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Balzers

Balzers BPS Swivel 98 1.5 Metalizer Pfeiffer TMH 260 Leybold D10E D2.5E

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SKU:
45594
MPN:
Swivel 98 1.5
Condition:
Used
Availability:
Usually ships within 3-5 business days — contact us for freight quote prior to purchase.
Weight:
525.00 LBS
Shipping:
Calculated at Checkout
  • Balzers BPS Swivel 98 1.5 Metalizer – left side view showing vacuum chamber on cart with yellow BPS target assembly
  • Balzers BPS Swivel 98 1.5 Metalizer – rear view showing Leybold Trivac roughing pumps mounted on lower shelf with plumbing and wiring
  • Balzers BPS Swivel 98 1.5 Metalizer – manufacturer nameplate showing Type SWIVEL 98 1.5, Eq/N 10015418, 400V 3L+N+PE, 27A, 18 kVA, 50/60Hz, Year 1999
  • Balzers BPS Swivel 98 1.5 Metalizer – top-down view of vacuum chamber lid with pneumatic actuators, blue fittings, and aluminum vacuum flange assembly
  • Balzers BPS Swivel 98 1.5 Metalizer – close-up of vacuum chamber flange area with pneumatic actuator and sensor assembly on aluminum deck
  • Balzers BPS Swivel 98 1.5 Metalizer – close-up of top of vacuum chamber showing aluminum flange, pneumatic lines, and vacuum fittings
  • Balzers BPS Swivel 98 1.5 Metalizer – front view of yellow BPS target assembly with BPS logo and safety warning labels on slide rail
  • Balzers BPS Swivel 98 1.5 Metalizer – front view of opened vacuum chamber showing dark-coated target plate and process chamber interior with mounting hardware
  • Balzers BPS Swivel 98 1.5 Metalizer – close-up of copper-coated magnetron sputtering target with heavy material buildup and center post visible
  • Balzers BPS Swivel 98 1.5 Metalizer – rear electrical panel with wiring harnesses, terminal blocks, and control electronics visible
  • Balzers BPS Swivel 98 1.5 Metalizer – side panel open showing gas plumbing manifold, solenoid valves, pneumatic fittings, and wiring
  • Leybold Trivac D10E roughing pump label showing part number 140042 and serial number 30000129250 with P 10 mbar rating
  • Leybold Trivac D2.5E roughing pump nameplate showing model D2.5E, Prod-Nr T1211111212, Fab Nr 20900035972, pumping speed 2.5 m³/h, ultimate pressure 2x10⁻³ mbar
  • Balzers BPS Swivel 98 1.5 Metalizer – close-up of electrical connector housing showing corrosion and wear on multi-pin industrial connector
  • Balzers BPS Swivel 98 1.5 Metalizer – interior view showing both Leybold Trivac roughing pump motors and vacuum chamber plumbing from side
  • Balzers BPS Swivel 98 1.5 Metalizer – front of vacuum chamber assembly showing aluminum flanges, pneumatic actuators on sides, and a label on the chamber body
  • Balzers BPS Swivel 98 1.5 Metalizer – close-up of pneumatic actuator assembly with CE mark, Balzers Schaltflex label, and yellow safety clip visible
  • Balzers BPS Swivel 98 1.5 Metalizer – rear interior view showing both Leybold roughing pump motors on lower shelf and vacuum plumbing above
  • Balzers BPS Swivel 98 1.5 Metalizer – BPS label on vacuum component showing Type Yokogawa, S-No DR1015 B80*1C/L1, No B5119 203DA, F-No 199RM24799J9
  • Pfeiffer Vacuum TMH 260 turbomolecular pump – close-up showing Pfeiffer Vacuum label on pump body with green tubing connections and sensor wiring
  • Balzers Swivel 98 1.5 Metalizer w/Pfeiffer TMH 260 Leybold D10E and D2.5E Pumps
  • Balzers Swivel 98 1.5 Metalizer w/Pfeiffer TMH 260 Leybold D10E and D2.5E Pumps
  • Balzers Swivel 98 1.5 Metalizer w/Pfeiffer TMH 260 Leybold D10E and D2.5E Pumps
  • Balzers Swivel 98 1.5 Metalizer w/Pfeiffer TMH 260 Leybold D10E and D2.5E Pumps
$3,500.00
Was: $7,000.00
Current Stock: 1

