Vacuum Deposition Chambers
Vacuum deposition chambers are specialized equipment used in the manufacturing and research industries to deposit thin films of materials onto a substrate surface. These chambers create a low-pressure environment by removing gases and other contaminants, allowing for precise control over the deposition process. The vacuum deposition chambers utilize techniques such as physical vapor deposition (PVD) and chemical vapor deposition (CVD) to apply coatings of metals, ceramics, and other materials onto various substrates. By maintaining a vacuum environment, these chambers ensure high-quality and uniform deposition, making them essential tools for industries such as electronics, optics, and materials science.
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CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System 208/240V 3-Phase
CHA Industries
$10,000.00Was: $20,000.00CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System 208/240V 3-Phase The CHA Industries SEC-600 is a cryogenic electron-beam (e-beam) physical vapor deposition (PVD) system designed for thin film coating applications in research, optical...52813- SKU:
- 52813
- Availability:
- This item is available and typically ships within 3-5 business days after purchase; please contact us to arrange freight.
- Weight:
- 1,250.00 LBS
- Brand:
- CHA Industries
- Model:
- SEC-600
- MPN:
- SEC-600
- Type:
- E-Beam Cryo Vacuum Deposition System
- SKU:
- 52813
- Condition:
- Used – Inspected, Sold As-Is, Missing Components
- Seller Notes:
- Includes CV-14, IC6000, MPS-3000FC, Auto-Tech II, bell jar. Missing external cryo compressor and e-beam gun/supply.
- Power Requirements:
- 208/240V, 70A, 50/60Hz, 3-Phase, 3 Wire & Ground
- Voltage:
- 208/240V
- Current Rating:
- 70A
- Phase:
- Three Phase
- Frequency:
- 50/60Hz
- Application / Use Case:
- Thin Film Deposition, E-Beam Evaporation, Optical Coating, Semiconductor
- Deposition Method:
- Electron Beam (E-Beam) Evaporation, Ion Beam Assist
- Vacuum Type:
- Cryogenic High Vacuum
- High Vacuum Pump:
- CTI-Cryogenics Cryo-Torr 8, P/N 8033167
- Electron Beam Power Supply:
- Airco Temescal CV-14
- Deposition Controller:
- Inficon IC6000, Model 013-093 (120/220V)
- Ion Gun Power Source:
- IonTech MPS-3000FC
- System Controller:
- CHA Industries Auto-Tech II
- Chamber Type:
- Stainless Steel Bell Jar
- Form Factor:
- Freestanding Cabinet System with Separate Bell Jar
- Gas Inlets:
- Gas 1, Gas 2, Gas 3, Gas 4 plus Vent, Air Out, Air In
- Compatible With:
- CHA Industries SEC series vacuum deposition platforms
- Country/Region of Manufacture:
- United States
- Condition Notes:
- This CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System has been visually inspected and is in good overall cosmetic condition for its age. The system is being sold as-is and as a partial configuration: the external cryopump compressor is
$10,000.00Was: $20,000.00 -
MRC 603-III RF DC Sputtering System 3-Target 208V 3-Phase PVD Thin Film
Material Research Corp
$18,000.00Was: $36,000.00MRC 603-III RF DC Sputtering System 3-Target 208V 3-Phase PVD Thin Film Three-target RF/DC magnetron sputtering system for physical vapor deposition of thin films. Freestanding floor system with load-lock chamber, cryogenic vacuum pumping, and substrate...50528- SKU:
- 50528
- Availability:
- This item requires freight shipping on two pallets. Contact us for a freight quote and to arrange inspection in Ventura, CA.
