Advanced Energy
-
Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663
Advanced Energy
$15,000.00Was: $30,000.00Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663 The Advanced Energy Paramount Plus 6060 is an industrial VHF RF power generator designed for plasma-based semiconductor...53327- SKU:
- 53327
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 100.00 LBS
- Brand:
- Advanced Energy
- Model:
- Paramount Plus 6060
- Secondary Model:
- 660-189197R100
- MPN:
- 31550260-663
- SKU:
- 53327
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Includes part numbers 31550260-663 and 660-189197R100. No power supply, cables, or accessories included unless noted separately.
- Form Factor:
- Benchtop / Integrated RF Generator
- Country of Manufacture:
- United States
- Power Requirements:
- 200–208V AC, Three Phase, 50–60 Hz, 40A maximum
- Cooling:
- Water-cooled (facility water connection required; disconnect before servicing)
- Max Water Pressure:
- 6.9 Bar / 690 kPa
- RF Type:
- VHF (Very High Frequency) RF Power Generator
- Application:
- Plasma deposition, wafer processing, ion implantation, semiconductor manufacturing
- Certifications:
- CE, RoHS Compliant, CSA (C/US)
- Date Code:
- 08/2015
- Radiation Warning:
- Non-ionizing radiation present. No user-serviceable parts. Do not remove cover.
- Phase:
- Three Phase
- Voltage Rating:
- 200-208V AC
- Current Rating:
- 40A Maximum
- Frequency:
- 50-60 Hz
- Condition Notes:
- This Advanced Energy Paramount Plus 6060 VHF RF Generator was professionally pulled from a working production environment where it was in operational service.
- Frequency Band:
- VHF (Very High Frequency)
- Water Cooling Pressure Rating:
- 6.9 bar / 690 kPa
- Compatible With:
- Plasma process chambers, CVD/PECVD systems, RIE tools, RF delivery systems
- Secondary Reference:
- 660-189197R100
- Product Type:
- VHF RF Power Generator
- Power Input:
- Three-phase AC
- Maximum Input Current:
- 40A
- Thermal Management:
- Integrated water cooling
- Compatible Systems:
- RF delivery systems, impedance-matching networks, plasma process chambers
- Type:
- VHF RF Power Generator
- Country/Region of Manufacture:
- United States
- Compatible With (2):
- Impedance matching networks, RF delivery networks
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$15,000.00Was: $30,000.00 -
Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma
Advanced Energy
$5,000.00Was: $10,000.00Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma RF impedance matching network for 13.56 MHz plasma systems. Standalone benchtop module that interfaces with Advanced Energy...53326- SKU:
- 53326
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 26.00 LBS
- Brand:
- Advanced Energy
- Model:
- Navigator II
- MPN:
- 3155999-175
- Secondary Model / Part Number:
- 1335752
- SKU:
- 53326
- Condition:
- Used – Inspected
- Seller Notes:
- Unit only; inspected. Pulled from a working semiconductor process environment.
- Country of Manufacture:
- China
- Form Factor:
- Benchtop / Standalone Module
- Frequency:
- 13.56 MHz
- Application:
- RF Impedance Matching – Plasma Etch / CVD / PVD
- Hardware Revision:
- Rev A
- Interface – Configuration:
- DIP Switch (Configuration Header)
- Interface – Host:
- DB-9 (J1) + RJ-45 EtherCAT (Act/In/Link)
- Interface – Service:
- RJ-45 Ethernet (Out/Link/Error)
- Interface – RF Input:
- Coaxial RF IN (J2)
- Interface – Pulse Sync In:
- SMA / BNC (J5)
- Interface – Interlock:
- DB-9 (J4)
- Interface – DC Power:
- Circular Power Input Connector
- Status Indicators:
- Power, Tuned, Fault LEDs
- Network Protocol:
- EtherCAT
- Compatible With:
- Advanced Energy RF Generators, Plasma Etch / CVD Systems
- Condition Notes:
- Advanced Energy Navigator II 3155999-175 RF Match Network, 13.56 MHz — used, inspected. Pulled from an active semiconductor process environment. Chassis shows light surface wear. All I/O connectors present and intact.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$5,000.00Was: $10,000.00 -
Advanced Energy MDX 2011-011-C 5KW DC Magnetron Drive Power Supply 208V 3Ph
Advanced Energy
$950.00Was: $2,200.00Advanced Energy MDX 2011-011-C 5KW DC Magnetron Drive Power Supply 208V 3Ph 50/60Hz The Advanced Energy MDX 2011-011-C is a 5-kilowatt DC power supply engineered for magnetron drive applications in...52058- SKU:
- 52058
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 65.00 LBS
- User Manual:
- Available — Advanced Energy MDX Magnetron Drive User Manual
- Brand:
- Advanced Energy
- Model:
- MDX 2011-011-C
- MPN:
- 2011-011-C
- SKU:
- 52058
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Unit only. User manual available separately.
