Description
Advanced Energy RAS Split Inductor 10kW 40kHz 3152522-001B Semiconductor
RF split inductor and power filter module designed for Advanced Energy RAS semiconductor processing systems. Handles high-voltage multi-output distribution in plasma-based manufacturing equipment.
Specifications & What's Included
- Model: RAS Split Inductor | MPN: 3152522-001B
- Power Rating: 10 kW at 40 kHz
- Input: 1100 V max (Inputs A & B)
- Outputs: 1650 V max (A & C), 2300 V max (B)
- High-voltage bulkhead connectors (5 ports total)
- Panel-mount form factor | Unit only—no cables or accessories
Applications
This inductor module is used in Advanced Energy RF power delivery systems for semiconductor manufacturing, including plasma-enhanced chemical vapor deposition (PECVD), physical vapor deposition (PVD), and plasma etch chambers. The split-output design distributes filtered RF power across multiple process electrodes or load branches. Typical installations include wafer processing, thin-film deposition, and ion implantation equipment.
Condition: For Parts or Not Working
This Advanced Energy RAS Split Inductor (P/N 3152522-001B) is being sold as-is. We were unable to test this unit, so its functionality cannot be confirmed. Externally the enclosure is in fair used condition — the aluminum housing shows some light surface scuffing and minor soiling consistent with previous service use, but there is no visible major damage to the chassis or connectors. The top bulkhead connector ports and internal terminal board appear intact based on photos. This unit is sold as-is with no warranty of functionality. Please view our photo set and contact us if you have any questions.
This Advanced Energy RAS Split Inductor (P/N 3152522-001B) is being sold as-is. We were unable to test this unit, so its functionality cannot be confirmed. Externally the enclosure is in fair used condition — the aluminum housing shows some light surface scuffing and minor soiling consistent with previous service use, but there is no visible major damage to the chassis or connectors. The top bulkhead connector ports and internal terminal board appear intact based on photos. This unit is sold as-is with no warranty of functionality. Please view our photo set and contact us if you have any questions.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
Advanced Energy |
Model: |
RAS Split Inductor |
MPN: |
3152522-001B |
Secondary Model: |
3152522-001 B |
SKU: |
51712 |
Type: |
RF Split Inductor / Power Filter Module |
Power Rating: |
10 kW |
Frequency: |
40 kHz |
Input Voltage Max: |
1100 V max (Input A, Input B) |
Output Voltage Max A: |
1650 V max (Output A) |
Output Voltage Max B: |
2300 V max (Output B) |
Output Voltage Max C: |
1650 V max (Output C) |
Connections: |
Multi-port high-voltage bulkhead connectors (Input A/B, Output A/B/C) |
Application: |
Semiconductor plasma/PVD/CVD RF power systems |
Condition: |
As-Is / For Parts or Not Working |
Seller Notes: |
Sold as-is, untested. Unit only — no cables or accessories included. |
Country/Region of Manufacture: |
United States |
Form Factor: |
Standalone / Panel-Mount Module |
Condition Notes: |
Advanced Energy RAS Split Inductor 3152522-001B sold as-is. We were unable to test this unit — functionality not confirmed. Fair used cosmetic condition. No cables or accessories. Sold for parts or repair. |