Balzers

Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Generator 380V 3-Phase

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SKU:
50032
MPN:
RFS 302
Condition:
Used
Availability:
This item requires freight shipping due to its size and weight. Please contact us for a freight quote or to arrange local pickup.
Weight:
1,111.00 LBS
Shipping:
Calculated at Checkout
  • Balzers RFS 302 RF Power Supply – front view of full floor-standing white cabinet enclosure with Balzers nameplate and front panel controls at top
  • Balzers RFS 302 RF Plasma Generator – right-side view of cabinet showing ventilation louvers and electrical warning label, cables on top
  • Balzers RFS 302 RF Power Supply – close-up of nameplate label reading 'BALZERS RFS 302 RF POWER SUPPLY' with Spec Equipment asset tag showing Asset #4327
  • Balzers RFS 302 – front panel close-up showing Incident Power and Reflected Power analog meters, Mains/Standby/Remote switch, RF controls, and Overload/Interlock indicators
  • Balzers RFS 302 – close-up of main rotary keyed disconnect switch with lockout cable and key
  • Balzers RFS 302 RF Power Supply – interior view with cabinet door open showing internal modules, upper RF generator assembly, fan, and rear panel connections
  • Fritz Hüttinger Elektronik internal assembly – rear panel showing D-sub connectors, ribbon connector, coaxial RF output, and copper RF bar, with Hüttinger type label
  • Fritz Hüttinger Elektronik GmbH rating plate – TYP TIS 2.5/13560, Version A 46-0104, Serial No. 1-10722, Mains 3x380V 50/60Hz 5400VA, Output 2500W 13.56 MHz
  • Balzers RFS 302 internal lower section – rear view showing large axial cooling fan, copper RF bus bar, coaxial connectors, Siemens circuit breaker, and terminal block
  • Fritz Hüttinger RF output section – close-up of X2 OUTPUT and X2 INPUT coaxial connectors (50 Ohm), copper RF bar, BNC connector, and Vorsicht HF-Spannung 1000 Vp warning label
  • Hüttinger HF-Teileil RF unit – close-up of Typ B 76-0002 label, axial cooling fan, copper RF bus bar, and coaxial output connector
  • Hüttinger Netzteil power supply module – Typ B 66-0015 label, Siemens OFF/ON rocker circuit breaker, wiring terminals
  • Balzers RFS 302 lower internal panel – Siemens circuit breaker, main terminal block with color-coded wiring, fuses F2 and F3 (1.25A), PE ground lug, and Balzers KFS 202 identification label
$1,800.00
Was: $3,600.00
Current Stock: 1

Sold Out

Description

Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Generator 380V 3-Phase

RF plasma generator power supply manufactured by Balzers with internal Hüttinger electronics. Supplies 2.5 kW of RF energy at 13.56 MHz for industrial plasma processing. Requires three-phase 380V AC input (50/60 Hz).

Specifications & What's Included

  • Output Power: 2.5 kW at 13.56 MHz
  • Input: 3 × 380V AC, 50/60 Hz, 8.2 A (5400 VA)
  • RF Output: N-type coaxial connector, 50 Ohm impedance, 1000 Vp maximum
  • Internal Generator: Fritz Hüttinger Elektronik TIS 2.5/13560 (Version A 46-0104)
  • Cabinet: Floor-standing enclosure, 27.5" W × 22" D × 53" H
  • Front Panel: Incident and reflected power meters, RF on/off control, overload indicator, mains/standby/remote switch
  • Cooling: Forced air with internal axial fans
  • Origin: West Germany

Applications

Equipment of this type operates RF plasma sources used in semiconductor processing, thin-film deposition, and etching. Typical applications include RF sputtering systems, chemical vapor deposition (CVD), physical vapor deposition (PVD), and plasma etching chambers. The 13.56 MHz frequency is standard in industrial plasma processing equipment.

Condition: For Parts or Not Working
This Balzers RFS 302 RF Plasma Generator Power Supply is being sold AS-IS for parts or repair. The unit has not been powered or tested at our facility, and no functionality is guaranteed. It is a large floor-standing cabinet and will require freight shipping — please contact us for a freight quote, to arrange local pickup, or to schedule an in-person viewing. The exterior cabinet shows typical wear consistent with prior industrial use. Please view our photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Balzers
Model:
RFS 302
MPN:
RFS 302
Secondary Model:
TIS 2.5/13560
Type:
RF Plasma Generator Power Supply
SKU:
50032
Internal Generator Brand:
Fritz Hüttinger Elektronik GmbH
Internal Generator Type:
TIS 2.5/13560
Internal Generator Version:
A 46-0104
Output Power:
2500 W (2.5 kW)
Output Frequency:
13.56 MHz
Line Voltage:
3 x 380V AC
Phase:
Three Phase
Frequency:
50/60 Hz
Power Consumption:
5400 VA
Input Current:
8.2 A
RF Output Connector:
N-type / coaxial (50 Ohm)
RF Output Impedance:
50 Ohm
Max RF Voltage:
1000 Vp (per Vorsicht HF-Spannung label)
Form Factor:
Floor-Standing Enclosure / Cabinet
Dimensions:
27.5" W x 22" D x 53" H
Front Panel Meters:
Incident Power (kW), Reflected Power meters
Front Panel Controls:
Mains/Standby/Remote switch, RF on/off, Overload indicator, Interlock
Power Switch:
Siemens rotary lockout/keyed main disconnect
Internal Power Supply Module:
Hüttinger Netzteil Typ B 66-0015
Internal RF Unit:
Hüttinger HF-Teil Typ B 76-0002
Internal Control Board:
Hüttinger Typ B 38-0114
Application:
RF Plasma Etching, Sputtering, CVD, PVD Semiconductor
Cooling:
Forced air (internal axial fans visible)
Country/Region of Manufacture:
West Germany
Condition:
As-Is / For Parts or Not Working
Seller Notes:
Sold AS-IS. Freight shipping required — contact us for quote or local pickup.
Condition Notes:
Balzers RFS 302 RF Plasma Generator Power Supply sold AS-IS, untested, for parts or repair. Not powered or tested at our facility. Freight shipping required — contact us for a quote or local pickup.
California Prop 65 Warning:
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
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Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Hüttinger TIS 2.5/13560

