Description
Aera PI-98 PI-980 Pressure Insensitive MFC Mass Flow Controller 100 SCCM N2
Pressure insensitive thermal mass flow controller for nitrogen gas management. The PI-980 series uses NeuralStep technology to maintain accurate flow rates across varying upstream/downstream pressure conditions.
Specifications & What's Included
- Model: PI-98 / PI-980 Series (MPN: 0190-34212)
- Flow Range: 100 SCCM N2
- Interface: Digital with M12 circular connector (top mounted)
- Configuration: MULTI-04 (Multi-Gas Multi-Range)
- Address/Data Rate: Rotary switches with NET/MOD/STATUS indicators
- Form Factor: Inline / Panel Mount compatible
- Unit only — no cables or accessories included
Applications
MFCs of this type are used in semiconductor processing equipment for gas delivery control in etch, CVD, PVD, and diffusion chambers. The pressure-insensitive design compensates for fluctuations in system backpressure, maintaining stable flow rates required for process repeatability. Common in wafer fabrication and thin-film deposition systems.
Condition: Used
This Aera PI-98 PI-980 Series Pressure Insensitive Mass Flow Controller (part 0190-34212) has been inspected and appears to be in good used condition. It was pulled from a working semiconductor processing environment where it was previously in active service. The body and manifold show normal handling wear consistent with fab use. The M12 connector on top and the gas manifold ports appear intact. Please view our photo set and contact us if you have any questions.
This Aera PI-98 PI-980 Series Pressure Insensitive Mass Flow Controller (part 0190-34212) has been inspected and appears to be in good used condition. It was pulled from a working semiconductor processing environment where it was previously in active service. The body and manifold show normal handling wear consistent with fab use. The M12 connector on top and the gas manifold ports appear intact. Please view our photo set and contact us if you have any questions.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
Aera (Hitachi Metals) |
Model: |
PI-98 |
Secondary Model: |
PI-980 Series |
MPN: |
0190-34212 |
SKU: |
51811 |
Type: |
Pressure Insensitive Mass Flow Controller (MFC) |
Gas Type: |
N2 (Nitrogen) |
Full Scale Flow Range: |
100 SCCM |
Semi Gas Code: |
13 |
Conversion Factor (CF): |
1.000 |
BIN Configuration: |
MULTI-04 (MGMR — Multi-Gas Multi-Range) |
Technology: |
NeuralStep Pressure Insensitive Thermal MFC |
Connector Type: |
M12 circular connector (top) |
Interface: |
Digital — Address/Data Rate rotary switches, NET/MOD/STATUS indicators |
Flow Direction: |
Labeled FLOW on body |
Application: |
Semiconductor etch, CVD, PVD, diffusion processes |
Form Factor: |
Inline / Panel Mount |
Country/Region of Manufacture: |
China |
Condition: |
Used – Pulled from Working Environment |
Seller Notes: |
Unit only — no cables or accessories included. Part 0190-34212. |
Condition Notes: |
Aera PI-98 PI-980 MFC (0190-34212), 100 SCCM N2. Inspected, good used condition. Pulled from a working semiconductor processing environment. Normal handling wear. M12 connector and manifold ports appear intact. |
