null
Tegal

Tegal 99-200-005 903e Sensor Interface Spatula SIS-5 Rev G PCB Module

(No reviews yet) Write a Review
SKU:
27385
MPN:
99-200-005 M300353
Condition:
New
Availability:
Usually ships within 1–2 business days.
Weight:
5.00 LBS
Shipping:
Calculated at Checkout
  • Tegal 99-200-005 SIS-5 Rev G Sensor Interface PCB module sealed in anti-static bag with Tegal label tag
  • Tegal 99-200-005 SIS-5 Rev G PCB – top side showing SCSI-style edge connector, DIP ICs, DIP switch, and ribbon connectors
  • Tegal 99-200-005 SIS-5 PCB – reverse angle showing component side with part number label and TEGAL silkscreen
  • Tegal 99-200-005 SIS-5 PCB – opposite end view showing DB-style edge connector and multi-pin wire harness connectors
  • Tegal 99-200-005 SIS-5 PCB – angled view showing DIP switches, capacitors, resistor arrays, and connector layout
  • Tegal logo silkscreened on PCB edge with Dialight LED indicators visible near board edge
  • Close-up of label on PCB reading 99-200-005 REV.G SIS-5 confirming part number and revision
$295.00
Was: $600.00
Current Stock: 1

Sold Out

Description

Tegal 99-200-005 903e Sensor Interface Spatula SIS-5 Rev G PCB Module

Sensor Interface PCB module designed for the Tegal 903e Plasma Etch System. This card handles sensor signal processing and interface functions within the plasma etch chamber control architecture.

Specifications & What's Included

  • Model: 99-200-005 (SIS-5 Rev G)
  • Compatible System: Tegal 903e Plasma Etch System
  • Form Factor: PCB Card/Module
  • Revision: G
  • Manufactured: United States
  • Packaging: Anti-static bag with Tegal label tag

Applications

This module was used in semiconductor fabrication processes, specifically within plasma etch systems where sensor feedback is critical for process control and chamber monitoring. The SIS-5 interface reads and transmits sensor data to the main system controller. Compatible with Tegal 903e production and research systems.

Condition: New
This Tegal 99-200-005 SIS-5 Rev G Sensor Interface Spatula PCB module is new old stock. The board is unused and uninstalled. It was found in its original anti-static bag with the Tegal part identification tag still attached. It may no longer be in its original manufacturer's box, but the board itself shows no signs of use or installation. Please view our photo set and contact us if you have any questions.
View AllClose

Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
View AllClose

Additional Information

Brand:
Tegal
Model:
99-200-005
MPN:
99-200-005
Secondary Model:
M300353
Type:
Sensor Interface PCB Module
SKU:
27385
Revision:
Rev G
Sub-Model / Designation:
SIS-5
Compatible With:
Tegal 903e Plasma Etch System
Application:
Plasma Etch / Semiconductor Fabrication
Form Factor:
PCB Card / Module
Condition:
New – Old Stock, may be out of original box
Seller Notes:
New old stock PCB module in anti-static bag with Tegal label tag attached.
Country/Region of Manufacture:
United States
Condition Notes:
Tegal 99-200-005 SIS-5 Rev G Sensor Interface PCB is new old stock — unused, uninstalled, in anti-static bag with Tegal label tag. May be out of original box. No signs of use.
View AllClose

Related Products

Related Products

Tegal 903e IGC-5 PCB module 99-126-005 – top side view showing component layout and edge connector Tegal 903e IGC-5 circuit board 99-126-005 – reverse angle showing large centronics-style connector and terminal blocks
Add to Cart
Quick view

Tegal 903e IGC-5 PCB Module 99-126-005 Rev P Plasma Etcher Semiconductor Card

Tegal

$300.00
Was: $600.00
Tegal 903e IGC-5 PCB Module 99-126-005 Rev P Plasma Etcher Semiconductor CardPCB module designed for the Tegal 903e plasma etcher system. This circuit board is a core component used in semiconductor...
27382
SKU:
27382
Availability:
Usually ships within 1-2 business days.
Weight:
4.00 LBS
Brand:
Tegal
Model:
903e
MPN:
99-126-005
Secondary Model:
IGC-5
Hardware Revision:
Rev P
Type:
PCB Module / Circuit Board
SKU:
27382
Compatible With:
Tegal 903e Plasma Etcher
Application:
Plasma Etch / Semiconductor Processing
Form Factor:
PCB Card / Module
Condition:
Used – Pulled from Working Environment
Seller Notes:
Board only; pulled from working Tegal 903e plasma etcher system.
Country/Region of Manufacture:
United States
Condition Notes:
Tegal 903e IGC-5 PCB module 99-126-005 Rev P pulled from a working plasma etcher. Inspected and in good condition — no visible burns or damage. Functional when removed from service.
Tegal 40-297-002 903e plasma etcher lift pin — end-on view showing round 3mm cross-section Tegal 40-297-002 903e plasma etcher lift pin — full length side view showing 54mm clear quartz rod
Add to Cart
Quick view

Tegal 903e 40-297-002 Plasma Etcher Pin 54mm x 3mm Quartz Lift Pin Part

Tegal

$30.00
Was: $60.00
Tegal 903e 40-297-002 Plasma Etcher Pin 54mm x 3mm Quartz Lift Pin PartThis is a new lift pin for the Tegal 903e plasma etcher, manufactured by Tegal Corporation under part number 40-297-002. The pin...
27387
SKU:
27387
Availability:
Usually ships within 1–2 business days.
Weight:
2.00 LBS
Brand:
Tegal
Model:
903e
MPN:
40-297-002
Type:
Plasma Etcher Lift Pin
SKU:
27387
Compatible With:
Tegal 903e Plasma Etcher
Material:
Quartz
Length:
54mm (2.125 in)
Diameter:
3mm (0.125 in)
Application:
Plasma Etch / Semiconductor Wafer Processing
Seller Notes:
New part; may be out of original manufacturer packaging.
Country/Region of Manufacture:
United States
Condition Notes:
Tegal 903e lift pin (40-297-002) is new and unused. May be out of original packaging but the part itself is unissued and in new condition. No wear or defects visible.