Hitachi Metals

Aera PI-98 PI-980 Pressure Insensitive MFC Mass Flow Controller 100 SCCM N2

Hitachi Metals

SKU:

51811

Availability:

Usually ships within 1-2 business days.

Weight:

2.65 LBS

Brand:

Aera (Hitachi Metals)

Model:

PI-98

Secondary Model:

PI-980 Series

MPN:

0190-34212

SKU:

51811

Type:

Pressure Insensitive Mass Flow Controller (MFC)

Gas Type:

N2 (Nitrogen)

Full Scale Flow Range:

100 SCCM

Semi Gas Code:

13

Conversion Factor (CF):

1.000

BIN Configuration:

MULTI-04 (MGMR — Multi-Gas Multi-Range)

Technology:

NeuralStep Pressure Insensitive Thermal MFC

Connector Type:

M12 circular connector (top)

Interface:

Digital — Address/Data Rate rotary switches, NET/MOD/STATUS indicators

Flow Direction:

Labeled FLOW on body

Application:

Semiconductor etch, CVD, PVD, diffusion processes

Form Factor:

Inline / Panel Mount

Country/Region of Manufacture:

China

Condition:

Used – Pulled from Working Environment

Seller Notes:

Unit only — no cables or accessories included. Part 0190-34212.

Condition Notes:

Aera PI-98 PI-980 MFC (0190-34212), 100 SCCM N2. Inspected, good used condition. Pulled from a working semiconductor processing environment. Normal handling wear. M12 connector and manifold ports appear intact.

California Prop 65 Warning:

WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov