Advanced Energy
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Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663
Advanced Energy
$15,000.00Was: $30,000.00Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663 The Advanced Energy Paramount Plus 6060 is an industrial VHF RF power generator designed for plasma-based semiconductor...53327- SKU:
- 53327
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 100.00 LBS
- Brand:
- Advanced Energy Industries
- Model:
- Paramount Plus 6060
- Secondary Model:
- 660-189197R100
- MPN:
- 31550260-663
- SKU:
- 53327
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Includes part numbers 31550260-663 and 660-189197R100. No power supply, cables, or accessories included unless noted separately.
- Form Factor:
- Benchtop / Integrated RF Generator
- Country of Manufacture:
- United States
- Power Requirements:
- 200–208V AC, Three Phase, 50–60 Hz, 40A maximum
- Cooling:
- Water-cooled (facility water connection required; disconnect before servicing)
- Max Water Pressure:
- 6.9 Bar / 690 kPa
- RF Type:
- VHF (Very High Frequency) RF Power Generator
- Application:
- Plasma deposition, wafer processing, ion implantation, semiconductor manufacturing
- Certifications:
- CE, RoHS Compliant, CSA (C/US)
- Date Code:
- 08/2015
- Radiation Warning:
- Non-ionizing radiation present. No user-serviceable parts. Do not remove cover.
- Phase:
- Three Phase
- Voltage Rating:
- 200-208V AC
- Current Rating:
- 40A Maximum
- Frequency:
- 50-60 Hz
- Condition Notes:
- This Advanced Energy Paramount Plus 6060 VHF RF Generator was professionally pulled from a working production environment where it was in operational service.
- Frequency Band:
- VHF (Very High Frequency)
- Water Cooling Pressure Rating:
- 6.9 bar / 690 kPa
- Compatible With:
- Plasma process chambers, CVD/PECVD systems, RIE tools, RF delivery systems
- Secondary Reference:
- 660-189197R100
- Product Type:
- VHF RF Power Generator
- Power Input:
- Three-phase AC
- Maximum Input Current:
- 40A
- Thermal Management:
- Integrated water cooling
- Compatible Systems:
- RF delivery systems, impedance-matching networks, plasma process chambers
- Type:
- VHF RF Power Generator
- Country/Region of Manufacture:
- United States
- Compatible With (2):
- Impedance matching networks, RF delivery networks
$15,000.00Was: $30,000.00 -
Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma
Advanced Energy
$5,000.00Was: $10,000.00Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma RF impedance matching network for 13.56 MHz plasma systems. Standalone benchtop module that interfaces with Advanced Energy...53326- SKU:
- 53326
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 26.00 LBS
- Brand:
- Advanced Energy
- Model:
- Navigator II
- MPN:
- 3155999-175
- Secondary Model / Part Number:
- 1335752
- SKU:
- 53326
- Condition:
- Used – Inspected
- Seller Notes:
- Unit only; inspected. Pulled from a working semiconductor process environment.
- Country of Manufacture:
- China
- Form Factor:
- Benchtop / Standalone Module
- Frequency:
- 13.56 MHz
- Application:
- RF Impedance Matching – Plasma Etch / CVD / PVD
- Hardware Revision:
- Rev A
- Interface – Configuration:
- DIP Switch (Configuration Header)
- Interface – Host:
- DB-9 (J1) + RJ-45 EtherCAT (Act/In/Link)
- Interface – Service:
- RJ-45 Ethernet (Out/Link/Error)
- Interface – RF Input:
- Coaxial RF IN (J2)
- Interface – Pulse Sync In:
- SMA / BNC (J5)
- Interface – Interlock:
- DB-9 (J4)
- Interface – DC Power:
- Circular Power Input Connector
- Status Indicators:
- Power, Tuned, Fault LEDs
- Network Protocol:
- EtherCAT
- Compatible With:
- Advanced Energy RF Generators, Plasma Etch / CVD Systems
- Condition Notes:
- Advanced Energy Navigator II 3155999-175 RF Match Network, 13.56 MHz — used, inspected. Pulled from an active semiconductor process environment. Chassis shows light surface wear. All I/O connectors present and intact.
$5,000.00Was: $10,000.00 -
Advanced Energy RFDS 2000-2V RF Generator 3155038-013 13.56MHz 5kW 208V 3P
Advanced Energy
$2,500.00Was: $5,000.00Advanced Energy RFDS 2000-2V RF Generator 3155038-013 13.56MHz 5kW 208V 3P RF power generator for semiconductor processing applications. Operates at 13.56 MHz with 5 kW output power, water-cooled...53323- SKU:
- 53323
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 32.00 LBS
- Brand:
- Advanced Energy
- Model:
- RFDS 2000-2V
- MPN:
- 3155038-013
- SKU:
- 53323
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold AS-IS for parts or repair. Not tested. Unit only — no cables included.
