Description
Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma
RF impedance matching network for 13.56 MHz plasma systems. Standalone benchtop module that interfaces with Advanced Energy RF generators to optimize power delivery during plasma etch, CVD, and PVD processes.
Specifications & What's Included
- Model: Navigator II (MPN: 3155999-175, Rev A)
- Frequency: 13.56 MHz
- Interfaces: DB-9 host (J1), RJ-45 EtherCAT, coaxial RF input (J2), SMA/BNC pulse sync (J5), DB-9 interlock (J4)
- Network Protocol: EtherCAT
- Configuration: DIP switch header
- Status: Power, Tuned, and Fault LEDs
- Power: Circular connector input
Applications
Used in semiconductor process equipment for RF impedance matching in plasma etch, chemical vapor deposition, and physical vapor deposition systems.
Please note: We may have multiple units of this item in stock. The unit you receive may vary slightly from the one shown in the photos. All units are functionally equivalent and inspected to the same standard.
Condition: Used
Advanced Energy Navigator II 3155999-175 RF Match Network, 13.56 MHz — used, inspected. Pulled from an active semiconductor process environment. Chassis shows light surface wear. All I/O connectors present and intact.
Advanced Energy Navigator II 3155999-175 RF Match Network, 13.56 MHz — used, inspected. Pulled from an active semiconductor process environment. Chassis shows light surface wear. All I/O connectors present and intact.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
Advanced Energy |
Model: |
Navigator II |
MPN: |
3155999-175 |
Secondary Model / Part Number: |
1335752 |
SKU: |
53326 |
Condition: |
Used – Inspected |
Seller Notes: |
Unit only; inspected. Pulled from a working semiconductor process environment. |
Country of Manufacture: |
China |
Form Factor: |
Benchtop / Standalone Module |
Frequency: |
13.56 MHz |
Application: |
RF Impedance Matching – Plasma Etch / CVD / PVD |
Hardware Revision: |
Rev A |
Interface – Configuration: |
DIP Switch (Configuration Header) |
Interface – Host: |
DB-9 (J1) + RJ-45 EtherCAT (Act/In/Link) |
Interface – Service: |
RJ-45 Ethernet (Out/Link/Error) |
Interface – RF Input: |
Coaxial RF IN (J2) |
Interface – Pulse Sync In: |
SMA / BNC (J5) |
Interface – Interlock: |
DB-9 (J4) |
Interface – DC Power: |
Circular Power Input Connector |
Status Indicators: |
Power, Tuned, Fault LEDs |
Network Protocol: |
EtherCAT |
Compatible With: |
Advanced Energy RF Generators, Plasma Etch / CVD Systems |
Condition Notes: |
Advanced Energy Navigator II 3155999-175 RF Match Network, 13.56 MHz — used, inspected. Pulled from an active semiconductor process environment. Chassis shows light surface wear. All I/O connectors present and intact. |
