BOC Edwards Auto 500 NXJ96800 Thermal Resistance Evaporator Coater 210V 60Hz

BOC Edwards Auto 500 NXJ96800 Thermal Resistance Evaporator Coater 210V 60Hz

The BOC Edwards Auto 500 is a laboratory-scale thermal resistance evaporation system used for physical vapor deposition (PVD) of thin films onto substrates under high vacuum. It uses resistively heated source boats or filaments to evaporate materials, which then condense onto a substrate held above the source. This two-cabinet system consists of the Auto 500 chamber/pumping unit and a matching control cabinet. It is being sold AS-IS for parts or repair — the bell jar, PLC, system controller, and software are not included.

Specifications & What's Included

• System Model: BOC Edwards Auto 500, Model NXJ96800
• Power: 210V, 60Hz
• Turbo Pump: Edwards EXT 255H / ISO 100K — P/N B75301000XS, pumping speed 180–230 L/S
• Turbo Pump Controller: Edwards EXC 300 (front panel: Speed, Fail, Start/Stop, Standby, Heater controls; hours counter visible)
• Roughing Pump: Edwards RV12 Rotary Vane Vacuum Pump (Code No. A655-01-903)
• Foreline Trap: Edwards FL20K (P/N A13305000)
• Oil Mist Filter: Edwards EMF10 (Code No. A462 26 000)
• Vacuum Valve: Edwards PV25EKA (P/N C41305000, 240V, 0.800(T)A fuse)
• Thyristor Source Control #1: Edwards Thyristor Source Control (analog meter, Off/Man/Auto switch)
• Thyristor Source Control #2: Edwards Thyristor Source Control (analog meter, Off/Man/Auto switch)
• LT/HT Controller Module #1 (panel #3): with LT Transformer and analog ammeter
• LT/HT Controller Module #2 (panel #4): with HT Power Supply and analog ammeter
• Transformer: Matheson EM-1050 (P/N E1-5A101-E200), labeled TX1
• Control cabinet front panel: BOC Edwards touchscreen display (appears off/blank), EMO emergency stop button, I/O / Reset indicators, Safety Interlocks / Water Cooling / Source Enabled status lights
• Water cooling connections: Water In and Water Out ports on cabinet rear with hose and brass fitting
• Bell jar base ring (black plastic) included separately — bell jar itself is NOT included
• Smaller unit (chamber/pump cabinet): approx. 25" W × 24" D × 51" H
• Larger unit (control cabinet): approx. 26" W × 28" D × 73" H
• NOT included: Bell jar, PLC, system controller, software

Applications

The Edwards Auto 500 is a compact benchtop-to-floor-standing thermal evaporation coater designed for research and small-batch production of thin film coatings. Thermal resistance evaporation systems like this one are used to deposit metals (aluminum, gold, chromium, titanium), dielectrics, and organic materials onto semiconductor wafers, glass, optical components, and other substrates in a high-vacuum environment. They are common in university research labs, semiconductor fabrication, optical coating, MEMS fabrication, and photovoltaic research. The system draws down to high vacuum using the combination roughing pump and turbomolecular pump before evaporation begins, ensuring a clean deposition environment. The LT/HT source control modules allow independent control of low-temperature and high-temperature evaporation sources, enabling multi-material deposition runs. The Auto 500 series was produced by BOC Edwards (later Edwards Vacuum, part of the Atlas Copco group) and was a widely used platform in academic and light-production thin film labs from the 1990s through the 2000s. Buyers of this listing are typically sourcing the turbo pump, source controllers, roughing pump, or other Edwards vacuum components for integration into other systems or for repair/refurbishment of a working Auto 500.