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Tegal

Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For Parts

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SKU:
42622
MPN:
803
Condition:
Used
Availability:
Usually ships within 3-5 business days via freight carrier — contact us to arrange.
Weight:
350.00 LBS
Shipping:
Calculated at Checkout
  • Tegal 803 Plasma Inline RF Wafer Etcher front view with cover on showing control panel and wafer handler arms
  • Tegal 803 interior left side with cover removed showing control PCB and wafer elevator/transport mechanism
  • Tegal 803 Plasma Inline RF Wafer Etcher front three-quarter view with top cover removed revealing internal components
  • Tegal 803 rear view showing gold-anodized chassis, wiring harnesses, MFC gas plumbing, and heavy-duty power cord
  • Tegal 803 front control panel close-up showing Volts/Torr, % Flow/MFC, Temperature, Watts, Process, and Wafer Status displays
  • Tegal 803 control chassis close-up showing Tegal Corporation label, DC supply, chart recorder output, and interlock reset
  • Tegal 803 interior top view with cover removed showing reaction chamber, RF matching network coil, gas plumbing, and PCBs
  • Tegal 803 left side wafer elevator assembly showing motorized lead-screw transport and ribbon cable harness
  • Tegal 803 main control PCB close-up showing green circuit board with ICs, capacitors, and power transistors
  • Tegal 803 interior side view showing MFC (mass flow controller) gas manifold assembly with stainless fittings and process gas lines
  • Tegal 803 rear panel close-up showing vacuum pump port, GAS 1–4 manifold connections, coolant in/out, cleaning flow adjust, and warning label
  • Tegal 803 internal rear panel showing P1, P2, P3, P4 multi-pin connectors, DC bias, RF connections, and wiring harnesses
  • Tegal 803 manufacturer data plate showing Tegal Corporation, Novato CA, Part No. 803, Serial No. 8030293, Made in USA
  • Tegal 803 interior right-side view showing motion PCB, secondary control board, wafer handler arm, and RF transformer coil assembly
  • Tegal 803 interior overview from above showing gas delivery plumbing, process chamber area, wafer handler track, and secondary PCBs
$1,500.00
Was: $3,000.00
Current Stock: 1

Sold Out

Description

Tegal 803 Plasma Inline RF Wafer Etcher Semiconductor Etch Tool For Parts

Inline RF plasma wafer etcher designed for semiconductor processing. This motorized system performs reactive ion etching (RIE) on wafers using four process gas lines and automated wafer transport.

Specifications & What's Included

  • Model: Tegal 803 (Serial: 8030293)
  • Type: Inline RF Plasma Etcher with motorized wafer handler
  • Process Gas Inputs: 4 dedicated lines plus cleaning gas
  • Control Parameters: RF watts, vacuum (Torr), gas flow/MFC, temperature, process and wafer status
  • Connections: Vacuum pump port, coolant in/out, heavy-duty multi-pin power connector
  • All major internal components present; cover removed

Applications

The Tegal 803 is used for RF plasma etching in semiconductor manufacturing, including pattern transfer and material removal on silicon wafers. This inline configuration integrates with automated wafer processing lines for high-volume production. The system was designed to work within Tegal 803 series process module environments common in semiconductor fabrication facilities.

Condition: For Parts or Not Working
This Tegal 803 Plasma Inline RF Wafer Etcher is being sold as-is for parts or repair. It has not been tested and no functionality is guaranteed. The top cover has been removed for photos to show the internal components, which appear largely intact — the reaction chamber, RF matching network, gas delivery manifold with MFC plumbing (four process gas lines plus cleaning gas), motorized wafer transport arms on both sides, control PCBs, and the main control chassis are all present. The chassis exterior shows the typical yellowing and surface oxidation of aged gold-anodized aluminum. Internal wiring harnesses and ribbon cables are visible and appear connected. This is a heavy system at approximately 400 pounds and will require freight shipping — please contact us before purchasing to arrange freight logistics. Please view our full photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Tegal
Model:
803
MPN:
803
Type:
Inline RF Plasma Wafer Etcher
SKU:
42622
Condition:
As-Is / For Parts or Not Working
Seller Notes:
Sold as-is for parts or repair. Cover removed; all major components present.
Country/Region of Manufacture:
United States
Serial Number (Internal):
8030293
Application / Use Case:
RF Plasma Etching, Semiconductor Wafer Processing
Process Type:
RF Plasma Etch (Reactive Ion Etch / RIE)
Configuration:
Inline Automatic
Gas Inputs:
4 process gas lines (GAS 1, GAS 2, GAS 3, GAS 4) + cleaning gas
Control Panel:
Volts/Torr, % Flow/MFC, Temperature, Watts, Process Status, Wafer Status
Vacuum Connection:
To Vacuum Pump port visible on rear panel
Coolant Connections:
Coolant In / Coolant Out ports on rear panel
Power Connection:
Heavy-duty multi-pin plug (visible in photos)
Power Outlets:
Chart & Service Power Outlets, 24 VAC, DC Supply on control chassis
Form Factor:
Freestanding Inline System
Approximate Weight:
~400 lbs — freight shipping required
Wafer Handler:
Motorized inline wafer transport with end effectors on both sides
Interlock:
Top cover interlock and Interlock Reset present
Compatible With:
Tegal 803 series plasma etch process modules
Manufacturer Location:
Tegal Corporation, Novato, CA 94947
Condition Notes:
Tegal 803 Plasma Inline RF Wafer Etcher sold as-is for parts or repair. Untested, no functionality guaranteed. Major internal components present. ~400 lbs, freight required. Please review photos and contact us with questions.
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Related Products

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Tegal 803 Inline Automatic Wafer RF Plasma Etcher – front and right side view showing front panel controls, digital displays, and partial cover open on wafer load station Tegal 803 Plasma Etcher – rear view showing wiring harnesses, large rotary disconnect switch, multiple gas/utility fittings, and power cable
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Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch System

Tegal

$3,000.00
Was: $6,000.00
Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch SystemRF plasma dry etch tool designed for automated inline semiconductor wafer processing. Performs plasma-based material removal...
42618
SKU:
42618
Availability:
Usually ships within 3-5 business days via freight carrier; contact us to arrange shipping.
Weight:
370.00 LBS
Brand:
Tegal
Model:
803
MPN:
803
Type:
Inline Automatic Wafer RF Plasma Etcher
SKU:
42618
Condition:
As-Is / For Parts or Not Working
Seller Notes:
RF power supply intact; sold as-is for parts or repair; freight shipping required
Country/Region of Manufacture:
United States
Application / Use Case:
Semiconductor wafer plasma etching, dry etch processing
Process Type:
RF Plasma Etch (Dry Etch)
Wafer Handling:
Inline automatic wafer transport
Gas Inputs:
Multiple gas channels (Gas 1, Gas 2, Gas 3, Gas 4, Cleaning Gas)
Mass Flow Controller:
Mass flow controller module present (visible internally)
RF Power Supply:
Intact (confirmed present)
Form Factor:
Freestanding benchtop/floor unit on casters
Control Interface:
Front panel digital displays and switches
Approximate Weight:
~400 lbs (freight shipping required)
Condition Notes:
Tegal 803 RF Plasma Etcher sold as-is for parts or repair. We were unable to test it; no functionality guaranteed. RF power supply intact. Power cable ends show corrosion. ~400 lbs, freight required.