NRC

NRC 3114 Sputtering Chamber Varian SD-700 Vacuum Pump 5KW 115/230V For Parts

NRC

SKU:

50209

Availability:

Usually ships within 3-5 business days due to size and weight; contact us for freight arrangements.

Weight:

660.00 LBS

Brand:

NRC Equipment Corp

Model:

3114

MPN:

3114

Type:

Vacuum Sputtering Deposition Chamber

SKU:

50209

Condition:

As-Is / For Parts or Not Working

Seller Notes:

Includes Varian SD-700 pump, Varian 843 gauge; bell jar cracked

Country/Region of Manufacture:

United States

Power Requirements:

115/230V AC, 1-Phase, 60Hz, 5 kW

Voltage Rating:

115 / 230V AC

Power Rating:

5 kW

Frequency:

60 Hz

Phase:

Single Phase

Inlet Water Requirement:

0.25 GPM

Bell Jar Base Plate Diameter:

Approx. 20 inches

Vacuum Pump Model:

Varian SD-700 Rotary Vacuum Pump

Pump Motor:

Leroy Somer LS90L

Vacuum Gauge:

Varian 843 Vacuum Ionization Gauge

Deposition Method:

Diffusion Pump / RF or DC Sputtering

Application:

Thin Film Deposition, PVD, Semiconductor Research

Form Factor:

Freestanding Cabinet with Bell Jar Assembly

Overall Dimensions:

37 x 36 x 78 inches (H includes bell jar)

Condition Notes:

This NRC 3114 Vacuum Sputtering Chamber is being sold as-is for parts or repair. The glass bell jar is cracked (clearly visible in our photo set) and will require replacement or repair before the system can be returned to service.