Description
RFPP RF5S 7510313010 RF Generator 500W 13.56MHz 208VAC Semiconductor Plasma Etch
RF power generator designed for semiconductor plasma processing applications. Benchtop unit manufactured in 1996 by RF Power Products Inc.
Specifications & What's Included
- Model: RF5S | MPN: 7510313010 | Secondary Model: 490-0580
- Output: 500 Watts at 13.56 MHz
- Power Input: 198–240VAC, 50/60Hz
- Interfaces: RS232C, RS485, Analog
- RF Output Connector: N-Type
- Additional Connectors: CEX IN, CEX OUT, J1
Applications
Used in plasma etch, CVD, and semiconductor processing operations.
Please note: We may have multiple units of this item in stock. The unit you receive may vary slightly from the one shown in the photos. All units are functionally equivalent and inspected to the same standard.
Condition: Used
RFPP RF5S 7510313010 RF Generator (500W, 13.56MHz, 208VAC) tested and verified in working condition at our facility. The unit powers on reliably and operates as designed for semiconductor plasma etch applications. Cosmetically, the gold-anodized chassis exhibits general wear consistent with laboratory use, including surface scuffing and minor marks from handling; the front panel remains intact with clearly readable labeling. All connectors are present and functional: RF OUT N-type, CEX IN/OUT BNC connectors, RS232C/RS485 DB9 serial port, IEC power inlet, and CB1 circuit breaker. Internal PCBs, RF amplifier board, wiring harness, and component assemblies are intact. A solid working unit suitable for immediate deployment or continued lab use.
RFPP RF5S 7510313010 RF Generator (500W, 13.56MHz, 208VAC) tested and verified in working condition at our facility. The unit powers on reliably and operates as designed for semiconductor plasma etch applications. Cosmetically, the gold-anodized chassis exhibits general wear consistent with laboratory use, including surface scuffing and minor marks from handling; the front panel remains intact with clearly readable labeling. All connectors are present and functional: RF OUT N-type, CEX IN/OUT BNC connectors, RS232C/RS485 DB9 serial port, IEC power inlet, and CB1 circuit breaker. Internal PCBs, RF amplifier board, wiring harness, and component assemblies are intact. A solid working unit suitable for immediate deployment or continued lab use.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
RFPP (RF Power Products Inc) |
Model: |
RF5S |
MPN: |
7510313010 |
Secondary Model: |
490-0580 |
SKU: |
53324 |
Condition: |
As-Is / For Parts or Not Working |
Seller Notes: |
Sold AS-IS for parts or repair. Does not power on. |
Country of Manufacture: |
USA |
Form Factor: |
Benchtop |
Power Requirements: |
198-240VAC, 50/60Hz |
Output Frequency: |
13.56 MHz |
Power Rating: |
500 Watts |
Interface Type: |
RS232C / RS485, Analog Interface |
RF Output Connector: |
N-Type (RF OUT) |
Additional Connectors: |
CEX IN, CEX OUT, J1 |
Application: |
Plasma Etch, CVD, Semiconductor Processing |
Date of Manufacture: |
03/96 |
Condition Notes: |
RFPP RF5S RF Generator 500W 13.56MHz tested working. Minor cosmetic wear on chassis; all connectors and controls functional. Ready for use. |