- Weight:
- 5,000.00 LBS
- Brand:
- Materials Research Corporation (MRC)
- Model:
- 603-III
- MPN:
- 1620-8
- SKU:
- 50528
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Includes CTI cryopump, LN2 cryotrap, 3kW power supply, Omega pyrometer, vacuum control panel
- Country of Manufacture:
- USA
- Form Factor:
- Freestanding Floor System, Multi-Cabinet
- Power Requirements:
- 208V, 160A, 60Hz, 3-Phase
- Application / Use Case:
- RF/DC Magnetron Sputtering, PVD Thin Film Deposition
- Number of Targets:
- 3
- Sputtering Modes:
- RF, DC, DC Magnetron
- RF Power Supply:
- 1.5 kW RF
- DC Sputtering Power Supply:
- 3kW
- Vacuum System:
- 8-inch CTI Cryogenics Cryo-Tor Cryopump
- Additional Vacuum:
- LN2 Cryotrap for water vapor pumping
- Load-Lock:
- Yes — approx. 13 x 13 inch work holder capacity
- Substrate Heating:
- Yes — substrate heater included
- Temperature Measurement:
- Omega Optical Pyrometer
- RF Bias:
- RF bias on substrate supported; adjustable RF phase
- Compatible With:
- PVD semiconductor, solar, and optical coating processes
- Shipping Method:
- Freight — two pallets required
- Inspection Available:
- Yes — Ventura, CA
- Condition Notes:
- MRC 603-III RF/DC Sputtering System sold as-is. System was moved into storage and never powered or tested after last move. Vacuum leak check required before use. Inspection available in Ventura, CA. No functionality guaranteed.
$18,000.00Was: $36,000.00 -
Chemtron Tube-Turns T-Bolt Closure Dual Vacuum Pot Chamber 12" & 17" 100 PSI
Chemtron
$1,700.00Was: $3,400.00Chemtron Tube-Turns T-Bolt Closure Dual Vacuum Pot Chamber 12" & 17" 100 PSIThis is a dual-station vacuum pot chamber system built around Tube-Turns T-Bolt Closures, manufactured by the Tube Turns Division of Chemetron Corporation in Louisville, Kentucky...50510- SKU:
- 50510
- Availability:
- This item requires special shipping — contact us for a freight quote or to arrange local pickup.
- Weight:
- 580.00 LBS
- Brand:
- Chemetron Corporation (Tube-Turns Division)
- Model:
- Tube-Turn T-Bolt Closure
- MPN:
- P6669
- SKU:
- 50510
- Type:
- Dual Vacuum Pot Chamber with T-Bolt Closures
- Condition:
- Used – Inspected
- Number of Chambers:
- 2 (Dual Chamber System)
- Left Chamber Diameter:
- 12 in
- Left Chamber Height:
- 4 in
- Left Chamber Lip Diameter:
- 9.75 in
- Right Chamber Diameter:
- 17 in
- Right Chamber Height:
- 6.5 in
- Overall Dimensions:
- 60 in x 30 in x 63 in tall
- Maximum Pressure Rating:
- 100 PSI
- Temperature Rating:
- 104 deg F
- Closure Type:
- Tube-Turns T-Bolt Closure
- O-Ring Material:
- BUNA
- Pressure Vessel Class:
- 75
- Material:
- MPB (Metal Pipe Bronze/Brass fittings)
- Test Pressure:
- 150 PSIG (factory tested)
- Pressure Gauges:
- 2x 0-150 PSI gauges (TT electronics calibrated)
- Lid Lift Mechanism:
- Cable and pulley counterbalance system
- Fill/Drain Switch:
- Included on integrated control panel
- Plumbing:
- Integrated copper/hose plumbing under table
- Pressure Regulator:
- Brass pressure regulator visible under table
- Tube-Turns Serial No.:
- 4105
- Country/Region of Manufacture:
- United States
- Shipping Notes:
- Requires special/freight shipping; contact for quote
- Seller Notes:
- Dual chamber vacuum pot system on white-painted steel table; special freight shipping required.
- Condition Notes:
- Chemtron Tube-Turns dual vacuum pot chamber system inspected, good used condition. Age patina and oxidation on surfaces; all closure hardware, lid lifts, gauges, and plumbing present. 580 lbs — requires freight shipping. Contact us for a quote.
