Balzers
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Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Generator 380V 3-Phase
Balzers
$1,800.00Was: $3,600.00Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Generator 380V 3-PhaseRF plasma generator power supply manufactured by Balzers with internal Hüttinger electronics. Supplies 2.5 kW of RF energy...50032- SKU:
- 50032
- Availability:
- This item requires freight shipping due to its size and weight. Please contact us for a freight quote or to arrange local pickup.
- Weight:
- 1,111.00 LBS
- Brand:
- Balzers
- Model:
- RFS 302
- MPN:
- RFS 302
- Secondary Model:
- TIS 2.5/13560
- Type:
- RF Plasma Generator Power Supply
- SKU:
- 50032
- Internal Generator Brand:
- Fritz Hüttinger Elektronik GmbH
- Internal Generator Type:
- TIS 2.5/13560
- Internal Generator Version:
- A 46-0104
- Output Power:
- 2500 W (2.5 kW)
- Output Frequency:
- 13.56 MHz
- Line Voltage:
- 3 x 380V AC
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Power Consumption:
- 5400 VA
- Input Current:
- 8.2 A
- RF Output Connector:
- N-type / coaxial (50 Ohm)
- RF Output Impedance:
- 50 Ohm
- Max RF Voltage:
- 1000 Vp (per Vorsicht HF-Spannung label)
- Form Factor:
- Floor-Standing Enclosure / Cabinet
- Dimensions:
- 27.5" W x 22" D x 53" H
- Front Panel Meters:
- Incident Power (kW), Reflected Power meters
- Front Panel Controls:
- Mains/Standby/Remote switch, RF on/off, Overload indicator, Interlock
- Power Switch:
- Siemens rotary lockout/keyed main disconnect
- Internal Power Supply Module:
- Hüttinger Netzteil Typ B 66-0015
- Internal RF Unit:
- Hüttinger HF-Teil Typ B 76-0002
- Internal Control Board:
- Hüttinger Typ B 38-0114
- Application:
- RF Plasma Etching, Sputtering, CVD, PVD Semiconductor
- Cooling:
- Forced air (internal axial fans visible)
- Country/Region of Manufacture:
- West Germany
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold AS-IS. Freight shipping required — contact us for quote or local pickup.
- Condition Notes:
- Balzers RFS 302 RF Plasma Generator Power Supply sold AS-IS, untested, for parts or repair. Not powered or tested at our facility. Freight shipping required — contact us for a quote or local pickup.
$1,800.00Was: $3,600.00 -
Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Hüttinger TIS 2.5/13560
Balzers
$2,500.00Was: $5,000.00Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Hüttinger TIS 2.5/13560RF power supply and plasma generator for industrial semiconductor and materials processing. Delivers 2.5 kW at 13.56 MHz...50029- SKU:
- 50029
- Availability:
- This item requires freight shipping due to its size and weight. Please contact us for a freight quote or to arrange local pickup.
- Weight:
- 495.00 LBS
- Brand:
- Balzers
- Model:
- RFS 302
- MPN:
- BG M34 563 / 0157
- Secondary Model:
- TIS 2.5/13560
- Type:
- RF Power Supply / Plasma Generator
- SKU:
- 50029
- Seller Notes:
- Includes RF output cables and associated cabling visible on top of unit
- Country/Region of Manufacture:
- Germany
- Form Factor:
- Floor-Standing Cabinet
- Output Power:
- 2500 W (2.5 kW)
- Output Frequency:
- 13.56 MHz
- Input Voltage:
- 3 x 380V AC (Three-Phase)
- Phase:
- Three Phase
- Input Frequency:
- 50/60 Hz
- Power Consumption:
- 5400 VA
- Current Rating:
- 8.2 A
- RF Generator Manufacturer:
- Fritz Hüttinger Elektronik GmbH
- RF Generator Type:
- TIS 2.5/13560
- RF Generator Version:
- A 46-0104
- Cooling:
- Water-cooled and fan-cooled
- Cooling Water Flow Min:
- 6 l/min
- Cooling Water Pressure:
- 7 bar nominal / max
- Front Panel Meters:
- Incident Power Pi (0-2.5 kW), Reflected Power Pr (0-500 W)
- Front Panel Controls:
- Key switch, Mains/Standby/Remote indicators, RF on/off, Overload reset
- Overload Indicators:
- Interlock, T>, Pr>, I>
- Output Connector:
- Coaxial (N-type / threaded RF output)
- Max RF Voltage (Output):
- Up to 1000 Vp
- Application:
- Plasma Etch, PVD Sputtering, CVD, Semiconductor
- Dimensions:
- 27.5" W x 22" D x 52.25" H
- Condition:
- Used – Pulled from Working Environment
- Condition Notes:
- Balzers RFS 302 RF Power Supply inspected and in good used condition. Cabinet and internals intact; Fritz Hüttinger TIS 2.5/13560 module present. Cables included. Freight shipping required — contact us for a quote.