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$2,500.00
Was: $5,000.00
Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Hüttinger TIS 2.5/13560RF power supply and plasma generator for industrial semiconductor and materials processing. Delivers 2.5 kW at 13.56 MHz...
50029
SKU:
50029
Availability:
This item requires freight shipping due to its size and weight. Please contact us for a freight quote or to arrange local pickup.
Weight:
495.00 LBS
Brand:
Balzers
Model:
RFS 302
MPN:
BG M34 563 / 0157
Secondary Model:
TIS 2.5/13560
Type:
RF Power Supply / Plasma Generator
SKU:
50029
Seller Notes:
Includes RF output cables and associated cabling visible on top of unit
Country/Region of Manufacture:
Germany
Form Factor:
Floor-Standing Cabinet
Output Power:
2500 W (2.5 kW)
Output Frequency:
13.56 MHz
Input Voltage:
3 x 380V AC (Three-Phase)
Phase:
Three Phase
Input Frequency:
50/60 Hz
Power Consumption:
5400 VA
Current Rating:
8.2 A
RF Generator Manufacturer:
Fritz Hüttinger Elektronik GmbH
RF Generator Type:
TIS 2.5/13560
RF Generator Version:
A 46-0104
Cooling:
Water-cooled and fan-cooled
Cooling Water Flow Min:
6 l/min
Cooling Water Pressure:
7 bar nominal / max
Front Panel Meters:
Incident Power Pi (0-2.5 kW), Reflected Power Pr (0-500 W)
Front Panel Controls:
Key switch, Mains/Standby/Remote indicators, RF on/off, Overload reset
Overload Indicators:
Interlock, T>, Pr>, I>
Output Connector:
Coaxial (N-type / threaded RF output)
Max RF Voltage (Output):
Up to 1000 Vp
Application:
Plasma Etch, PVD Sputtering, CVD, Semiconductor
Dimensions:
27.5" W x 22" D x 52.25" H
Condition:
Used – Pulled from Working Environment
Condition Notes:
Balzers RFS 302 RF Power Supply inspected and in good used condition. Cabinet and internals intact; Fritz Hüttinger TIS 2.5/13560 module present. Cables included. Freight shipping required — contact us for a quote.
California Prop 65 Warning:
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
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Plasma-Therm HFS 3000D 3kW 13.56MHz RF Generator Eimac 5CX1500A Tube

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Plasma-Therm HFS 3000D 3kW 13.56MHz RF Generator Eimac 5CX1500A TubeThis is a 3 kW RF generator operating at 13.56 MHz, designed for plasma processing applications. It features an Eimac 5CX1500A...
44780
SKU:
44780
Availability:
Freight shipping required due to size and weight; contact us for a shipping quote.
Weight:
440.00 LBS
Brand:
Plasma-Therm
Model:
HFS 3000D
MPN:
HFS 3000D
Type:
RF Generator
SKU:
44780
Frequency:
13.56 MHz
Output Power:
3 kW (3000 W)
RF Amplifier Tube:
Eimac 5CX1500A (5CX-1-500A)
Vacuum Capacitor:
Jennings UCS300-15D2364 Variable Vacuum Capacitor
Application:
Plasma Etch / Plasma Deposition / Semiconductor Processing
Front Panel Meters:
Incident Kilowatts (0-3 kW), Reflected Watts (0-500 W)
Controls:
Power knob (Min-Max), Power On, RF On, RF Off, O.L. Reset
Overload Indicators:
HV, LV, PA overload indicator lights
Fuses:
4 fuse positions: F1, F2, F3, F4
Circuit Breakers:
Control breaker and Line breaker (3-pole)
RF Hours Meter:
Elapsed RF ON time meter — reads approx. 4976+ hours
RF Output Connector:
Coaxial RF output (top of cabinet)
Control Connectors:
Military-style circular multi-pin connectors (side panel)
Directional Coupler:
External directional coupler box (GEN, LOAD, INC, REF ports)
Power Cable Included:
Large multi-conductor power cable with twist-lock and mil-spec connectors
Form Factor:
Free-Standing Cabinet
Dimensions:
23" W x 26" D x 60" H
Country/Region of Manufacture:
United States
Condition:
Used – Pulled from Working Environment
Seller Notes:
Includes Eimac 5CX1500A tube, Jennings UCS300-15D2364 capacitor, directional coupler, and power cable. Freight shipping required.
Condition Notes:
Plasma-Therm HFS 3000D 3kW RF Generator pulled from working environment; not tested at our facility. Interior and components appear intact. ~4,976 RF hours. Freight shipping required. Sold as-is. Please contact us with questions.
California Prop 65 Warning:
WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov