-
Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663 – Used
Advanced Energy
$20,000.00Was: $49,999.99Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663 – Used The Advanced Energy Paramount Plus 6060 is an industrial-grade VHF RF (radiofrequency) power generator purpose-built for plasma-based semiconductor manufacturing, wafer processing,...53327- SKU:
- 53327
- Availability:
- Usually ships within 2-3 business days. Contact us for expedited shipping options.
- Weight:
- 100.00 LBS
- Brand:
- Advanced Energy Industries
- Model:
- Paramount Plus 6060
- Secondary Model:
- 660-189197R100
- MPN:
- 31550260-663
- SKU:
- 53327
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Includes part numbers 31550260-663 and 660-189197R100. No power supply, cables, or accessories included unless noted separately.
- Form Factor:
- Benchtop / Integrated RF Generator
- Country of Manufacture:
- United States
- Power Requirements:
- 200–208V AC, Three Phase, 50–60 Hz, 40A maximum
- Cooling:
- Water-cooled (facility water connection required; disconnect before servicing)
- Max Water Pressure:
- 6.9 Bar / 690 kPa
- RF Type:
- VHF (Very High Frequency) RF Power Generator
- Application:
- Plasma deposition, wafer processing, ion implantation, semiconductor manufacturing, materials processing
- Certifications:
- CE, RoHS Compliant, CSA (C/US)
- Date Code:
- 08/2015
- Radiation Warning:
- Non-ionizing radiation present inside. No user-serviceable parts. Do not remove cover.
- Phase:
- Three Phase
- Voltage Rating:
- 200-208V AC
- Current Rating:
- 40A Max
- Frequency:
- 50-60 Hz
- Condition Notes:
- This Advanced Energy Paramount Plus 6060 VHF RF generator has not been powered up or tested at our facility, but was pulled from an active semiconductor manufacturing environment where it was previously in use. The unit has been visually inspected an
- Photo Status:
- Photographed
- Frequency Band:
- VHF (Very High Frequency)
- Water Cooling Pressure Rating:
- 6.9 bar
- Compatible With:
- Plasma process chambers, CVD/PECVD systems, RIE tools, RF delivery networks, impedance matching systems
- Secondary Reference:
- 660-189197R100
- Product Type:
- VHF RF Power Generator
- Power Input:
- Three-phase AC
- Maximum Input Current:
- 40A
- Thermal Management:
- Integrated water cooling
- Compatible Systems:
- RF delivery systems, impedance-matching networks, plasma process chambers
$20,000.00Was: $49,999.99 -
Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma
Advanced Energy
$5,000.00Was: $10,000.00Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma RF impedance matching network for 13.56 MHz plasma systems. Standalone benchtop module that interfaces with Advanced Energy RF generators to optimize power delivery during plasma...53326- SKU:
- 53326
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 26.00 LBS
- Brand:
- Advanced Energy
- Model:
- Navigator II
- MPN:
- 3155999-175
- Secondary Model / Part Number:
- 1335752
- SKU:
- 53326
- Condition:
- Used – Inspected
- Seller Notes:
- Unit only; inspected. Pulled from a working semiconductor process environment.
- Country of Manufacture:
- China
- Form Factor:
- Benchtop / Standalone Module
- Frequency:
- 13.56 MHz
- Application:
- RF Impedance Matching – Plasma Etch / CVD / PVD
- Hardware Revision:
- Rev A
- Interface – Configuration:
- DIP Switch (Configuration Header)
- Interface – Host:
- DB-9 (J1) + RJ-45 EtherCAT (Act/In/Link)
- Interface – Service:
- RJ-45 Ethernet (Out/Link/Error)
- Interface – RF Input:
- Coaxial RF IN (J2)
- Interface – Pulse Sync In:
- SMA / BNC (J5)
- Interface – Interlock:
- DB-9 (J4)
- Interface – DC Power:
- Circular Power Input Connector
- Status Indicators:
- Power, Tuned, Fault LEDs
- Network Protocol:
- EtherCAT
- Compatible With:
- Advanced Energy RF Generators, Plasma Etch / CVD Systems
- Condition Notes:
- Advanced Energy Navigator II 3155999-175 RF Match Network, 13.56 MHz — used, inspected. Pulled from an active semiconductor process environment. Chassis shows light surface wear. All I/O connectors present and intact.
$5,000.00Was: $10,000.00 -
RFPP RF5S 7510313010 RF Generator 500W 13.56MHz 208VAC Semiconductor Plasma Etch
RFPP RF Power Products
$2,000.00Was: $4,000.00RFPP RF5S 7510313010 RF Generator 500W 13.56MHz 208VAC Semiconductor Plasma Etch RF power generator designed for semiconductor plasma processing applications. Benchtop unit manufactured in 1996 by RF Power Products Inc. Specifications & What's...53324- SKU:
- 53324
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 55.00 LBS
- Brand:
- RFPP (RF Power Products Inc)
- Model:
- RF5S
- MPN:
- 7510313010
- Secondary Model:
- 490-0580
- SKU:
- 53324
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold AS-IS for parts or repair. Does not power on.
