Balzers
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Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Generator 380V 3-Phase
Balzers
$1,800.00Was: $3,600.00Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Generator 380V 3-PhaseRF plasma generator power supply manufactured by Balzers with internal Hüttinger electronics. Supplies 2.5 kW of RF energy...50032- SKU:
- 50032
- Availability:
- This item requires freight shipping due to its size and weight. Please contact us for a freight quote or to arrange local pickup.
- Weight:
- 1,111.00 LBS
- Brand:
- Balzers
- Model:
- RFS 302
- MPN:
- RFS 302
- Secondary Model:
- TIS 2.5/13560
- Type:
- RF Plasma Generator Power Supply
- SKU:
- 50032
- Internal Generator Brand:
- Fritz Hüttinger Elektronik GmbH
- Internal Generator Type:
- TIS 2.5/13560
- Internal Generator Version:
- A 46-0104
- Output Power:
- 2500 W (2.5 kW)
- Output Frequency:
- 13.56 MHz
- Line Voltage:
- 3 x 380V AC
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Power Consumption:
- 5400 VA
- Input Current:
- 8.2 A
- RF Output Connector:
- N-type / coaxial (50 Ohm)
- RF Output Impedance:
- 50 Ohm
- Max RF Voltage:
- 1000 Vp (per Vorsicht HF-Spannung label)
- Form Factor:
- Floor-Standing Enclosure / Cabinet
- Dimensions:
- 27.5" W x 22" D x 53" H
- Front Panel Meters:
- Incident Power (kW), Reflected Power meters
- Front Panel Controls:
- Mains/Standby/Remote switch, RF on/off, Overload indicator, Interlock
- Power Switch:
- Siemens rotary lockout/keyed main disconnect
- Internal Power Supply Module:
- Hüttinger Netzteil Typ B 66-0015
- Internal RF Unit:
- Hüttinger HF-Teil Typ B 76-0002
- Internal Control Board:
- Hüttinger Typ B 38-0114
- Application:
- RF Plasma Etching, Sputtering, CVD, PVD Semiconductor
- Cooling:
- Forced air (internal axial fans visible)
- Country/Region of Manufacture:
- West Germany
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold AS-IS. Freight shipping required — contact us for quote or local pickup.
- Condition Notes:
- Balzers RFS 302 RF Plasma Generator Power Supply sold AS-IS, untested, for parts or repair. Not powered or tested at our facility. Freight shipping required — contact us for a quote or local pickup.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$1,800.00Was: $3,600.00 -
Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Hüttinger TIS 2.5/13560
Balzers
$2,500.00Was: $5,000.00Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Hüttinger TIS 2.5/13560RF power supply and plasma generator for industrial semiconductor and materials processing. Delivers 2.5 kW at 13.56 MHz...50029- SKU:
- 50029
- Availability:
- This item requires freight shipping due to its size and weight. Please contact us for a freight quote or to arrange local pickup.
- Weight:
- 495.00 LBS
- Brand:
- Balzers
- Model:
- RFS 302
- MPN:
- BG M34 563 / 0157
- Secondary Model:
- TIS 2.5/13560
- Type:
- RF Power Supply / Plasma Generator
- SKU:
- 50029
- Seller Notes:
- Includes RF output cables and associated cabling visible on top of unit
- Country/Region of Manufacture:
- Germany
- Form Factor:
- Floor-Standing Cabinet
- Output Power:
- 2500 W (2.5 kW)
- Output Frequency:
- 13.56 MHz
- Input Voltage:
- 3 x 380V AC (Three-Phase)
- Phase:
- Three Phase
- Input Frequency:
- 50/60 Hz
- Power Consumption:
- 5400 VA
- Current Rating:
- 8.2 A
- RF Generator Manufacturer:
- Fritz Hüttinger Elektronik GmbH
- RF Generator Type:
- TIS 2.5/13560
- RF Generator Version:
- A 46-0104
- Cooling:
- Water-cooled and fan-cooled
- Cooling Water Flow Min:
- 6 l/min
- Cooling Water Pressure:
- 7 bar nominal / max
- Front Panel Meters:
- Incident Power Pi (0-2.5 kW), Reflected Power Pr (0-500 W)
- Front Panel Controls:
- Key switch, Mains/Standby/Remote indicators, RF on/off, Overload reset
- Overload Indicators:
- Interlock, T>, Pr>, I>
- Output Connector:
- Coaxial (N-type / threaded RF output)
- Max RF Voltage (Output):
- Up to 1000 Vp
- Application:
- Plasma Etch, PVD Sputtering, CVD, Semiconductor
- Dimensions:
- 27.5" W x 22" D x 52.25" H
- Condition:
- Used – Pulled from Working Environment
- Condition Notes:
- Balzers RFS 302 RF Power Supply inspected and in good used condition. Cabinet and internals intact; Fritz Hüttinger TIS 2.5/13560 module present. Cables included. Freight shipping required — contact us for a quote.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$2,500.00Was: $5,000.00 -
Balzers BPS Swivel 98 1.5 Metalizer Pfeiffer TMH 260 Leybold D10E D2.5E
Balzers
$3,500.00Was: $7,000.00Balzers BPS Swivel 98 1.5 Metalizer Pfeiffer TMH 260 Leybold D10E D2.5EVacuum metallization and thin film deposition system manufactured by Balzers in Liechtenstein. Cart-mounted configuration with...45594- SKU:
- 45594
- Availability:
- Usually ships within 3-5 business days — contact us for freight quote prior to purchase.
