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Tegal

Tegal PlasmaLine 200 Plasma Barrel Etcher w/ Comdel CPS-200AX RF Power Supply

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SKU:
52023
MPN:
PlasmaLine 200
Condition:
Used
Availability:
Usually ships within 1-2 business days.
Weight:
100.00 LBS
Shipping:
Calculated at Checkout
  • Tegal PlasmaLine 200 Plasma Barrel Etcher front-right three-quarter view with Comdel CPS-200AX RF power supply mounted on top, dual cooling fans visible
  • Tegal PlasmaLine 200 Plasma Barrel Etcher front view with gas flow meter on left side and Comdel CPS-200AX power supply on top
  • Tegal PlasmaLine 200 front panel close-up showing Power On, PWR Supply Enable, Power Adjust labels and Start/Stop illuminated pushbutton controls
  • Tegal PlasmaLine 200 front panel angled view showing Power On indicator, PWR Supply Enable, Power Adjust knob, and AC ON pushbutton
  • Tegal PlasmaLine 200 Plasma Barrel Etcher front-left view showing gas flow meter, PLASMALINE nameplate, and Comdel RF supply on top
  • Tegal PlasmaLine 200 barrel etch chamber interior — open door view showing cylindrical quartz barrel and horizontal wafer rack/boat
  • Tegal PlasmaLine 200 plasma etch chamber open door showing circular chamber opening, clear viewport door, and internal wafer boat rack
  • Tegal PlasmaLine 200 left-side panel open showing internal tuning and flow adjustment controls with PLASMALINE nameplate and analog meter
  • Tegal PlasmaLine 200 internal control panel close-up — Tuning knob, Flow Adj knob, FWD/REF/PRES/FLOW meter labels visible
  • Tegal PlasmaLine 200 internal lower control section showing INC/DEC, PWR ADJ, MIN/MAX (C2) knobs and AC ON pushbutton
  • Tegal PlasmaLine 200 rear panel overview — DANGER HIGH VOLTAGE placard on Tegal RF section, right-side panel with J2 connector and fuse holders
  • Tegal Corporation model label on rear panel showing Model 200, Serial Number 0238, Date 5/79, with J2 D-sub connector below
  • Tegal PlasmaLine 200 rear right panel close-up — DANGER HIGH VOLTAGE label, DISCHARGE CAPACITORS BEFORE SERVICING warning, SENS MIN/MAX, PROC MONITOR, and fuse holders
  • Tegal PlasmaLine 200 rear panel detail — Tegal model plate, TEST J2 D-sub connector, SENS MIN/MAX control, PROC MONITOR port, and fuse holders
  • Comdel CPS-200AX RF power supply label — Comdel Inc., Beverly MA, Model CPS-200AX, Serial AX-86, Date of Mfg 1/3/94, 115 VOLTS
  • Comdel CPS-200AX RF power supply bottom label and 115 VOLTS warning sticker with multi-pin connector plug visible
  • Comdel CPS-200AX RF power supply side panel showing DANGER HIGH VOLTAGE decal, cooling vent, and CAUTION warranty void sticker
  • Tegal Corporation FCC Regulation 18 certification label — Novato/Richmond California, ISM band compliance statement
  • Tegal PlasmaLine 200 left-side view showing ventilation fins and Comdel CPS-200AX RF supply with gas inlet fitting and interconnecting cables
  • Tegal PlasmaLine 200 rear-left view showing side ventilation fins, Comdel CPS-200AX on top, interconnecting coaxial and signal cables, and base turntable
$1,200.00
Was: $2,400.00
Current Stock: 1

Sold Out

Description

Tegal PlasmaLine 200 Plasma Barrel Etcher w/ Comdel CPS-200AX RF Power Supply

Benchtop plasma barrel etcher with cylindrical quartz chamber designed for semiconductor processing applications. Unit includes Comdel CPS-200AX RF power supply; original Tegal RF section disconnected and rewired. Tegal supply provides control power only.

Specifications & What's Included

  • Model: PlasmaLine 200 (Tegal); RF Supply: Comdel CPS-200AX
  • Chamber: Barrel/tunnel cylindrical quartz with wafer rack
  • RF Power: 115V AC input; OEM RF section replaced with Comdel CPS-200AX
  • Controls: Power On, PWR Supply Enable, Power Adjust, Start/Stop, Tuning, Flow Adjust
  • Instrumentation: Analog meter (FWD/REF/PRES/FLOW); flow meter on front panel
  • FCC Regulation 18 (ISM band) certified

Applications

Plasma barrel etchers are used for photoresist ashing, plasma etching, and general semiconductor processing. The barrel configuration allows batch processing of multiple wafers in a single cycle. These systems are commonly integrated into semiconductor fabrication workflows for materials removal and surface preparation tasks.

Condition: Used
This Tegal PlasmaLine 200 Plasma Barrel Etcher has been tested with the included Comdel CPS-200AX RF power supply and is working as intended. Note that the original RF section of the Tegal power supply has been disconnected and the system has been rewired to operate from the Comdel CPS-200AX in place of the original RF source. The Tegal supply remains in the system and is still required to provide control power. The unit shows the wear you'd expect on vintage semiconductor equipment — the orange sheet-metal cabinet has surface scuffs and discoloration, the front panel labels are intact, and all controls are present. The Comdel CPS-200AX (115V, serial AX-86, manufactured 1/3/94) is mounted on top and interconnected. Please view our photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Tegal
Model:
PlasmaLine 200
MPN:
200
Type:
Plasma Barrel Etcher / Plasma Asher
SKU:
52023
Included RF Power Supply Brand:
Comdel
Included RF Power Supply Model:
CPS-200AX
RF Power Supply Serial Number (Comdel):
AX-86
RF Power Supply Date of Manufacture:
1/3/94
Main Unit Serial Number:
0238
Main Unit Date of Manufacture:
5/79
Country/Region of Manufacture:
United States
Power Requirements (Comdel RF Supply):
115V AC
RF Section Configuration:
OEM RF section disconnected; rewired for Comdel CPS-200AX RF supply
Control Power Source:
Original Tegal supply (control power only)
Application:
Plasma barrel etching, photoresist ashing, semiconductor processing
Form Factor:
Benchtop / Tabletop
Chamber Type:
Barrel/Tunnel — cylindrical quartz chamber with wafer rack
Front Panel Controls:
Power On, PWR Supply Enable, Power Adjust, Start/Stop, Tuning, Flow Adj
Gas Flow Control:
Flow meter / flow adjustment knob visible on front
Meter:
Analog FWD/REF/PRES/FLOW meter on front panel
Rear Panel:
DANGER HIGH VOLTAGE section, SENS MIN/MAX, PROC MONITOR, fuse holders, J2 connector
FCC Certification:
FCC Regulation 18 (ISM band)
Seller Notes:
Includes Comdel CPS-200AX RF power supply (interconnected). Tegal RF section disconnected; Tegal supply provides control power only.
Condition:
Used – Inspected and Tested
Condition Notes:
Tegal PlasmaLine 200 Plasma Barrel Etcher tested with included Comdel CPS-200AX RF supply — working as intended. Original Tegal RF section disconnected; Tegal supply provides control power only. Cosmetic wear consistent with age. Used.
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Cooling:
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DC Bias:
DC Bias control and display (front panel)
Front Panel Controls:
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Seller Notes:
Sold as-is for parts. Includes mass flow controller, control boards, gas plumbing, load/unload stations, and power cable.
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Gas Inputs:
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Mass Flow Controller:
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