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Balzers

Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Hüttinger TIS 2.5/13560

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SKU:
50029
MPN:
RFS 302
Condition:
Used
Availability:
This item requires freight shipping due to its size and weight. Please contact us for a freight quote or to arrange local pickup.
Weight:
495.00 LBS
Shipping:
Calculated at Checkout
  • Balzers RFS 302 RF Power Supply – front view showing control panel, key switch, and analog meters with cables on top
  • Balzers RFS 302 RF Power Supply – rear/side view showing ventilation panels and lower cable compartment
  • Balzers RFS 302 RF Power Supply – close-up of front door label reading 'BALZERS RFS 302 RF POWER SUPPLY'
  • Balzers RFS 302 front control panel – Incident Power and Reflected Power analog meters, RF switches, key switch, Mains/Standby/Remote indicators
  • Balzers RFS 302 control panel detail – key switch, Mains/Standby/Remote status lights, RF toggle switches, and Incident Power meter
  • Balzers RFS 302 control panel close-up – Incident Power Pi and Reflected Power Pr meters, Overload section with Interlock, T>, Pr>, I> indicators, and Reset button
  • Balzers RFS 302 – close-up of front key switch with key inserted, power on/off rotary selector
  • Balzers RFS 302 RF Power Supply – interior view with cabinet door open, showing internal rack-mounted components and Fritz Hüttinger RF generator module
  • Balzers RFS 302 interior – top RF generator module rear showing D-sub connectors, terminal blocks, and ESD warning label
  • Balzers RFS 302 – Balzers rating plate label: Type RFS 302, No. BG M34 563/0157, 3x380V, 50/60 Hz, 5400 VA
  • Fritz Hüttinger TIS 2.5/13560 RF generator module – rear view showing large cooling fan and copper water-cooling pipe
  • Fritz Hüttinger TIS 2.5/13560 module – close-up showing RF output coaxial connectors labeled X2 OUTPUT, HF voltage warning label (Vorsicht HF-Spannung, up to 1000 Vp), and Hüttinger nameplate
  • Fritz Hüttinger TIS 2.5/13560 – cooling detail showing large fan, copper water pipe, coolant fittings labeled ABLAUF, Q min 6 l/min, P Nenn 7 bar/max, and fuse positions F2 1.0A and F3
  • Fritz Hüttinger Elektronik GmbH nameplate – Type TIS 2.5/13560, Version A 46-0104, Serial No. 1-12051, Mains 3x380V 50/60Hz 5400VA, Output 2500W 13.56 MHz, Made in West Germany
  • Balzers RFS 302 interior lower section – Siemens circuit breaker (F1), fuse panel, and auxiliary enclosure
  • Balzers RFS 302 – cables on top of unit including coaxial RF cables with N-type/BNC connectors and D-sub multi-pin cable
$2,500.00
Was: $5,000.00
Current Stock: 1

Sold Out

Description

Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Hüttinger TIS 2.5/13560

RF power supply and plasma generator for industrial semiconductor and materials processing. Delivers 2.5 kW at 13.56 MHz fixed frequency with Fritz Hüttinger TIS 2.5/13560 RF module. Three-phase 380V AC input; water and fan cooling.

Specifications & What's Included

  • Output: 2.5 kW at 13.56 MHz; up to 1000 Vp RF voltage
  • Input: 3 x 380V AC, 50/60 Hz, 8.2 A, 5400 VA
  • Front panel meters: Incident Power (0–2.5 kW), Reflected Power (0–500 W)
  • Controls: Key switch, RF on/off, mains/standby/remote indicators, overload reset
  • Cooling: Water (6 l/min minimum, 7 bar nominal) and fan cooling
  • Output connector: Coaxial N-type with RF cables included
  • Floor-standing cabinet; 27.5" W × 22" D × 52.25" H

Applications

Used in plasma etch, PVD sputtering, CVD, and semiconductor processing systems. 13.56 MHz is the standard industrial RF frequency for plasma generation in clean-room fabrication, thin-film deposition, and etching equipment. Operates in tandem with matching networks and process chambers.

Condition: Used
This Balzers RFS 302 RF Power Supply (Fritz Hüttinger TIS 2.5/13560) has been inspected and appears to be in good used condition. The cabinet exterior shows typical wear consistent with industrial service use. The front panel analog meters, key switch, RF controls, and indicator lights are all present and intact. Internal components including the Fritz Hüttinger RF generator module and cooling assembly are present and visually complete. A set of RF output cables and associated cabling is included on top of the unit. Due to its size and weight, this item requires freight shipping — please contact us for a freight quote, to arrange local pickup, or to schedule a viewing at our facility. Please view our photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Balzers
Model:
RFS 302
MPN:
BG M34 563 / 0157
Secondary Model:
TIS 2.5/13560
Type:
RF Power Supply / Plasma Generator
SKU:
50029
Seller Notes:
Includes RF output cables and associated cabling visible on top of unit
Country/Region of Manufacture:
Germany
Form Factor:
Floor-Standing Cabinet
Output Power:
2500 W (2.5 kW)
Output Frequency:
13.56 MHz
Input Voltage:
3 x 380V AC (Three-Phase)
Phase:
Three Phase
Input Frequency:
50/60 Hz
Power Consumption:
5400 VA
Current Rating:
8.2 A
RF Generator Manufacturer:
Fritz Hüttinger Elektronik GmbH
RF Generator Type:
TIS 2.5/13560
RF Generator Version:
A 46-0104
Cooling:
Water-cooled and fan-cooled
Cooling Water Flow Min:
6 l/min
Cooling Water Pressure:
7 bar nominal / max
Front Panel Meters:
Incident Power Pi (0-2.5 kW), Reflected Power Pr (0-500 W)
Front Panel Controls:
Key switch, Mains/Standby/Remote indicators, RF on/off, Overload reset
Overload Indicators:
Interlock, T>, Pr>, I>
Output Connector:
Coaxial (N-type / threaded RF output)
Max RF Voltage (Output):
Up to 1000 Vp
Application:
Plasma Etch, PVD Sputtering, CVD, Semiconductor
Dimensions:
27.5" W x 22" D x 52.25" H
Condition:
Used – Pulled from Working Environment
Condition Notes:
Balzers RFS 302 RF Power Supply inspected and in good used condition. Cabinet and internals intact; Fritz Hüttinger TIS 2.5/13560 module present. Cables included. Freight shipping required — contact us for a quote.
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Balzers RFS 302 RF Power Supply – front view of full floor-standing white cabinet enclosure with Balzers nameplate and front panel controls at top Balzers RFS 302 RF Plasma Generator – right-side view of cabinet showing ventilation louvers and electrical warning label, cables on top
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Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Generator 380V 3-Phase