- Series:
- MDX Series
- Form Factor:
- Rackmount – 24in W × 20in D × 7in H
- Power Rating:
- 5 kW DC output
- Voltage Rating:
- 208V AC
- Phase:
- Three Phase (3Ø)
- Frequency:
- 50/60 Hz
- Output Type:
- DC
- Application:
- Magnetron drive, PVD, CVD, thin-film deposition, sputtering
- Interface Connectors:
- USER (DB-25), DISPLAY (DB-25)
- Breakers:
- Three-position circuit breaker array — rear panel
- Front Panel Controls:
- Dual digital displays, Emergency Stop button, status indicators
- Cooling:
- Dual large-diameter axial exhaust fans
- Dimensions:
- 24 inches W × 20 inches D × 7 inches H
- Country of Manufacture:
- USA – Fort Collins, Colorado
- Compatible With:
- Advanced Energy MDX Series magnetron sputtering systems, PVD/CVD thin film deposition platforms
- Condition Notes:
- This Advanced Energy MDX 2011-011-C 5KW DC magnetron drive power supply has not been powered up or tested at our facility, but was pulled from a working industrial environment where it was previously in service.
- Front Panel Features:
- Dual digital displays (Left and Right, switchable to Actual readout), KW/Volts/Amps monitoring, Arc/Ramp/Setpoint/Plasma/Output/Target Life/Temp/Water/Vacuum/Aux status indicators, Emergency Stop button
- Circuit Protection:
- Three-position circuit breaker array, rear panel
- Front Panel Displays:
- Dual digital displays, KW/Volts/Amps readout
- Status Indicators:
- Arc, Ramp, Setpoint, Plasma, Output, Target Life, Temp, Water, Vacuum, Auxiliary
- Compatible With 2:
- PVD/CVD thin-film deposition platforms
- Rear Connectors:
- USER (DB-25), DISPLAY (DB-25)
- Power Output Rating:
- 5 kW DC
- Input Voltage:
- 208V AC, three-phase, 50/60 Hz
- Compatible With 1:
- Advanced Energy MDX Series magnetron sputtering systems
- Display Features:
- KW/Volts/Amps readout, switchable to Actual values
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$950.00Was: $2,200.00 -
Advanced Energy MDX-2.5K 2224-006-B DC Magnetron Sputtering Power Supply 2500W
Advanced Energy
$2,000.00Was: $4,000.00Advanced Energy MDX-2.5K 2224-006-B DC Magnetron Sputtering Power Supply 2500WThe Advanced Energy MDX-2.5K is a DC magnetron drive power supply designed for use in physical vapor deposition (PVD)...52049- SKU:
- 52049
- Availability:
- Usually ships within 1–2 business days.
- Weight:
- 80.00 LBS
- Brand:
- Advanced Energy
- Model:
- MDX-2.5K
- MPN:
- 2224-006-B
- Type:
- DC Magnetron Sputtering Power Supply
- SKU:
- 52049
- Output Voltage:
- 500–1800V DC
- Max Power Output:
- 2500W
- Power Rating:
- 2500 Watts
- Application / Use Case:
- DC Magnetron Sputtering, PVD Thin Film Deposition
- Form Factor:
- Rackmount
- Seller Notes:
- Unit only — no additional accessories confirmed included.
- Country/Region of Manufacture:
- United States
- Condition:
- Used – Pulled from Working Environment
- Compatible With:
- PVD sputtering systems, magnetron cathode targets
- Condition Notes:
- This Advanced Energy MDX-2.5K (2224-006-B) DC sputtering power supply could not be fully tested at our facility. Sold as-inspected in used condition. Cosmetically intact with light wear. Please view photos and contact us with questions.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$2,000.00Was: $4,000.00 -
Advanced Energy Aera PI-980 MFC Mass Flow Controller 10000 SCCM N2
Advanced Energy
$85.00Was: $175.00Advanced Energy Aera PI-980 MFC Mass Flow Controller 10000 SCCM N2 FCPIDN980C-ABAPressure insensitive mass flow controller designed for semiconductor process gas flow regulation. This unit handles...51795- SKU:
- 51795
- Availability:
- Usually ships within 1–2 business days.
