manufacture:
    United States
    Power Requirements:
    115/230V AC, 1-Phase, 60Hz, 5 kW
    Voltage Rating:
    115 / 230V AC
    Power Rating:
    5 kW
    Frequency:
    60 Hz
    Phase:
    Single Phase
    Inlet Water Requirement:
    0.25 GPM
    Bell Jar Base Plate Diameter:
    Approx. 20 inches
    Vacuum Pump Model:
    Varian SD-700 Rotary Vacuum Pump
    Pump Motor:
    Leroy Somer LS90L
    Vacuum Gauge:
    Varian 843 Vacuum Ionization Gauge
    Deposition Method:
    Diffusion Pump / RF or DC Sputtering
    Application:
    Thin Film Deposition, PVD, Semiconductor Research
    Form Factor:
    Freestanding Cabinet with Bell Jar Assembly
    Overall Dimensions:
    37 x 36 x 78 inches (H includes bell jar)
    Condition Notes:
    This NRC 3114 Vacuum Sputtering Chamber is being sold as-is for parts or repair. The glass bell jar is cracked (clearly visible in our photo set) and will require replacement or repair before the system can be returned to service.
    $1,000.00
    Was: $3,200.00