- Form Factor:
- Benchtop / Enclosed Module
- Power Requirements:
- 208V, 3-Phase, 50/60Hz, 5kW
- Output Frequency:
- 13.56 MHz
- Power Rating:
- 5 kW
- Voltage Rating:
- 208V
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Output Voltage:
- 387V (labeled on output panel)
- Cooling Method:
- Water Cooled
- Max Water Pressure:
- 6.90 Bar / 690 kPa
- Control Interface:
- D-Sub (DB-25 style) Control Connector
- Input Connector:
- High-current multi-pin circular connector
- Output Connector:
- Coaxial RF output port
- Status Indicators:
- AC On, RF On, Alarm LED indicators
- Certifications:
- CSA NRTL/C, CE, LR 106911
- Application:
- Plasma etch, CVD, PVD, semiconductor processing
- Country of Manufacture:
- USA
- Hardware Revision:
- C
- Compatible With:
- Plasma etch and deposition systems using 13.56 MHz RF
- Condition Notes:
- Advanced Energy RFDS 2000-2V RF Generator 3155038-013 sold AS-IS for parts or repair. Pulled from working environment; not tested at our facility. No functionality guarantee. Cosmetically good. Contact us with questions.
$2,500.00Was: $5,000.00 -
Advanced Energy MDX 2011-011-C 5KW DC Magnetron Drive Power Supply 208V 3Ph
Advanced Energy
$950.00Was: $2,200.00Advanced Energy MDX 2011-011-C 5KW DC Magnetron Drive Power Supply 208V 3Ph 50/60Hz The Advanced Energy MDX 2011-011-C is a 5-kilowatt DC power supply engineered for magnetron drive applications in...52058- SKU:
- 52058
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 65.00 LBS
- User Manual:
- Available — Advanced Energy MDX Magnetron Drive User Manual
- Brand:
- Advanced Energy
- Model:
- MDX 2011-011-C
- MPN:
- 2011-011-C
- SKU:
- 52058
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Unit only. User manual available separately.
- Series:
- MDX Series
- Form Factor:
- Rackmount – 24in W × 20in D × 7in H
- Power Rating:
- 5 kW DC output
- Voltage Rating:
- 208V AC
- Phase:
- Three Phase (3Ø)
- Frequency:
- 50/60 Hz
- Output Type:
- DC
- Application:
- Magnetron drive, PVD, CVD, thin-film deposition, sputtering
- Interface Connectors:
- USER (DB-25), DISPLAY (DB-25)
- Breakers:
- Three-position circuit breaker array — rear panel
- Front Panel Controls:
- Dual digital displays, Emergency Stop button, status indicators
- Cooling:
- Dual large-diameter axial exhaust fans
- Dimensions:
- 24 inches W × 20 inches D × 7 inches H
- Country of Manufacture:
- USA – Fort Collins, Colorado
- Compatible With:
- Advanced Energy MDX Series magnetron sputtering systems, PVD/CVD thin film deposition platforms
- Condition Notes:
- This Advanced Energy MDX 2011-011-C 5KW DC magnetron drive power supply has not been powered up or tested at our facility, but was pulled from a working industrial environment where it was previously in service.
- Front Panel Features:
- Dual digital displays (Left and Right, switchable to Actual readout), KW/Volts/Amps monitoring, Arc/Ramp/Setpoint/Plasma/Output/Target Life/Temp/Water/Vacuum/Aux status indicators, Emergency Stop button
- Circuit Protection:
- Three-position circuit breaker array, rear panel
- Front Panel Displays:
- Dual digital displays, KW/Volts/Amps readout
- Status Indicators:
- Arc, Ramp, Setpoint, Plasma, Output, Target Life, Temp, Water, Vacuum, Auxiliary
- Compatible With 2:
- PVD/CVD thin-film deposition platforms
- Rear Connectors:
- USER (DB-25), DISPLAY (DB-25)
- Power Output Rating:
- 5 kW DC
- Input Voltage:
- 208V AC, three-phase, 50/60 Hz
- Compatible With 1:
- Advanced Energy MDX Series magnetron sputtering systems
- Display Features:
- KW/Volts/Amps readout, switchable to Actual values
$950.00Was: $2,200.00 -
Advanced Energy MDX-2.5K 2224-006-B DC Magnetron Sputtering Power Supply 2500W
Advanced Energy
$2,000.00Was: $4,000.00Advanced Energy MDX-2.5K 2224-006-B DC Magnetron Sputtering Power Supply 2500WThe Advanced Energy MDX-2.5K is a DC magnetron drive power supply designed for use in physical vapor deposition (PVD)...52049- SKU:
- 52049
- Availability:
- Usually ships within 1–2 business days.
