Advanced Energy

Advanced Energy Aera PI-980 MFC Mass Flow Controller 10000 SCCM N2

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SKU:
51795
MPN:
PI-980
Condition:
Used
Availability:
Usually ships within 1–2 business days.
Weight:
6.00 LBS
Shipping:
Calculated at Checkout
  • Advanced Energy Aera PI-980 Pressure Insensitive MFC with Ham-Let inlet valve and manifold base – front three-quarter view
  • Ham-Let HMC20-4VKC metal diaphragm valve label detail on Aera PI-980 MFC manifold assembly – close-up side view
  • Advanced Energy Aera PI-980 MFC top panel showing NET, MOD, STATUS indicator, MODE button, ADDRESS dials (MSD/LSD), and DATA RATE dial with asset label MFC-23
  • Aera PI-980 calibration data label: AMAT FCPIDN980C-ABA, S/N C090519037, Range 10000 SCCM, Cal Gas N2, DNET FW 2.10, N2 flow verification data
  • Ham-Let normally-closed metal diaphragm valve (Cv 0.3, SPRON 510 diaphragm, PCTFE seat) on PI-980 MFC inlet – close-up front view with MV-30 label
  • Aera PI-980 rear label: FCPIDN980C-ABA, BIN MULTI-08, Range 10000 SCCM, MAC address, Made in China, manufactured 2009-05-26, barcode and CE mark
  • Advanced Energy Aera PI-980 Pressure Insensitive MFC full assembly with Ham-Let valves and manifold base – alternate front three-quarter view
$85.00
Was: $175.00
Current Stock: 14

Sold Out

Description

Advanced Energy Aera PI-980 MFC Mass Flow Controller 10000 SCCM N2 FCPIDN980C-ABA

Pressure insensitive mass flow controller designed for semiconductor process gas flow regulation. This unit handles nitrogen at flow rates up to 10000 SCCM with DeviceNet communication integration.

Specifications & What's Included

  • Model: Advanced Energy Aera PI-980 (MPN: FCPIDN980C-ABA)
  • Flow Range: 10000 SCCM (nitrogen calibrated)
  • Max Operating Pressure: 150 PSIG (typical operation 60–90 PSIG)
  • Communication: DeviceNet (DNET FW 2.10)
  • Diaphragm Material: SPRON 510; Seat Material: PCTFE
  • Inlet/Outlet: Ham-Let HMC20-4VKC metal diaphragm valves (SUS 316, normally closed)
  • Includes manifold base assembly with both valves installed
  • Manufacture Date: May 2009

Applications

Mass flow controllers of this type are standard components in semiconductor fabrication process tools for controlling reactive and inert gases. The PI-980 was deployed in Applied Materials (AMAT) equipment for wafer processing applications requiring precise nitrogen flow regulation. These controllers integrate into process gas distribution systems where DeviceNet-enabled monitoring and control are required.

Condition: Used
This Advanced Energy Aera PI-980 Pressure Insensitive Mass Flow Controller has been inspected and is in good used condition. It was pulled from a working semiconductor fab environment where it was in active use. The body, manifold base, and Ham-Let inlet/outlet diaphragm valves are intact and show normal handling wear consistent with fab service — no cracks, corrosion, or damage visible. The calibration data label is fully legible with all N2 flow verification data present. Please view our photo set and contact us if you have any questions. Please note: We have multiple units in stock — yours may not be the one shown in the photos, however, it will be similar in condition and function.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Advanced Energy
Model:
PI-980
MPN:
FCPIDN980C-ABA
Secondary Model:
Aera PI-980
Type:
Pressure Insensitive Mass Flow Controller (MFC)
SKU:
51795
Flow Range:
10000 SCCM
Calibration Gas:
N2 (Nitrogen)
Communication Protocol:
DeviceNet (DNET)
Firmware Version:
DNET FW 2.10
Diaphragm Material:
SPRON 510
Seat Material:
PCTFE
Max Operating Pressure:
150 PSIG
Actual Operating Pressure:
60–90 PSIG
BIN:
MULTI-08
OEM Customer:
AMAT (Applied Materials)
Inlet/Outlet Valve:
Ham-Let HMC20-4VKC Metal Diaphragm Valve
Valve Cv:
0.3
Valve Body Material:
SUS 316
Valve Normally:
Normally Closed
Country/Region of Manufacture:
China
Manufacture Date:
2009-05-26
Form Factor:
Surface Mount / Stick Module
Application:
Semiconductor process gas flow control
Compatible With:
Applied Materials (AMAT) semiconductor process tools
Condition:
Used – Pulled from Working Environment
Seller Notes:
Includes MFC body with inlet/outlet Ham-Let metal diaphragm valves on manifold base
Condition Notes:
Advanced Energy Aera PI-980 MFC (FCPIDN980C-ABA) inspected and in good used condition. Pulled from a working semiconductor fab environment where it was in active use. Body, valves, and manifold intact with normal wear.
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Condition:
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