- Weight:
- 525.00 LBS
- Brand:
- Balzers BPS
- Model:
- Swivel 98 1.5
- MPN:
- 10015418
- Type:
- Vacuum Metalizer / Thin Film Deposition System
- SKU:
- 45594
- Manufacture Year:
- 1999
- Voltage:
- 400V (3L+N+PE)
- Current Rating:
- 27A
- Power Rating:
- 18 kVA
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Water Pressure:
- 5-6 bar
- Air Pressure:
- 1.0-1.5 bar
- Turbo Pump:
- Pfeiffer TMH 260 (D-35614 Asslar)
- Roughing Pump 1:
- Leybold Trivac D10E, P/N 140042
- Roughing Pump 2:
- Leybold Trivac D2.5E, P/N T1211111212
- D2.5E Pumping Speed:
- 2.5 m³/h
- D2.5E Ultimate Pressure:
- 2x10⁻³ mbar
- Leybold D10E Part Number:
- 140042
- Leybold D2.5E Fab Number:
- 20900035972
- Compatible Power Supply:
- Advanced Energy B5181854DD Pinnacle 8 kW DC (not included)
- Target Assembly:
- BPS Yokogawa type, B5119 203DA, visible in photos
- Country/Region of Manufacture:
- Liechtenstein / Germany
- Form Factor:
- Freestanding Cart-Mounted System
- Condition:
- Used – Inspected and Appears in Good Condition
- Seller Notes:
- Includes Pfeiffer TMH 260, Leybold D10E & D2.5E pumps. Power supply not included.
- Condition Notes:
- Balzers BPS Swivel 98 1.5 Metalizer inspected and in good condition. Includes Pfeiffer TMH 260 and Leybold D10E & D2.5E pumps. Chamber shows normal process residue. Power supply not included. Photos available.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$3,500.00Was: $7,000.00 -
Magnet-Schultz Memmingen X AP X044 K54 D11 Solenoid Coil 24V 50Hz 100%ED
Balzers
$75.00Was: $150.00Magnet-Schultz Memmingen X AP X044 K54 D11 Solenoid Coil 24V 50Hz 100%EDThis is a new old stock replacement solenoid coil made by Magnet-Schultz Memmingen (MSM) of Germany, model X AP X044 K54 D11...26936- SKU:
- 26936
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 2.00 LBS
- Brand:
- Magnet-Schultz Memmingen
- Model:
- X AP X044 K54 D11
- MPN:
- X AP X044 K54 D11
- Secondary Model:
- B4150-735-BG
- Type:
- Solenoid Coil
- SKU:
- 26936
- Voltage:
- 24V AC
- Frequency:
- 50Hz
- Duty Cycle:
- 100% ED (Continuous Duty)
- Current Rating:
- 2 / 1.4A
- Compatible With:
- Balzers vacuum solenoid valves; cross-ref B4150-735-BG
- Connector Type:
- Blade / spade terminals (2-pin)
- Application:
- Replacement coil for solenoid valve actuator
- Condition:
- New – Old Stock
- Country/Region of Manufacture:
- Germany
- Seller Notes:
- New old stock; may be out of original box. Balzers cross-reference B4150-735-BG.
