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RFPP RF Power Products

RFPP RF5S 7510313010 RF Generator 500W 13.56MHz 208VAC Semiconductor Plasma Etch

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SKU:
53324
MPN:
7510313010
Condition:
Used
Availability:
Usually ships within 1-2 business days.
Weight:
55.00 LBS
Shipping:
Calculated at Checkout
  • RFPP RF5S left side view showing perforated ventilation panel and small cutout for analog interface connector access
  • RFPP RF5S front panel LCD display close-up showing blank screen and PROGRAM and OPTIONS membrane buttons
  • RFPP RF5S front panel lower left detail showing RFPP logo and RF5S RF Power Products Inc branding
  • RFPP RF5S rear panel lower left close-up showing CB1 dual circuit breaker switches in ON position, RS232C/RS485 label, and partial analog interface connector
  • RFPP RF5S rear panel showing RF OUT N-type connector, CEX IN/OUT BNC connectors, J1 connector, 198-240VAC IEC inlet, CB1 circuit breaker, RS232C/RS485 DB9 port, analog interface green connector, and cooling fan
  • RFPP RF5S rear panel upper right close-up showing RF OUT N-type connector, CEX connectors, J1, and 198-240VAC IEC power inlet with NMB fan visible
  • RFPP RF5S interior top view with cover removed showing RF power amplifier board, inductors, capacitors, and wiring harness
  • RFPP RF5S right side view showing perforated ventilation panel, RFPP data label, and RF output coaxial connector
  • RFPP RF5S rear panel lower right detail showing RS232C/RS485 DB9 serial port and green analog interface multi-pin connector
  • RFPP RF5S rear panel cooling fan close-up showing NMB 4715MS-12T-B50 fan with protective wire guard
  • RFPP RF5S RF Generator front panel close-up showing LCD display, PROGRAM, OPTIONS, navigation buttons, RF ON/OFF button, and POWER ON/OFF switch
  • RFPP RF5S front panel detail showing RF ON/OFF red button and POWER ON/OFF toggle switch lower right
  • RFPP RF5S front panel right side showing arrow navigation keypad and RF ON/OFF red illuminated button
  • RFPP RF5S interior close-up of RF Plasma Products amplifier board 23-075988-501 showing power transistors, capacitors, inductors, and component markings
  • RFPP RF5S interior side view with cover removed showing main control PCB populated with ICs, logic chips, and connectors
  • RFPP RF5S RF Generator front and right-side angled view showing front panel display and ventilation slots on gold chassis
  • RFPP RF5S data plate label showing model 7510313010, serial 85-2693, date 03/96, line 208VAC 50/60Hz, rating 500W at 13.56MHz, country of manufacture USA, PM-100 designation
$2,000.00
Was: $4,000.00
Current Stock: 1

Sold Out

Description

RFPP RF5S 7510313010 RF Generator 500W 13.56MHz 208VAC Semiconductor Plasma Etch

RF power generator designed for semiconductor plasma processing applications. Benchtop unit manufactured in 1996 by RF Power Products Inc.

Specifications & What's Included

  • Model: RF5S | MPN: 7510313010 | Secondary Model: 490-0580
  • Output: 500 Watts at 13.56 MHz
  • Power Input: 198-240VAC, 50/60Hz
  • Interfaces: RS232C, RS485, Analog
  • RF Output Connector: N-Type
  • Additional Connectors: CEX IN, CEX OUT, J1

Applications

Used in plasma etch, CVD, and semiconductor processing operations.

Condition: Used
RFPP RF5S 7510313010 RF Generator 500W 13.56MHz 208VAC. Powers on, operates as designed. Gold chassis shows lab wear, scuffing, handling marks. Front panel intact. All connectors present and functional. Internal components intact.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
RFPP (RF Power Products Inc)
Model:
RF5S
MPN:
7510313010
Secondary Model:
490-0580
SKU:
53324
Seller Notes:
Sold AS-IS for parts or repair. Does not power on.
Country of Manufacture:
USA
Form Factor:
Benchtop
Power Requirements:
198-240VAC, 50/60Hz
Output Frequency:
13.56 MHz
Power Rating:
500 Watts
Interface Type:
RS232C / RS485, Analog Interface
RF Output Connector:
N-Type (RF OUT)
Additional Connectors:
CEX IN, CEX OUT, J1
Application:
Plasma Etch, CVD, Semiconductor Processing
Date of Manufacture:
03/96
Condition Notes:
RFPP RF5S 7510313010 RF Generator 500W 13.56MHz 208VAC. Powers on, operates as designed. Gold chassis shows lab wear, scuffing, handling marks. Front panel intact. All connectors present and functional. Internal components intact.
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44780
SKU:
44780
Availability:
Freight shipping required due to size and weight; contact us for a shipping quote.
Weight:
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Brand:
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Model:
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MPN:
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Type:
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SKU:
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Frequency:
13.56 MHz
Output Power:
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Vacuum Capacitor:
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Application:
Plasma Etch / Plasma Deposition / Semiconductor Processing
Front Panel Meters:
Incident Kilowatts (0-3 kW), Reflected Watts (0-500 W)
Controls:
Power knob (Min-Max), Power On, RF On, RF Off, O.L. Reset
Overload Indicators:
HV, LV, PA overload indicator lights
Fuses:
4 fuse positions: F1, F2, F3, F4
Circuit Breakers:
Control breaker and Line breaker (3-pole)
RF Hours Meter:
Elapsed RF ON time meter — reads approx. 4976+ hours
RF Output Connector:
Coaxial RF output (top of cabinet)
Control Connectors:
Military-style circular multi-pin connectors (side panel)
Directional Coupler:
External directional coupler box (GEN, LOAD, INC, REF ports)
Power Cable Included:
Large multi-conductor power cable with twist-lock and mil-spec connectors
Form Factor:
Free-Standing Cabinet
Dimensions:
23" W x 26" D x 60" H
Country/Region of Manufacture:
United States
Condition:
Used – Pulled from Working Environment
Seller Notes:
Includes Eimac 5CX1500A tube, Jennings UCS300-15D2364 capacitor, directional coupler, and power cable. Freight shipping required.
Condition Notes:
Plasma-Therm HFS 3000D 3kW RF Generator pulled from working environment; not tested at our facility. Interior and components appear intact. ~4,976 RF hours. Freight shipping required. Sold as-is. Please contact us with questions.
Drytek DRY-KW1 RF Power Supply front panel view showing two PA-500A amplifier modules flanking central DR-100A driver with analog meter Drytek DRY-KW1 RF Power Supply rear view showing internal wiring harness, transformers, and power connector
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Drytek DRY-KW1 RF Power Supply PA-500A DR-100A Plasma Wafer Etch Semiconductor

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$825.00
Was: $2,200.00
Drytek DRY-KW1 RF Power Supply PA-500A DR-100A Plasma Wafer Etch Semiconductor RF power supply unit designed for plasma wafer etching in semiconductor fabrication. This 7U rackmount system was...
48413
SKU:
48413
Availability:
Usually ships within 1-2 business days.
Weight:
140.00 LBS
Brand:
Drytek
Model:
DRY-KW1
MPN:
DRY-KW1
SKU:
48413
Condition:
Used – Inspected
Seller Notes:
Includes 2x PA-500A amplifier modules and 1x DR-100A driver module
Form Factor:
Rackmount, 7U
Compatible With:
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Application / Use Case:
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Type:
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Modules Included:
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Overall Dimensions:
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Condition Notes:
This Drytek DRY-KW1 RF Power Supply shows normal cosmetic wear consistent with prior service use — the front panel finish has some scuffing and paint wear visible on the lower section.