Description
Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663
The Advanced Energy Paramount Plus 6060 is an industrial VHF RF power generator designed for plasma-based semiconductor manufacturing, wafer processing, and materials processing applications. This benchtop-format RF generator supplies high-frequency power to plasma deposition chambers, etch systems, and ion implantation equipment. The integrated water-cooling system provides efficient thermal management for sustained operational duty in production environments.
Specifications & What's Included
- Make/Model: Advanced Energy Paramount Plus 6060
- Part Number: 31550260-663
- Secondary Model/Reference: 660-189197R100
- RF Type: VHF (Very High Frequency) Power Generator
- Power Input: Three-phase AC, 200–208V, 50–60 Hz
- Maximum Input Current: 40A
- Thermal Management: Integrated water cooling (facility water connection required)
- Water Pressure Rating: 6.9 bar / 690 kPa maximum
- Form Factor: Benchtop / integrated RF generator module
- Country of Manufacture: United States
- Certifications: CE, RoHS Compliant, CSA (C/US)
- Date Code: 08/2015
- Radiation Warning: Non-ionizing radiation present inside. No user-serviceable parts. Do not remove cover.
- Included: Unit only. No power supply, cables, or accessories included unless noted separately.
Applications
The Paramount Plus 6060 is used in plasma-based manufacturing processes including CVD (chemical vapor deposition), PECVD (plasma-enhanced CVD), reactive ion etching (RIE), and ion implantation systems. This class of RF power generator is fundamental to modern semiconductor fabrication, providing the RF energy that sustains and controls plasma in process chambers. Equipment like the Paramount Plus 6060 has been deployed in wafer fabs, materials processing facilities, and research labs where RF power delivery must be stable, controllable, and integrated with impedance-matching networks and plasma delivery systems. The water-cooled design supports continuous duty operation in 24/7 production environments. Compatible with standard RF chamber configurations, CVD/PECVD tools, RIE systems, and RF delivery and impedance-matching networks.
This Advanced Energy Paramount Plus 6060 VHF RF Generator was professionally pulled from a working production environment where it was in operational service. The unit has been inspected and exhibits normal cosmetic wear consistent with industrial use and age. The equipment retains its original water-cooling system and three-phase power connectivity. As a used piece of industrial RF generation equipment, it is offered in sound operational condition and ready for integration into a plasma processing or semiconductor manufacturing system. Please review our photo set carefully and contact us with any questions before purchasing.
Warranty Information
Additional Information
Brand: |
Advanced Energy Industries |
Model: |
Paramount Plus 6060 |
Secondary Model: |
660-189197R100 |
MPN: |
31550260-663 |
SKU: |
53327 |
Condition: |
Used – Pulled from Working Environment |
Seller Notes: |
Includes part numbers 31550260-663 and 660-189197R100. No power supply, cables, or accessories included unless noted separately. |
Form Factor: |
Benchtop / Integrated RF Generator |
Country of Manufacture: |
United States |
Power Requirements: |
200–208V AC, Three Phase, 50–60 Hz, 40A maximum |
Cooling: |
Water-cooled (facility water connection required; disconnect before servicing) |
Max Water Pressure: |
6.9 Bar / 690 kPa |
RF Type: |
VHF (Very High Frequency) RF Power Generator |
Application: |
Plasma deposition, wafer processing, ion implantation, semiconductor manufacturing |
Certifications: |
CE, RoHS Compliant, CSA (C/US) |
Date Code: |
08/2015 |
Radiation Warning: |
Non-ionizing radiation present. No user-serviceable parts. Do not remove cover. |
Phase: |
Three Phase |
Voltage Rating: |
200-208V AC |
Current Rating: |
40A Maximum |
Frequency: |
50-60 Hz |
Condition Notes: |
This Advanced Energy Paramount Plus 6060 VHF RF Generator was professionally pulled from a working production environment where it was in operational service. |
Frequency Band: |
VHF (Very High Frequency) |
Water Cooling Pressure Rating: |
6.9 bar / 690 kPa |
Compatible With: |
Plasma process chambers, CVD/PECVD systems, RIE tools, RF delivery systems |
Secondary Reference: |
660-189197R100 |
Product Type: |
VHF RF Power Generator |
Power Input: |
Three-phase AC |
Maximum Input Current: |
40A |
Thermal Management: |
Integrated water cooling |
Compatible Systems: |
RF delivery systems, impedance-matching networks, plasma process chambers |
Type: |
VHF RF Power Generator |
Country/Region of Manufacture: |
United States |
Compatible With (2): |
Impedance matching networks, RF delivery networks |