Balzers

$1,800.00
Was: $3,600.00
Balzers RFS 302 RF Power Supply 2.5kW 13.56 MHz Plasma Generator 380V 3-PhaseRF plasma generator power supply manufactured by Balzers with internal Hüttinger electronics. Supplies 2.5 kW of RF energy...
50032
SKU:
50032
Availability:
This item requires freight shipping due to its size and weight. Please contact us for a freight quote or to arrange local pickup.
Weight:
1,111.00 LBS
Brand:
Balzers
Model:
RFS 302
MPN:
RFS 302
Secondary Model:
TIS 2.5/13560
Type:
RF Plasma Generator Power Supply
SKU:
50032
Internal Generator Brand:
Fritz Hüttinger Elektronik GmbH
Internal Generator Type:
TIS 2.5/13560
Internal Generator Version:
A 46-0104
Output Power:
2500 W (2.5 kW)
Output Frequency:
13.56 MHz
Line Voltage:
3 x 380V AC
Phase:
Three Phase
Frequency:
50/60 Hz
Power Consumption:
5400 VA
Input Current:
8.2 A
RF Output Connector:
N-type / coaxial (50 Ohm)
RF Output Impedance:
50 Ohm
Max RF Voltage:
1000 Vp (per Vorsicht HF-Spannung label)
Form Factor:
Floor-Standing Enclosure / Cabinet
Dimensions:
27.5" W x 22" D x 53" H
Front Panel Meters:
Incident Power (kW), Reflected Power meters
Front Panel Controls:
Mains/Standby/Remote switch, RF on/off, Overload indicator, Interlock
Power Switch:
Siemens rotary lockout/keyed main disconnect
Internal Power Supply Module:
Hüttinger Netzteil Typ B 66-0015
Internal RF Unit:
Hüttinger HF-Teil Typ B 76-0002
Internal Control Board:
Hüttinger Typ B 38-0114
Application:
RF Plasma Etching, Sputtering, CVD, PVD Semiconductor
Cooling:
Forced air (internal axial fans visible)
Country/Region of Manufacture:
West Germany
Condition:
As-Is / For Parts or Not Working
Seller Notes:
Sold AS-IS. Freight shipping required — contact us for quote or local pickup.
Condition Notes:
Balzers RFS 302 RF Plasma Generator Power Supply sold AS-IS, untested, for parts or repair. Not powered or tested at our facility. Freight shipping required — contact us for a quote or local pickup.
Advanced Energy Navigator II 3155999-175 RF Match Network – rear-angled view showing I/O panel and warning labels Advanced Energy Navigator II RF Match Network – rear I/O panel showing Configuration header, Host DB-9, EtherCAT, Ethernet Service ports, Pulse Sync In, Interlock DB-9, and DC Power input
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Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma

Advanced Energy

$5,000.00
Was: $10,000.00
Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma RF impedance matching network for 13.56 MHz plasma systems. Standalone benchtop module that interfaces with Advanced Energy...
53326
SKU:
53326
Availability:
Usually ships within 1-2 business days.
Weight:
26.00 LBS
Brand:
Advanced Energy
Model:
Navigator II
MPN:
3155999-175
Secondary Model / Part Number:
1335752
SKU:
53326
Condition:
Used – Inspected
Seller Notes:
Unit only; inspected. Pulled from a working semiconductor process environment.
Country of Manufacture:
China
Form Factor:
Benchtop / Standalone Module
Frequency:
13.56 MHz
Application:
RF Impedance Matching – Plasma Etch / CVD / PVD
Hardware Revision:
Rev A
Interface – Configuration:
DIP Switch (Configuration Header)
Interface – Host:
DB-9 (J1) + RJ-45 EtherCAT (Act/In/Link)
Interface – Service:
RJ-45 Ethernet (Out/Link/Error)
Interface – RF Input:
Coaxial RF IN (J2)
Interface – Pulse Sync In:
SMA / BNC (J5)
Interface – Interlock:
DB-9 (J4)
Interface – DC Power:
Circular Power Input Connector
Status Indicators:
Power, Tuned, Fault LEDs
Network Protocol:
EtherCAT
Compatible With:
Advanced Energy RF Generators, Plasma Etch / CVD Systems
Condition Notes:
Advanced Energy Navigator II 3155999-175 RF Match Network, 13.56 MHz — used, inspected. Pulled from an active semiconductor process environment. Chassis shows light surface wear. All I/O connectors present and intact.