- Weight:
- 80.00 LBS
- Brand:
- Advanced Energy
- Model:
- MDX-2.5K
- MPN:
- 2224-006-B
- Type:
- DC Magnetron Sputtering Power Supply
- SKU:
- 52049
- Output Voltage:
- 500–1800V DC
- Max Power Output:
- 2500W
- Power Rating:
- 2500 Watts
- Application / Use Case:
- DC Magnetron Sputtering, PVD Thin Film Deposition
- Form Factor:
- Rackmount
- Seller Notes:
- Unit only — no additional accessories confirmed included.
- Country/Region of Manufacture:
- United States
- Condition:
- Used – Pulled from Working Environment
- Compatible With:
- PVD sputtering systems, magnetron cathode targets
- Condition Notes:
- This Advanced Energy MDX-2.5K (2224-006-B) DC sputtering power supply could not be fully tested at our facility. Sold as-inspected in used condition. Cosmetically intact with light wear. Please view photos and contact us with questions.
$2,000.00Was: $4,000.00 -
Advanced Energy PI-980 Aera Pressure Insensitive MFC Mass Flow Controller
Advanced Energy
$84.00Was: $175.00Advanced Energy PI-980 Aera Pressure Insensitive MFC CAL DATA AMAT FCPIDN980C-ABA BIN: MULTI-08 RANGE: 10000 SCCM CAL GAS: N2 DNET FW: 2.10 N2 FLOWS: 100%: 10000.716 SCCM 50%: 499.351 SCCM 30%:...51795- SKU:
- 51795
- Weight:
- 6.00 LBS
$84.00Was: $175.00 -
Advanced Energy RAS Split Inductor 10kW 40kHz 3152522-001B Semiconductor
Advanced Energy
$900.00Was: $1,800.00Advanced Energy RAS Split Inductor 10kW 40kHz 3152522-001B SemiconductorRF split inductor and power filter module designed for Advanced Energy RAS semiconductor processing systems. Handles...51712- SKU:
- 51712
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 29.00 LBS
- Brand:
- Advanced Energy
- Model:
- RAS Split Inductor
- MPN:
- 3152522-001B
- Secondary Model:
- 3152522-001 B
- SKU:
- 51712
- Type:
- RF Split Inductor / Power Filter Module
- Power Rating:
- 10 kW
- Frequency:
- 40 kHz
- Input Voltage Max:
- 1100 V max (Input A, Input B)
- Output Voltage Max A:
- 1650 V max (Output A)
- Output Voltage Max B:
- 2300 V max (Output B)
- Output Voltage Max C:
- 1650 V max (Output C)
- Connections:
- Multi-port high-voltage bulkhead connectors (Input A/B, Output A/B/C)
- Application:
- Semiconductor plasma/PVD/CVD RF power systems
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold as-is, untested. Unit only — no cables or accessories included.
- Country/Region of Manufacture:
- United States
- Form Factor:
- Standalone / Panel-Mount Module
- Condition Notes:
- Advanced Energy RAS Split Inductor 3152522-001B sold as-is. We were unable to test this unit — functionality not confirmed. Fair used cosmetic condition. No cables or accessories. Sold for parts or repair.
$900.00Was: $1,800.00 -
Advanced Energy MDX Pinnacle 8kW DC Power Supply B5181854DD 400V 3-Phase
Advanced Energy
$1,600.00Was: $3,200.00Advanced Energy MDX Pinnacle 8kW DC Power Supply B5181854DD 400V 3-PhaseThe Advanced Energy MDX Pinnacle is a high-power DC magnetron drive power supply designed for physical vapor deposition (PVD)...45576- SKU:
- 45576
- Availability:
- Usually ships within 1–2 business days.
- Weight:
- 55.00 LBS
- Brand:
- Advanced Energy
- Model:
- MDX Pinnacle
- MPN:
- B5181854DD
- Secondary Model:
- 3152352-122C
- Type:
- DC Magnetron Drive Power Supply
- SKU:
- 45576
- Output Power:
- 8 kW pulsed
- Input Voltage:
- 400V AC
- Input Current:
- 22A
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Form Factor:
- Rack Mount
- Interface:
- Profibus Port, Remote (DB9), RS-232
- Output Configuration:
- 3-pole output terminal block (L1, L2, L3, N)
- Certifications:
- CE
- Application:
- PVD Sputtering, Thin Film Deposition, Plasma Etch
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Unit only — no additional accessories confirmed included.
- Country/Region of Manufacture:
- United States
- Condition Notes:
- Advanced Energy MDX Pinnacle 8kW DC power supply, P/N B5181854DD. Inspected and in good condition; pulled from a working environment where it was in active use. Normal surface wear. Rear ports and terminals intact.
$1,600.00Was: $3,200.00