$1,700.00Was: $3,400.00 -
NRC 3114 Sputtering Chamber Varian SD-700 Vacuum Pump 5KW 115/230V For Parts
NRC
$1,000.00Was: $3,200.00NRC 3114 Sputtering Chamber Varian SD-700 Vacuum Pump 5KW 115/230V For Parts The NRC 3114 is a vacuum sputtering deposition system manufactured by NRC Equipment Corp of Palo Alto, California. This class of equipment is used in physical vapor deposition...50209- SKU:
- 50209
- Availability:
- Usually ships within 3-5 business days due to size and weight; contact us for freight arrangements.
- Weight:
- 660.00 LBS
- Brand:
- NRC Equipment Corp
- Model:
- 3114
- MPN:
- 3114
- Type:
- Vacuum Sputtering Deposition Chamber
- SKU:
- 50209
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Includes Varian SD-700 pump, Varian 843 gauge; bell jar cracked
- Country/Region of Manufacture:
- United States
- Power Requirements:
- 115/230V AC, 1-Phase, 60Hz, 5 kW
- Voltage Rating:
- 115 / 230V AC
- Power Rating:
- 5 kW
- Frequency:
- 60 Hz
- Phase:
- Single Phase
- Inlet Water Requirement:
- 0.25 GPM
- Bell Jar Base Plate Diameter:
- Approx. 20 inches
- Vacuum Pump Model:
- Varian SD-700 Rotary Vacuum Pump
- Pump Motor:
- Leroy Somer LS90L
- Vacuum Gauge:
- Varian 843 Vacuum Ionization Gauge
- Deposition Method:
- Diffusion Pump / RF or DC Sputtering
- Application:
- Thin Film Deposition, PVD, Semiconductor Research
- Form Factor:
- Freestanding Cabinet with Bell Jar Assembly
- Overall Dimensions:
- 37 x 36 x 78 inches (H includes bell jar)
- Condition Notes:
- This NRC 3114 Vacuum Sputtering Chamber is being sold as-is for parts or repair. The glass bell jar is cracked (clearly visible in our photo set) and will require replacement or repair before the system can be returned to service.
$1,000.00Was: $3,200.00 -
Anatech Hummer VII Sputter Coater Gold Coating System w/ Leybold Trivac Pump
Anatech
$1,500.00Was: $3,000.00Anatech Hummer VII Sputter Coater Gold Coating System w/ Leybold Trivac PumpBenchtop sputter coating system for applying nanometer-scale gold and gold/palladium films. Used for SEM and TEM specimen preparation in electron microscopy labs. Includes...41414- SKU:
- 41414
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 49.00 LBS
- Brand:
- Anatech
- Model:
- Hummer VII
- MPN:
- Hummer VII
- Type:
- Sputter Coater / Gold Sputtering System
- SKU:
- 41414
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold as-is; includes Leybold-Heraeus Trivac vacuum pump and loose hardware/parts
- Country/Region of Manufacture:
- United States
- Form Factor:
- Benchtop
- Power Requirements:
- 115V AC, 4A, 60Hz
- Voltage:
- 115V
- Current Rating:
- 4A
- Frequency:
- 60Hz
- Air/Gas Requirement:
- 5 psi
- Application:
- SEM Sample Preparation, Thin Film Coating, Gold Sputtering
- Coating Material:
- Gold (Au); Gold/Palladium capable
- Vacuum Pump Included:
- Yes — Leybold-Heraeus Trivac (Type D1.6B)
- Vacuum Pump Brand:
- Leybold-Heraeus
- Vacuum Pump Model:
- Trivac D1.6B
- Vacuum Pump Country of Manufacture:
- Germany
- Thickness Control:
- Nanometer-scale digital readout; Thickness Set in nm/min
- Process Controls:
- Gas, Pulse, Etch, Plate, Process pushbutton controls
- Etch/Plate Control:
- % of Power x10 (Etch); Nanometers/Min (Plate)
- Compatible With:
- SEM, TEM specimen preparation; electron microscopy labs
- Manufacturer Address:
- Anatech Ltd., 5510 Vine St., Alexandria, VA 22310 USA
- Condition Notes:
- Anatech Hummer VII Sputter Coater sold as-is for parts or repair. Not tested; no functionality guaranteed. Includes Leybold-Heraeus Trivac vacuum pump, gold target assembly, and loose hardware/parts. Review photos before purchasing.
