Ion Tech ID-3500 Ion Beam Coater Evaporator w/ Bell Jar Advanced Energy AE

Ion Tech ID-3500 Ion Beam Coater Evaporator w/ Bell Jar Advanced Energy AE

The Ion Tech ID-3500 is a complete ion beam thin-film deposition system combining an Advanced Energy ID-3500 Ion Beam Drive, an Ion Tech Plasma Bridge Neutralizer, a Granville-Phillips Series 270 Gauge Controller, and a large stainless steel bell jar vacuum chamber. The system is mounted on a wheeled cart with an integrated vacuum system (roughing and high-vacuum diffusion pump) and a motorized substrate rotation drive. Ion beam coaters of this type are used to deposit thin films of metals, oxides, and other materials onto optical, semiconductor, and research substrates with precise control over ion beam parameters.

Specifications & What's Included

• Ion Beam Drive: Advanced Energy (AE) ID-3500 Ion Beam Drive — rack-mounted, LED beam current and voltage displays, AUTO/MANUAL mode, LOCAL/REMOTE signal control
• Chamber: Stainless steel bell jar, 16 in. diameter × 22 in. tall
• Viewport: Single sidewall viewport with KF/CF conflat flange and glass window
• Neutralizer: Ion Tech Plasma Bridge Neutralizer — front panel with Simpson analog meters for Neutralizer (DC milliamperes), Emission (DC amperes), and Heater (AC amperes)
• Gauge Controller: Granville-Phillips Series 270 — Catalog No. 270004; controls include DEGAS, PC SET, FILAMENT, EMISSION; analog vacuum gauge meter; BNC Collector output on rear
• Vacuum System: Roughing pump and high-vacuum diffusion pump (visible under cart); vacuum status indicators on main panel (Roughing, P/L, Hi-Vac, Vent)
• Substrate Rotation: Motorized substrate rotation drive with SPEED CONTROL knob and ON/OFF switch; Barber-Colman CYHC-43100-41-5 24 VDC motor
• Gas/Water Distribution: Stainless steel top-mounted gas manifold; labeled compression-fitting plumbing for Air and Water In connections
• Density Monitor: Simpson DC Milliamps density meter on main vacuum control panel
• Hoist: Chamber lift/hoist function integrated in main control panel
• Cart: Rolling steel cart with wood-topped work surface; casters with locks
• High Voltage Warning placard affixed to front panel

Applications

Ion beam deposition systems like the Ion Tech ID-3500 are used in research and production environments to deposit precisely controlled thin films on optical components, semiconductor wafers, and other substrates. The ion beam source accelerates ions toward a target or directly at the substrate (ion beam assisted deposition), enabling tight control of film stoichiometry, density, and adhesion. Common applications include anti-reflection coatings, hard coatings, optical filters, and research into thin-film materials science. The Plasma Bridge Neutralizer neutralizes space-charge buildup on the ion beam, allowing deposition onto insulating substrates without charge-induced damage. Systems of this type were used extensively in university and government research labs as well as optical coating production facilities from the 1980s through the 2000s. The Granville-Phillips Series 270 Gauge Controller provides ionization gauge vacuum measurement for process monitoring.