Sold Out

Description

Balzers BPS Swivel 98 1.5 Metalizer Pfeiffer TMH 260 Leybold D10E D2.5E

Vacuum metallization and thin film deposition system manufactured by Balzers in Liechtenstein. Cart-mounted configuration with integrated turbo and roughing pump stages for coating applications in semiconductor, optics, and industrial manufacturing.

Specifications & What's Included

  • Model: Swivel 98 1.5 (MPN 10015418)
  • Power: 400V, 3-phase, 27A, 18 kVA (50/60 Hz)
  • Turbo Pump: Pfeiffer TMH 260
  • Roughing Pumps: Leybold D10E (140042) and D2.5E (2.5 m³/h, 2×10⁻³ mbar ultimate)
  • Utility Requirements: 5–6 bar water, 1.0–1.5 bar air
  • Target Assembly: BPS Yokogawa type (B5119 203DA)
  • Power supply not included; compatible with Advanced Energy Pinnacle 8 kW DC

Applications

Used in semiconductor processing, optics coating, and precision metallization. The dual-stage roughing configuration and TMH 260 turbo pump support high-vacuum evaporation and sputtering processes. Typical use in R&D labs and small-scale production environments requiring controllable deposition rates and chamber pressures below 10⁻³ mbar.

Condition: Used
This Balzers BPS Swivel 98 1.5 Vacuum Metalizer has been inspected and appears to be in good condition. The system includes the Pfeiffer TMH 260 turbomolecular pump and both Leybold Trivac roughing pumps (D10E and D2.5E). The vacuum chamber interior shows normal process residue and material buildup consistent with prior use, including copper coating on the magnetron target. The electrical connector on the side of the frame shows some corrosion and should be inspected prior to reconnection. The external frame, plumbing, and control wiring appear intact. The Advanced Energy B5181854DD Pinnacle 8 kW DC power supply is not included with this listing but may be available separately — please inquire if interested. Please view our photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Balzers BPS
Model:
Swivel 98 1.5
MPN:
10015418
Type:
Vacuum Metalizer / Thin Film Deposition System
SKU:
45594
Manufacture Year:
1999
Voltage:
400V (3L+N+PE)
Current Rating:
27A
Power Rating:
18 kVA
Phase:
Three Phase
Frequency:
50/60 Hz
Water Pressure:
5-6 bar
Air Pressure:
1.0-1.5 bar
Turbo Pump:
Pfeiffer TMH 260 (D-35614 Asslar)
Roughing Pump 1:
Leybold Trivac D10E, P/N 140042
Roughing Pump 2:
Leybold Trivac D2.5E, P/N T1211111212
D2.5E Pumping Speed:
2.5 m³/h
D2.5E Ultimate Pressure:
2x10⁻³ mbar
Leybold D10E Part Number:
140042
Leybold D2.5E Fab Number:
20900035972
Compatible Power Supply:
Advanced Energy B5181854DD Pinnacle 8 kW DC (not included)
Target Assembly:
BPS Yokogawa type, B5119 203DA, visible in photos
Country/Region of Manufacture:
Liechtenstein / Germany
Form Factor:
Freestanding Cart-Mounted System
Condition:
Used – Inspected and Appears in Good Condition
Seller Notes:
Includes Pfeiffer TMH 260, Leybold D10E & D2.5E pumps. Power supply not included.
Condition Notes:
Balzers BPS Swivel 98 1.5 Metalizer inspected and in good condition. Includes Pfeiffer TMH 260 and Leybold D10E & D2.5E pumps. Chamber shows normal process residue. Power supply not included. Photos available.
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