$1,500.00Was: $3,000.00 -
Balzers BPS Swivel 98 1.5 Metalizer Pfeiffer TMH 260 Leybold D10E D2.5E
Balzers
$3,500.00Was: $7,000.00Balzers BPS Swivel 98 1.5 Metalizer Pfeiffer TMH 260 Leybold D10E D2.5EVacuum metallization and thin film deposition system manufactured by Balzers in Liechtenstein. Cart-mounted configuration with integrated turbo and roughing pump stages for coating...45594- SKU:
- 45594
- Availability:
- Usually ships within 3-5 business days — contact us for freight quote prior to purchase.
- Weight:
- 525.00 LBS
- Brand:
- Balzers BPS
- Model:
- Swivel 98 1.5
- MPN:
- 10015418
- Type:
- Vacuum Metalizer / Thin Film Deposition System
- SKU:
- 45594
- Manufacture Year:
- 1999
- Voltage:
- 400V (3L+N+PE)
- Current Rating:
- 27A
- Power Rating:
- 18 kVA
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Water Pressure:
- 5-6 bar
- Air Pressure:
- 1.0-1.5 bar
- Turbo Pump:
- Pfeiffer TMH 260 (D-35614 Asslar)
- Roughing Pump 1:
- Leybold Trivac D10E, P/N 140042
- Roughing Pump 2:
- Leybold Trivac D2.5E, P/N T1211111212
- D2.5E Pumping Speed:
- 2.5 m³/h
- D2.5E Ultimate Pressure:
- 2x10⁻³ mbar
- Leybold D10E Part Number:
- 140042
- Leybold D2.5E Fab Number:
- 20900035972
- Compatible Power Supply:
- Advanced Energy B5181854DD Pinnacle 8 kW DC (not included)
- Target Assembly:
- BPS Yokogawa type, B5119 203DA, visible in photos
- Country/Region of Manufacture:
- Liechtenstein / Germany
- Form Factor:
- Freestanding Cart-Mounted System
- Condition:
- Used – Inspected and Appears in Good Condition
- Seller Notes:
- Includes Pfeiffer TMH 260, Leybold D10E & D2.5E pumps. Power supply not included.
- Condition Notes:
- Balzers BPS Swivel 98 1.5 Metalizer inspected and in good condition. Includes Pfeiffer TMH 260 and Leybold D10E & D2.5E pumps. Chamber shows normal process residue. Power supply not included. Photos available.
$3,500.00Was: $7,000.00 -
BOC Edwards Auto 500 NXJ96800 Thermal Resistance Evaporator Coater 210V 60Hz
BOC Edwards
$3,000.00Was: $6,000.00BOC Edwards Auto 500 NXJ96800 Thermal Resistance Evaporator Coater 210V 60HzThe BOC Edwards Auto 500 is a laboratory-scale thermal resistance evaporation system used for physical vapor deposition (PVD) of thin films onto substrates under high vacuum. It...45171- SKU:
- 45171
- Availability:
- Freight shipment required — contact us for a shipping quote before ordering.
- Weight:
- 910.00 LBS
- Brand:
- BOC Edwards
- Model:
- Auto 500
- MPN:
- NXJ96800
- Type:
- Thermal Resistance Evaporator Coater
- SKU:
- 45171
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Missing bell jar, PLC, controller, and software. Sold AS-IS for parts or repair.
