Description
Flexion MP-3 Cryotest Station w/ Leybold Turbo VAC 150 Hamamatsu C5332
Cryogenic vacuum chamber system designed for wafer-level testing and characterization. Benchtop frame-mounted unit with 12.5-inch diameter chamber and integrated X/Y wafer stage.
Specifications & What's Included
- Leybold Heraeus Turbo VAC 150 turbomolecular pump with Turbotronik NT 150/360 controller
- Granville Phillips Series 270 gauge controller, pressure range 10-8 to 10-4 torr
- Hamamatsu C5332-07 DC Beam Finder III camera and C5489 beam finder
- X/Y wafer stage with external Mitutoyo micrometers (0-2 in, 0.0002 in resolution)
- 5.375-inch wafer mount diameter
- Leybold Heraeus fan system, power supply, control panel with integrated CRT monitor
- Approximately 6,604 turbo pump hours
Applications
Used in semiconductor research and cryogenic wafer probe testing. Supports low-temperature device characterization and vacuum-based measurements on microelectronic samples. Compatible with standard semiconductor wafer formats and laboratory vacuum instrumentation ecosystems.
Condition: For Parts or Not Working
This Flexion MP-3 Cryotest Station is being sold AS-IS for parts or repair. Due to the age and complexity of this system, we are not able to confirm functionality and it is not guaranteed operational in any way. The system appears cosmetically complete and largely intact — the chamber body, lid assembly, frame, and most components are present and show typical wear consistent with lab use. The Leybold Heraeus Turbotronik NT 150/360 controller shows an hour meter reading of approximately 6,604 hours and carries a 'NOT CALIBRATED' label. The Granville Phillips Series 270 gauge controller, Hamamatsu C5332 camera, Hamamatsu C5489 beam finder, Mitutoyo external micrometers, Nupro valves, and Model 28-12 power supply are all present and visible in our photos. The Hitachi system control unit with integrated CRT monitor is included. Some surface wear, tape residue, and handwritten operation notes are visible on various components. Please review our full photo set carefully before purchasing and contact us with any questions.
This Flexion MP-3 Cryotest Station is being sold AS-IS for parts or repair. Due to the age and complexity of this system, we are not able to confirm functionality and it is not guaranteed operational in any way. The system appears cosmetically complete and largely intact — the chamber body, lid assembly, frame, and most components are present and show typical wear consistent with lab use. The Leybold Heraeus Turbotronik NT 150/360 controller shows an hour meter reading of approximately 6,604 hours and carries a 'NOT CALIBRATED' label. The Granville Phillips Series 270 gauge controller, Hamamatsu C5332 camera, Hamamatsu C5489 beam finder, Mitutoyo external micrometers, Nupro valves, and Model 28-12 power supply are all present and visible in our photos. The Hitachi system control unit with integrated CRT monitor is included. Some surface wear, tape residue, and handwritten operation notes are visible on various components. Please review our full photo set carefully before purchasing and contact us with any questions.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
Flexion |
Model: |
MP-3 |
MPN: |
MP-3 |
Type: |
Cryotest Station / Cryogenic Vacuum Chamber System |
SKU: |
43773 |
Condition: |
As-Is / For Parts or Not Working |
Seller Notes: |
Includes turbo pump, power supply, gauge controller, camera, beam finder, micrometers, and support frame |
Form Factor: |
Benchtop / Frame-Mounted System |
Chamber Diameter: |
12.5 inches |
Chamber Height: |
10 inches |
Wafer Mount Diameter: |
5.375 inches |
Stage Type: |
X/Y Wafer Stage with External Micrometer Control |
Turbo Pump: |
Leybold Heraeus Turbo VAC 150 (Model 85470-118526K231) |
Turbo Pump Controller: |
Leybold Heraeus Turbotronik NT 150/360 (Model 85472-1) |
Pump Fan System: |
Leybold Heraeus Fan Model 89545 BE 120V |
Gauge Controller: |
Granville Phillips Series 270 |
Pressure Range (Gauge): |
10^-8 to 10^-4 torr |
Camera: |
Hamamatsu C5332-07 (DC Beam Finder III) |
Beam Finder: |
Hamamatsu C5489 |
Micrometer Type: |
Mitutoyo 0-2 in, 0.0002 in resolution (external X/Y control) |
System Control Panel: |
Hitachi System Control Unit with integrated CRT monitor |
Power Supply (Integrated): |
Model 28-12 |
Turbo Hours: |
Approximately 6604 hours (readable on Turbotronik hour meter) |
Valves: |
Nupro Shield and Stage valves; backfill and vent valves visible |
Feedthrough: |
Multi-pin vacuum feedthrough on chamber body |
Application / Use Case: |
Cryogenic wafer testing, semiconductor research, vacuum probe stations |
Country/Region of Manufacture: |
United States |
Condition Notes: |
Flexion MP-3 Cryotest Station sold AS-IS for parts or repair. Not guaranteed functional. System appears complete with turbo pump, gauge controller, camera, beam finder, and micrometers. ~6,604 turbo hours shown. |