- Country of Manufacture:
- USA
- Form Factor:
- Benchtop
- Power Requirements:
- 198-240VAC, 50/60Hz
- Output Frequency:
- 13.56 MHz
- Power Rating:
- 500 Watts
- Interface Type:
- RS232C / RS485, Analog Interface
- RF Output Connector:
- N-Type (RF OUT)
- Additional Connectors:
- CEX IN, CEX OUT, J1
- Application:
- Plasma Etch, CVD, Semiconductor Processing
- Date of Manufacture:
- 03/96
- Condition Notes:
- RFPP RF5S RF Generator 500W 13.56MHz tested working. Minor cosmetic wear on chassis; all connectors and controls functional. Ready for use.
$2,000.00Was: $4,000.00 -
Advanced Energy RFDS 2000-2V RF Generator 3155038-013 13.56MHz 5kW 208V 3P
Advanced Energy
$2,500.00Was: $5,000.00Advanced Energy RFDS 2000-2V RF Generator 3155038-013 13.56MHz 5kW 208V 3P RF power generator for semiconductor processing applications. Operates at 13.56 MHz with 5 kW output power, water-cooled design. Specifications & What's Included Input: 208V,...53323- SKU:
- 53323
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 32.00 LBS
- Brand:
- Advanced Energy
- Model:
- RFDS 2000-2V
- MPN:
- 3155038-013
- SKU:
- 53323
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold AS-IS for parts or repair. Not tested. Unit only — no cables included.
- Form Factor:
- Benchtop / Enclosed Module
- Power Requirements:
- 208V, 3-Phase, 50/60Hz, 5kW
- Output Frequency:
- 13.56 MHz
- Power Rating:
- 5 kW
- Voltage Rating:
- 208V
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Output Voltage:
- 387V (labeled on output panel)
- Cooling Method:
- Water Cooled
- Max Water Pressure:
- 6.90 Bar / 690 kPa
- Control Interface:
- D-Sub (DB-25 style) Control Connector
- Input Connector:
- High-current multi-pin circular connector
- Output Connector:
- Coaxial RF output port
- Status Indicators:
- AC On, RF On, Alarm LED indicators
- Certifications:
- CSA NRTL/C, CE, LR 106911
- Application:
- Plasma etch, CVD, PVD, semiconductor processing
- Country of Manufacture:
- USA
- Hardware Revision:
- C
- Compatible With:
- Plasma etch and deposition systems using 13.56 MHz RF
- Condition Notes:
- Advanced Energy RFDS 2000-2V RF Generator 3155038-013 sold AS-IS for parts or repair. Pulled from working environment; not tested at our facility. No functionality guarantee. Cosmetically good. Contact us with questions.
$2,500.00Was: $5,000.00 -
Hiden Analytical EPIU ESPion Advanced Langmuir Probe 115V Plasma Diagnostics
Hiden Analytical
$2,600.00Was: $5,200.00Hiden Analytical EPIU ESPion Advanced Langmuir Probe 115V Plasma Diagnostics Rackmount plasma diagnostics controller for Langmuir probe measurements. The ESPion unit processes probe data and interfaces with laboratory plasma systems for ion density,...53321- SKU:
- 53321
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 25.00 LBS
- Brand:
- Hiden Analytical
- Model:
- ESPion
- MPN:
- EPIU
- SKU:
- 53321
- Condition:
- Used – Inspected
- Seller Notes:
- Unit only; no probe tip or cables included unless shown in photos
- Form Factor:
- Rackmount, 2U
- Power Requirements:
- 115V AC, 300VA Max, 6.3AT 250V Fuse
- Application / Use Case:
- Plasma diagnostics, Langmuir probe measurements
- Interface Type:
- RS232 (MC-04), RS485/RS422 (MC-03), 10 BASE 2 (MC-02)
- I/O Ports:
- Trigger (ESP-01), Z-Drive (ESP-02), AUX I/O (ESP-03)
- Probe Port:
- ESP-04 (DB9), Analogue Input ESP-07 (DIN connector)
- Standards:
- CE Marked
- Country of Manufacture:
- United Kingdom
- Condition Notes:
- Hiden Analytical EPIU ESPion Langmuir Probe, used, pulled from active lab. Plugged in: power switch works, green Run LED illuminates. Not fully bench-tested. Good cosmetic condition with normal lab wear. Photos available.