$2,500.00Was: $5,000.00 -
Balzers BPS Swivel 98 1.5 Metalizer Pfeiffer TMH 260 Leybold D10E D2.5E
Balzers
$3,500.00Was: $7,000.00Balzers BPS Swivel 98 1.5 Metalizer Pfeiffer TMH 260 Leybold D10E D2.5EVacuum metallization and thin film deposition system manufactured by Balzers in Liechtenstein. Cart-mounted configuration with...45594- SKU:
- 45594
- Availability:
- Usually ships within 3-5 business days — contact us for freight quote prior to purchase.
- Weight:
- 525.00 LBS
- Brand:
- Balzers BPS
- Model:
- Swivel 98 1.5
- MPN:
- 10015418
- Type:
- Vacuum Metalizer / Thin Film Deposition System
- SKU:
- 45594
- Manufacture Year:
- 1999
- Voltage:
- 400V (3L+N+PE)
- Current Rating:
- 27A
- Power Rating:
- 18 kVA
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Water Pressure:
- 5-6 bar
- Air Pressure:
- 1.0-1.5 bar
- Turbo Pump:
- Pfeiffer TMH 260 (D-35614 Asslar)
- Roughing Pump 1:
- Leybold Trivac D10E, P/N 140042
- Roughing Pump 2:
- Leybold Trivac D2.5E, P/N T1211111212
- D2.5E Pumping Speed:
- 2.5 m³/h
- D2.5E Ultimate Pressure:
- 2x10⁻³ mbar
- Leybold D10E Part Number:
- 140042
- Leybold D2.5E Fab Number:
- 20900035972
- Compatible Power Supply:
- Advanced Energy B5181854DD Pinnacle 8 kW DC (not included)
- Target Assembly:
- BPS Yokogawa type, B5119 203DA, visible in photos
- Country/Region of Manufacture:
- Liechtenstein / Germany
- Form Factor:
- Freestanding Cart-Mounted System
- Condition:
- Used – Inspected and Appears in Good Condition
- Seller Notes:
- Includes Pfeiffer TMH 260, Leybold D10E & D2.5E pumps. Power supply not included.
- Condition Notes:
- Balzers BPS Swivel 98 1.5 Metalizer inspected and in good condition. Includes Pfeiffer TMH 260 and Leybold D10E & D2.5E pumps. Chamber shows normal process residue. Power supply not included. Photos available.
$3,500.00Was: $7,000.00 -
Magnet-Schultz Memmingen X AP X044 K54 D11 Solenoid Coil 24V 50Hz 100%ED
Balzers
$75.00Was: $150.00Magnet-Schultz Memmingen X AP X044 K54 D11 Solenoid Coil 24V 50Hz 100%EDThis is a new old stock replacement solenoid coil made by Magnet-Schultz Memmingen (MSM) of Germany, model X AP X044 K54 D11...26936- SKU:
- 26936
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 2.00 LBS
- Brand:
- Magnet-Schultz Memmingen
- Model:
- X AP X044 K54 D11
- MPN:
- X AP X044 K54 D11
- Secondary Model:
- B4150-735-BG
- Type:
- Solenoid Coil
- SKU:
- 26936
- Voltage:
- 24V AC
- Frequency:
- 50Hz
- Duty Cycle:
- 100% ED (Continuous Duty)
- Current Rating:
- 2 / 1.4A
- Compatible With:
- Balzers vacuum solenoid valves; cross-ref B4150-735-BG
- Connector Type:
- Blade / spade terminals (2-pin)
- Application:
- Replacement coil for solenoid valve actuator
- Condition:
- New – Old Stock
- Country/Region of Manufacture:
- Germany
- Seller Notes:
- New old stock; may be out of original box. Balzers cross-reference B4150-735-BG.
- Condition Notes:
- New old stock. Magnet-Schultz X AP X044 K54 D11 solenoid coil (Balzers B4150-735-BG) is unused and in new condition. May be out of original box. No signs of use or wear.
