Description
NRC 3114 Sputtering Chamber Varian SD-700 Vacuum Pump 5KW 115/230V For Parts
The NRC 3114 is a vacuum sputtering deposition system manufactured by NRC Equipment Corp of Palo Alto, California. This class of equipment is used in physical vapor deposition (PVD) processes to deposit thin films of metal or dielectric material onto substrates under high vacuum. The system consists of a self-contained cabinet housing the pump and power electronics, topped by a stainless steel base plate and glass bell jar enclosure that forms the deposition chamber. This unit is offered as-is for parts or repair due to a cracked glass bell jar.
Specifications & What's Included
- Manufacturer: NRC Equipment Corp, Palo Alto, CA, USA
- Model: 3114
- Power: 115 / 230V AC, Single Phase, 60 Hz, 5 kW
- Inlet Water Required: 0.25 GPM
- Bell jar base plate diameter: approximately 20 inches
- Vacuum pump: Varian SD-700 Stage Rotary Vacuum Pump
- Pump motor: Leroy Somer LS90L
- Vacuum gauge: Varian 843 Vacuum Ionization Gauge
- Overall dimensions: approximately 37 x 36 x 78 inches tall (including bell jar assembly)
- Known defect: glass bell jar is cracked — requires replacement before use
- Internal chamber hardware, cabling, and plumbing appear visually present
Applications
Vacuum sputtering systems of this type were commonly deployed in university research labs, semiconductor fabrication, thin-film optics, and materials science facilities for depositing metals, oxides, and nitrides onto wafers, glass, and other substrates. The NRC 3114 platform was a widely used research-grade PVD system during its production era. This unit may be of interest to researchers needing spare components — including the Varian SD-700 pump, ionization gauge, base plate assembly, or internal chamber hardware — or to buyers capable of sourcing a replacement bell jar and restoring the system to working condition.
This NRC 3114 Vacuum Sputtering Chamber is being sold as-is for parts or repair. The glass bell jar is cracked (clearly visible in our photo set) and will require replacement or repair before the system can be returned to service. The remainder of the system — including the Varian SD-700 rotary vacuum pump, the Varian 843 vacuum ionization gauge, the front control panel, and the internal chamber hardware — appears intact and present as viewed. No functionality testing has been performed on this unit, and it is not guaranteed operational in any way. It is offered strictly for parts, component salvage, or as a restoration project. Please review all photos carefully, and contact us with any questions before purchasing.
Warranty Information
Additional Information
Brand: |
NRC Equipment Corp |
Model: |
3114 |
MPN: |
3114 |
Type: |
Vacuum Sputtering Deposition Chamber |
SKU: |
50209 |
Condition: |
As-Is / For Parts or Not Working |
Seller Notes: |
Includes Varian SD-700 pump, Varian 843 gauge; bell jar cracked |
Country/Region of Manufacture: |
United States |
Power Requirements: |
115/230V AC, 1-Phase, 60Hz, 5 kW |
Voltage Rating: |
115 / 230V AC |
Power Rating: |
5 kW |
Frequency: |
60 Hz |
Phase: |
Single Phase |
Inlet Water Requirement: |
0.25 GPM |
Bell Jar Base Plate Diameter: |
Approx. 20 inches |
Vacuum Pump Model: |
Varian SD-700 Rotary Vacuum Pump |
Pump Motor: |
Leroy Somer LS90L |
Vacuum Gauge: |
Varian 843 Vacuum Ionization Gauge |
Deposition Method: |
Diffusion Pump / RF or DC Sputtering |
Application: |
Thin Film Deposition, PVD, Semiconductor Research |
Form Factor: |
Freestanding Cabinet with Bell Jar Assembly |
Overall Dimensions: |
37 x 36 x 78 inches (H includes bell jar) |
Condition Notes: |
This NRC 3114 Vacuum Sputtering Chamber is being sold as-is for parts or repair. The glass bell jar is cracked (clearly visible in our photo set) and will require replacement or repair before the system can be returned to service. |