- Country/Region of Manufacture:
- England
- Power Requirements:
- 210V, 60Hz
- Form Factor:
- Freestanding — two-cabinet system
- Application / Use Case:
- Thin film thermal resistance evaporation / vacuum deposition
- Turbo Pump Model:
- Edwards EXT 255H / ISO 100K
- Turbo Pump Part Number:
- B75301000XS
- Turbo Pump Speed:
- 180–230 L/S
- Turbo Pump Controller:
- Edwards EXC 300
- Roughing Pump:
- Edwards RV12 Rotary Vane Vacuum Pump
- RV12 Code Number:
- A655-01-903
- Foreline Trap:
- Edwards FL20K (P/N A13305000)
- Oil Mist Filter:
- Edwards EMF10 (Code No. A462 26 000)
- Vacuum Valve:
- Edwards PV25EKA (P/N C41305000)
- Vacuum Valve Voltage:
- 240V, 0.800(T)A fuse
- Thyristor Source Controls:
- Dual Edwards Thyristor Source Controls (x2)
- LT/HT Controller Modules:
- Dual Edwards LT/HT Controller Modules (x2)
- Transformer:
- Matheson EM-1050 (P/N E1-5A101-E200), labeled TX1
- Smaller Cabinet Dimensions:
- 25" W x 24" D x 51" H
- Larger Cabinet Dimensions:
- 26" W x 28" D x 73" H
- Shipping Method:
- Freight shipment required
- Compatible With:
- BOC Edwards Auto 500 thin film deposition systems
- Condition Notes:
- BOC Edwards Auto 500 NXJ96800 Evaporator Coater sold AS-IS for parts/repair. Missing bell jar, PLC, controller, and software. Hardware present but untested, no functionality guaranteed. Freight shipment required.
$3,000.00Was: $6,000.00 -
Ion Tech ID-3500 Ion Beam Coater Evaporator w/ Bell Jar Advanced Energy AE
ION Tech
$4,000.00Was: $8,000.00Ion Tech ID-3500 Ion Beam Coater Evaporator w/ Bell Jar Advanced Energy AEThe Ion Tech ID-3500 is a complete ion beam thin-film deposition system combining an Advanced Energy ID-3500 Ion Beam Drive, an Ion Tech Plasma Bridge Neutralizer, a...44784- SKU:
- 44784
- Availability:
- Usually ships within 5-7 business days; please contact us to arrange freight.
- Weight:
- 935.00 LBS
- Brand:
- Ion Tech
- Model:
- ID-3500
- MPN:
- ID-3500
- Type:
- Ion Beam Coater / Evaporator System
- SKU:
- 44784
- Condition:
- Used – Inspected
- Seller Notes:
- Includes bell jar, ID-3500 Ion Beam Drive, Plasma Bridge Neutralizer, GP Series 270 controller, substrate rotation drive, and cart
- Country/Region of Manufacture:
- United States
- Form Factor:
- Freestanding Cart-Mounted System
- Chamber Type:
- Stainless Steel Bell Jar
- Bell Jar Dimensions:
- 16 in. x 22 in.
- Ion Beam Drive:
- Advanced Energy ID-3500 Ion Beam Drive
- Neutralizer:
- Ion Tech Plasma Bridge Neutralizer
- Gauge Controller:
- Granville-Phillips Series 270
- Gauge Controller Catalog No.:
- 270004
- Substrate Rotation Drive:
- Speed-controlled motor drive with ON/OFF switch
- Motor (Substrate Drive):
- Barber-Colman CYHC-43100-41-5, 24 VDC
- Application / Use Case:
- Ion beam thin film deposition, optical coatings, PVD
- Vacuum System:
- Roughing and hi-vac; diffusion pump visible under chamber
- Plasma Bridge Neutralizer Meters:
- Neutralizer (DC mA), Emission (DC A), Heater (AC A)
- Compatible With:
- Ion Tech ion sources; thin-film deposition research
- Viewport:
- Single viewport with KF/CF flange on chamber sidewall
- Gas Connections:
- Multiple gas/water line fittings; labeled Air, Water In
- Hoist:
- Chamber lift/hoist mechanism integrated in control panel
- Condition Notes:
- Ion Tech ID-3500 Ion Beam Coater/Evaporator inspected, appears in good used condition. Cart frame shows surface rust at lower corners. Control panels intact. Not powered or tested at our facility. Please contact us with any questions.
$4,000.00Was: $8,000.00