$75.00Was: $150.00 -
Balzers VW 4 KF-40 Vacuum Pump Fitting BG 604 003 High Vacuum Flange Adapter
Balzers
$120.00Was: $250.00Balzers VW 4 KF-40 Vacuum Pump Fitting BG 604 003 High Vacuum Flange AdapterKF-40 flange adapter for connecting high vacuum pumps to vacuum chambers and systems. Aluminum body with stainless steel...26612- SKU:
- 26612
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 3.00 LBS
- Brand:
- Balzers
- Model:
- VW 4
- MPN:
- BG 604 003
- Serial Number / No.:
- 3854
- Type:
- KF-40 Vacuum Pump Fitting / Flange Adapter
- Flange Standard:
- KF / NW-40 (ISO-KF)
- Flange Size:
- KF-40 (40 mm nominal bore)
- Application / Use Case:
- High vacuum pump and chamber connections
- Material:
- Aluminum body with stainless steel flange face
- Protective Cap Included:
- Yes — orange KF-40 dust cap installed
- SKU:
- 26612
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Includes orange KF-40 protective cap as shown in photos
- Country/Region of Manufacture:
- Liechtenstein
- Condition Notes:
- Balzers VW 4 KF-40 vacuum pump fitting inspected and in good used condition. Pulled from a working environment. Minor surface scuffs on body; KF-40 flange face clean. Orange protective cap included.
$120.00Was: $250.00 -
Balzers BP-226-106-T Vacuum Chamber O-Ring DN 160 ISO Dichtung Seal Kit
Balzers
$15.20Was: $35.00Balzers BP-226-106-T Vacuum Chamber O-Ring DN 160 ISO Dichtung Seal Kit Vacuum chamber seal assembly for DN 160 ISO-K flanges. Consists of an elastomer O-ring and metal retaining housing designed to...26330- SKU:
- 26330
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 2.00 LBS
- Brand:
- Balzers
- Model:
- BP-226-106-T
- MPN:
- BP 226 106 -T
- Type:
- Vacuum Chamber O-Ring Seal with Housing
- SKU:
- 26330
- Flange Standard:
- ISO-K / ISO 160
- Nominal Size:
- DN 160
- Components Included:
- Elastomer O-ring, metal retaining housing/ring
- Application:
- High-vacuum chamber flange sealing
- Condition:
- New – Open Box (may have been stored; inspect before use)
- Seller Notes:
- New open-box; may have been stored; verify O-ring integrity before use
- Country/Region of Manufacture:
- Liechtenstein
- Compatible With:
- DN 160 ISO-K vacuum flanges and chambers
- Condition Notes:
- Balzers BP-226-106-T DN 160 ISO vacuum O-ring and housing. New open-box — may have been stored long-term or past expiration date; inspect elastomer before use. Please contact us with any questions.
$15.20Was: $35.00 -
Balzers Pall ISA Flange Clamps Lot of 21 Mixed Sizes Stainless Vacuum KF NW
Balzers
$65.00Was: $180.00Balzers Pall ISA Flange Clamps Lot of 21 Mixed Sizes Stainless Vacuum KF NWThis is a lot of 21 stainless steel ISA (KF/NW-standard) vacuum flange clamps from Balzers Pall, offered in mixed sizes with...25912- SKU:
- 25912
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 20.00 LBS
- Brand:
- Balzers
- Model:
- ISA Flange Clamp
- MPN:
- ISA Flange Clamp
- Type:
- Vacuum Flange Clamp
- SKU:
- 25912
- Quantity in Lot:
- 21
- Clamp Standard:
- ISA / KF / NW
- Material:
- Stainless Steel
- Size Range:
- Mixed sizes — largest approx. 5 in. diameter
- Fastener Type:
- Wing-nut / screw clamp
- Application:
- High-vacuum and rough-vacuum flange connections
- Compatible With:
- KF / NW vacuum flanges, vacuum pumps, chambers
- Condition:
- Used – Inspected
- Seller Notes:
- Lot of 21 mixed-size stainless ISA flange clamps; sold as shown.
- Country/Region of Manufacture:
- Germany
- Condition Notes:
- Lot of 21 Balzers Pall ISA stainless vacuum flange clamps, mixed sizes, inspected and in good used condition. Normal surface wear; all clamps appear intact with wing-nut hardware. Largest approx. 5 in. diameter.
$65.00Was: $180.00