- Condition Notes:
- New old stock. Magnet-Schultz X AP X044 K54 D11 solenoid coil (Balzers B4150-735-BG) is unused and in new condition. May be out of original box. No signs of use or wear.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$75.00Was: $150.00 -
Balzers VW 4 KF-40 Vacuum Pump Fitting BG 604 003 High Vacuum Flange Adapter
Balzers
$120.00Was: $250.00Balzers VW 4 KF-40 Vacuum Pump Fitting BG 604 003 High Vacuum Flange AdapterKF-40 flange adapter for connecting high vacuum pumps to vacuum chambers and systems. Aluminum body with stainless steel...26612- SKU:
- 26612
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 3.00 LBS
- Brand:
- Balzers
- Model:
- VW 4
- MPN:
- BG 604 003
- Serial Number / No.:
- 3854
- Type:
- KF-40 Vacuum Pump Fitting / Flange Adapter
- Flange Standard:
- KF / NW-40 (ISO-KF)
- Flange Size:
- KF-40 (40 mm nominal bore)
- Application / Use Case:
- High vacuum pump and chamber connections
- Material:
- Aluminum body with stainless steel flange face
- Protective Cap Included:
- Yes — orange KF-40 dust cap installed
- SKU:
- 26612
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Includes orange KF-40 protective cap as shown in photos
- Country/Region of Manufacture:
- Liechtenstein
- Condition Notes:
- Balzers VW 4 KF-40 vacuum pump fitting inspected and in good used condition. Pulled from a working environment. Minor surface scuffs on body; KF-40 flange face clean. Orange protective cap included.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$120.00Was: $250.00 -
Balzers BP-226-106-T Vacuum Chamber O-Ring DN 160 ISO Dichtung Seal Kit
Balzers
$15.20Was: $35.00Balzers BP-226-106-T Vacuum Chamber O-Ring DN 160 ISO Dichtung Seal Kit Vacuum chamber seal assembly for DN 160 ISO-K flanges. Consists of an elastomer O-ring and metal retaining housing designed to...26330- SKU:
- 26330
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 2.00 LBS
- Brand:
- Balzers
- Model:
- BP-226-106-T
- MPN:
- BP 226 106 -T
- Type:
- Vacuum Chamber O-Ring Seal with Housing
- SKU:
- 26330
- Flange Standard:
- ISO-K / ISO 160
- Nominal Size:
- DN 160
- Components Included:
- Elastomer O-ring, metal retaining housing/ring
- Application:
- High-vacuum chamber flange sealing
- Condition:
- New – Open Box (may have been stored; inspect before use)
- Seller Notes:
- New open-box; may have been stored; verify O-ring integrity before use
- Country/Region of Manufacture:
- Liechtenstein
- Compatible With:
- DN 160 ISO-K vacuum flanges and chambers
- Condition Notes:
- Balzers BP-226-106-T DN 160 ISO vacuum O-ring and housing. New open-box — may have been stored long-term or past expiration date; inspect elastomer before use. Please contact us with any questions.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$15.20Was: $35.00 -
Balzers Pall ISA Flange Clamps Lot of 21 Mixed Sizes Stainless Vacuum KF NW
Balzers
$65.00Was: $180.00Balzers Pall ISA Flange Clamps Lot of 21 Mixed Sizes Stainless Vacuum KF NWThis is a lot of 21 stainless steel ISA (KF/NW-standard) vacuum flange clamps from Balzers Pall, offered in mixed sizes with...25912- SKU:
- 25912
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 20.00 LBS
- Brand:
- Balzers
- Model:
- ISA Flange Clamp
- MPN:
- ISA Flange Clamp
- Type:
- Vacuum Flange Clamp
- SKU:
- 25912
- Quantity in Lot:
- 21
- Clamp Standard:
- ISA / KF / NW
- Material:
- Stainless Steel
- Size Range:
- Mixed sizes — largest approx. 5 in. diameter
- Fastener Type:
- Wing-nut / screw clamp
- Application:
- High-vacuum and rough-vacuum flange connections
- Compatible With:
- KF / NW vacuum flanges, vacuum pumps, chambers
- Condition:
- Used – Inspected
- Seller Notes:
- Lot of 21 mixed-size stainless ISA flange clamps; sold as shown.
- Country/Region of Manufacture:
- Germany
- Condition Notes:
- Lot of 21 Balzers Pall ISA stainless vacuum flange clamps, mixed sizes, inspected and in good used condition. Normal surface wear; all clamps appear intact with wing-nut hardware. Largest approx. 5 in. diameter.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$65.00Was: $180.00