- Weight:
- 6.00 LBS
- Brand:
- Advanced Energy
- Model:
- PI-980
- MPN:
- FCPIDN980C-ABA
- Secondary Model:
- Aera PI-980
- Type:
- Pressure Insensitive Mass Flow Controller (MFC)
- SKU:
- 51795
- Flow Range:
- 10000 SCCM
- Calibration Gas:
- N2 (Nitrogen)
- Communication Protocol:
- DeviceNet (DNET)
- Firmware Version:
- DNET FW 2.10
- Diaphragm Material:
- SPRON 510
- Seat Material:
- PCTFE
- BIN:
- MULTI-08
- OEM Customer:
- AMAT (Applied Materials)
- Inlet/Outlet Valve:
- Ham-Let HMC20-4VKC Metal Diaphragm Valve
- Valve Cv:
- 0.3
- Valve Body Material:
- SUS 316
- Valve Normally:
- Normally Closed
- Country/Region of Manufacture:
- China
- Manufacture Date:
- 2009-05-26
- Form Factor:
- Surface Mount / Stick Module
- Application:
- Semiconductor process gas flow control
- Compatible With:
- Applied Materials (AMAT) semiconductor process tools
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Includes MFC body with inlet/outlet Ham-Let metal diaphragm valves on manifold base
- Condition Notes:
- Advanced Energy Aera PI-980 MFC (FCPIDN980C-ABA) inspected and in good used condition. Pulled from a working semiconductor fab environment where it was in active use. Body, valves, and manifold intact with normal wear.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$85.00Was: $175.00 -
Advanced Energy RAS Split Inductor 10kW 40kHz 3152522-001B Semiconductor
Advanced Energy
$900.00Was: $1,800.00Advanced Energy RAS Split Inductor 10kW 40kHz 3152522-001B SemiconductorRF split inductor and power filter module designed for Advanced Energy RAS semiconductor processing systems. Handles...51712- SKU:
- 51712
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 29.00 LBS
- Brand:
- Advanced Energy
- Model:
- RAS Split Inductor
- MPN:
- 3152522-001B
- Secondary Model:
- 3152522-001 B
- SKU:
- 51712
- Type:
- RF Split Inductor / Power Filter Module
- Power Rating:
- 10 kW
- Frequency:
- 40 kHz
- Input Voltage Max:
- 1100 V max (Input A, Input B)
- Output Voltage Max A:
- 1650 V max (Output A)
- Output Voltage Max B:
- 2300 V max (Output B)
- Output Voltage Max C:
- 1650 V max (Output C)
- Connections:
- Multi-port high-voltage bulkhead connectors (Input A/B, Output A/B/C)
- Application:
- Semiconductor plasma/PVD/CVD RF power systems
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold as-is, untested. Unit only — no cables or accessories included.
- Country/Region of Manufacture:
- United States
- Form Factor:
- Standalone / Panel-Mount Module
- Condition Notes:
- Advanced Energy RAS Split Inductor 3152522-001B sold as-is. We were unable to test this unit — functionality not confirmed. Fair used cosmetic condition. No cables or accessories. Sold for parts or repair.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$900.00Was: $1,800.00 -
Advanced Energy MDX Pinnacle 8kW DC Power Supply B5181854DD 400V 3-Phase
Advanced Energy
$1,600.00Was: $3,200.00Advanced Energy MDX Pinnacle 8kW DC Power Supply B5181854DD 400V 3-PhaseThe Advanced Energy MDX Pinnacle is a high-power DC magnetron drive power supply designed for physical vapor deposition (PVD)...45576- SKU:
- 45576
- Availability:
- Usually ships within 1–2 business days.
- Weight:
- 55.00 LBS
- Brand:
- Advanced Energy
- Model:
- MDX Pinnacle
- MPN:
- B5181854DD
- Secondary Model:
- 3152352-122C
- Type:
- DC Magnetron Drive Power Supply
- SKU:
- 45576
- Output Power:
- 8 kW pulsed
- Input Voltage:
- 400V AC
- Input Current:
- 22A
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Form Factor:
- Rack Mount
- Interface:
- Profibus Port, Remote (DB9), RS-232
- Output Configuration:
- 3-pole output terminal block (L1, L2, L3, N)
- Certifications:
- CE
- Application:
- PVD Sputtering, Thin Film Deposition, Plasma Etch
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Unit only — no additional accessories confirmed included.
- Country/Region of Manufacture:
- United States
- Condition Notes:
- Advanced Energy MDX Pinnacle 8kW DC power supply, P/N B5181854DD. Inspected and in good condition; pulled from a working environment where it was in active use. Normal surface wear. Rear ports and terminals intact.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$1,600.00Was: $3,200.00