$2,600.00Was: $5,200.00 -
Hiden Analytical LMC Linear Motion Driver 100-240V 300VA Max LMD-01 LMD-02
Hiden Analytical
$1,500.00Was: $3,000.00Hiden Analytical LMC Linear Motion Driver 100-240V 300VA Max LMD-01 LMD-02 2U rackmount linear motion driver manufactured by Hiden Analytical in the United Kingdom. Controls stepper or servo motor positioning for precision analytical instrumentation via...53320- SKU:
- 53320
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 24.00 LBS
- Brand:
- Hiden Analytical
- Model:
- LMC
- MPN:
- LMC
- SKU:
- 53320
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold as-is for parts or repair. Not tested.
- Form Factor:
- Rackmount, 2U
- Power Requirements:
- 100-240V AC, 50-60Hz, 300VA Max
- Fuse Rating:
- 6.3AT 250V
- Interface / Connectors:
- Control I/O (LMD-01), Linear Motion (LMD-02)
- Motor Connector:
- LMD-07 (4-pin circular)
- Application / Use Case:
- Linear motion control for analytical instruments
- Compatible With:
- Hiden Analytical mass spectrometer systems
- Country of Manufacture:
- United Kingdom
- Condition Notes:
- Hiden Analytical LMC Linear Motion Driver, tested and working. Minor cosmetic wear on silver panel and scratched black cover from lab use. All connectors and power inlet intact. Ready for use.
$1,500.00Was: $3,000.00 -
Hiden Analytical ESPION Advanced Langmuir Probe Controller 115V 300VA
Hiden Analytical
$2,500.00Was: $4,999.99Hiden Analytical ESPION Advanced Langmuir Probe Controller 115V 300VA Rackmount controller unit for Langmuir probe plasma diagnostics. Measures plasma parameters in discharge chambers and etch systems using external probe hardware. Specifications &...53319- SKU:
- 53319
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 25.00 LBS
- Brand:
- Hiden Analytical
- Model:
- ESPION
- MPN:
- ESPION
- SKU:
- 53319
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Unit only; no probe or accessories included
- Form Factor:
- Rackmount, 2U
- Power Requirements:
- 115V AC, 300VA Max, 6.3AT 250V Fuse
- Country of Manufacture:
- United Kingdom
- Application / Use Case:
- Langmuir probe plasma diagnostics
- Interface Type:
- RS232, RS485/RS422, 10 Base 2, AUX I/O
- Connector Types:
- DB-9, DB-25, BNC, DIN Analogue Input
- Rear Ports:
- ESP-01 Trigger, ESP-02 Z-Drive, ESP-03 AUX I/O, ESP-04 Probe
- Communication Ports:
- MC-04 RS232, MC-03 RS485/RS422, MC-02 10Base2
- Analogue Input:
- ESP-07 DIN connector
- Compatible With:
- Hiden Langmuir probe systems, plasma etch chambers
- Measurement Type:
- Plasma parameter measurement via Langmuir probe
- Condition Notes:
- Hiden Analytical ESPION Advanced Langmuir Probe Controller 115V 300VA. Tested, powers on and functions. Lab-used cosmetics: light scuffing on silver front panel, dust on black cover. All connectors intact. Ready for operation.
$2,500.00Was: $4,999.99 -
Hiden Analytical HAL RC ESP HAL IV Plasma Probe Controller 100-240V 300VA
Hiden Analytical
$1,500.00Was: $2,999.99Hiden Analytical HAL RC ESP HAL IV Plasma Probe Controller 100-240V 300VA Rackmount controller for Hiden Analytical electrostatic plasma probe (ESP) systems. Manages probe operation and data acquisition for plasma diagnostics in semiconductor processing...53318- SKU:
- 53318
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 20.00 LBS
- Brand:
- Hiden Analytical
- Model:
- HAL RC ESP
- Secondary Model:
- HAL IV ESP
- MPN:
- HAL RC ESP
- SKU:
- 53318
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Controller only; no probe or accessories confirmed included. Please contact us with questions before purchasing.
- Form Factor:
- Rackmount, 2U
- Power Requirements:
- 100-240V AC, 50-60Hz, 300VA Max
- Fuse Rating:
- 6.3AT 250V
- Interface Type:
- RS-232, RS-485
- Connector Types:
- BNC (Probe ESP-01, Guard ESP-02, Drive ESP-11), DB9 RS-232, DB15 RS-485, DB25 AUX I/O, DB15 Trips, DB15 Limit Switch, Multi-pin Motor connector
- Application / Use Case:
- Electrostatic plasma probe (ESP) control for plasma etch, CVD, and semiconductor process diagnostics
- Indicator Lights:
- Run (green LED), Fault (red LED) on front panel
- Compatible With:
- Hiden Analytical HAL series electrostatic plasma probe systems
- Country of Manufacture:
- United Kingdom
- Condition Notes:
- This Hiden Analytical HAL RC ESP HAL IV Electrostatic Plasma Probe Controller has not been powered up or bench-tested at our facility. It was pulled from a decommissioned environment where it was previously in service. The unit shows typical cosmetic
$1,500.00Was: $2,999.99
