Description
CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System 208/240V 3-Phase
The CHA Industries SEC-600 is a cryogenic electron-beam (e-beam) physical vapor deposition (PVD) system designed for thin film coating applications in research, optical coating, and semiconductor fabrication. This listing includes the main cabinet, stainless steel bell jar assembly, and the following integrated subsystems. The system is being sold as-is as a partial configuration: the external cryopump compressor and the e-beam gun with its associated power supply are not included with this sale and must be sourced separately.
Specifications & What's Included
- System: CHA Industries SEC-600 Cryo Vacuum Deposition System
- Power Input: 208/240V, 70A, 50/60Hz, 3-Phase, 3 Wire & Ground (labeled on rear power input panel)
- Deposition Method: Electron beam (e-beam) evaporation with ion beam assist capability
- Chamber: Stainless steel bell jar with two large viewport flanges and lower base flange; shown on pallet
- Electron Beam Power Supply: Airco Temescal CV-14 (rack-mounted, front panel visible)
- Deposition Controller: Inficon IC6000, Model 013-093 (120/220V input)
- Ion Gun Power Source: IonTech Inc. MPS-3000FC — filament current, discharge current/voltage, beam current/voltage, accelerator current/voltage, neutralizer emission current meters on front panel
- System Controller: CHA Industries Auto-Tech II — automatic/manual/roughing/off mode selector; vent, hi-vac, hoist, cryo open/close, rough/hi-vac/vent manual controls
- High Vacuum Pump: CTI-Cryogenics Cryo-Torr 8, P/N 8033167 (mounted internally)
- Gas Manifold: Gas 1, Gas 2, Gas 3, Gas 4 inlets plus Vent, Air Out, Air In fittings with pressure gauge
- Electron Gun Control Panel: DC ampere meters, filament current, emission current, high voltage control section, beam position sweep control with long/lat adjustments
- Circuit Breaker Array: CB-1 through CB-22 visible on control panel
- Substrate Holder: Planetary triangular aluminum substrate platen visible inside chamber
- Evaporation Source: Multiple circular target puck positions on hearth plate
- Rear Connections: Vacuum tank multi-pin connectors, high-voltage cable connectors; DANGER HIGH VOLTAGE labels on internal HV section
- NOT INCLUDED: External cryopump compressor (absent — must be sourced separately)
- NOT INCLUDED: E-beam gun and associated gun power supply (absent — must be sourced separately)
Applications
The CHA Industries SEC-600 is a research- and production-class e-beam evaporation system used for depositing thin films of metals, dielectrics, and optical coatings onto substrates in high-vacuum conditions. Systems of this type are used in semiconductor device fabrication, optical filter and lens coating, photovoltaic cell research, MEMS device manufacturing, and advanced materials research. The cryogenic high-vacuum environment achieved with CTI-Cryogenics pumps enables the deposition of high-purity films at controlled rates, as monitored by the Inficon quartz crystal deposition controller. Ion beam assist (via the IonTech ion gun) improves film adhesion and density. This system type was commonly deployed in university research labs, government research facilities, and semiconductor pilot lines through the 1980s and 1990s. The remaining hardware represents a substantial platform for a buyer looking to restore, reconfigure, or cannibalize components for an existing vacuum deposition setup.
This CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System has been visually inspected and is in good overall cosmetic condition for its age. The system is being sold as-is and as a partial configuration: the external cryopump compressor is not included, and the e-beam gun and its associated power supply are also absent, as clearly shown in the photos. What remains — the main cabinet, bell jar assembly, Airco Temescal CV-14 electron beam power supply rack, Inficon IC6000 deposition controller, IonTech MPS-3000FC ion gun power source, CHA Auto-Tech II controller, and CTI-Cryogenics Cryo-Torr 8 high vacuum pump — constitutes a substantial base system. The gas manifold panel shows surface wear and some corrosion consistent with laboratory use. Interior wiring and subsystems appear intact. This system is suitable as a platform for restoration, reconfiguration, or parts harvesting, but buyers should be aware of the missing components before purchasing. Please review our full photo set carefully and contact us with any questions prior to purchase.
Warranty Information
Additional Information
Brand: |
CHA Industries |
Model: |
SEC-600 |
MPN: |
SEC-600 |
Type: |
E-Beam Cryo Vacuum Deposition System |
SKU: |
52813 |
Condition: |
Used – Inspected, Sold As-Is, Missing Components |
Seller Notes: |
Includes CV-14, IC6000, MPS-3000FC, Auto-Tech II, bell jar. Missing external cryo compressor and e-beam gun/supply. |
Power Requirements: |
208/240V, 70A, 50/60Hz, 3-Phase, 3 Wire & Ground |
Voltage: |
208/240V |
Current Rating: |
70A |
Phase: |
Three Phase |
Frequency: |
50/60Hz |
Application / Use Case: |
Thin Film Deposition, E-Beam Evaporation, Optical Coating, Semiconductor |
Deposition Method: |
Electron Beam (E-Beam) Evaporation, Ion Beam Assist |
Vacuum Type: |
Cryogenic High Vacuum |
High Vacuum Pump: |
CTI-Cryogenics Cryo-Torr 8, P/N 8033167 |
Electron Beam Power Supply: |
Airco Temescal CV-14 |
Deposition Controller: |
Inficon IC6000, Model 013-093 (120/220V) |
Ion Gun Power Source: |
IonTech MPS-3000FC |
System Controller: |
CHA Industries Auto-Tech II |
Chamber Type: |
Stainless Steel Bell Jar |
Form Factor: |
Freestanding Cabinet System with Separate Bell Jar |
Gas Inlets: |
Gas 1, Gas 2, Gas 3, Gas 4 plus Vent, Air Out, Air In |
Compatible With: |
CHA Industries SEC series vacuum deposition platforms |
Country/Region of Manufacture: |
United States |
Condition Notes: |
This CHA Industries SEC-600 E-Beam Cryo Vacuum Deposition System has been visually inspected and is in good overall cosmetic condition for its age. The system is being sold as-is and as a partial configuration: the external cryopump compressor is |