Description
Plasma-Therm HFS 3000D 3kW 13.56MHz RF Generator Eimac 5CX1500A Tube
This is a 3 kW RF generator operating at 13.56 MHz, designed for plasma processing applications. It features an Eimac 5CX1500A vacuum tube amplifier and Jennings UCS300-15D2364 variable vacuum capacitor.
Specifications & What's Included
- Output Power: 3 kW (3000 W) at 13.56 MHz
- RF Amplifier Tube: Eimac 5CX1500A
- Vacuum Capacitor: Jennings UCS300-15D2364
- Front Panel Meters: Incident Kilowatts (0–3 kW), Reflected Watts (0–500 W)
- Controls: Power knob, Power On, RF On/Off, Overload Reset
- Overload Indicators: HV, LV, PA lights
- RF Output: Coaxial connector (top of cabinet)
- Dimensions: 23" W × 26" D × 60" H
- Includes: Directional coupler box (GEN, LOAD, INC, REF ports) and multi-conductor power cable with mil-spec connectors
Applications
This generator supports plasma etch, plasma deposition, and semiconductor processing. The 13.56 MHz frequency is standard in semiconductor and industrial plasma systems. Equipment of this type integrates into larger process chambers for wafer processing, thin-film deposition, and etching operations. RF hours meter shows approximately 4,976 hours of operation.
Condition: Used
This Plasma-Therm HFS 3000D 3kW 13.56MHz RF Generator was pulled from a working environment but has not been powered or tested at our facility. The cabinet exterior shows scuffing and paint wear typical of a unit that has seen active service. The internal components — including the Eimac 5CX1500A tube, Jennings UCS300-15D2364 variable vacuum capacitor, helical coil, directional coupler, and wiring assemblies — appear intact and complete as shown in the photos. The RF ON-time meter reads approximately 4,976 hours. Included with the unit are the directional coupler box and the original multi-conductor power cable with military-style and twist-lock connectors. Due to its size (23" W x 26" D x 60" H) and weight (approximately 395 lbs), this unit requires freight shipping — please contact us for a freight quote before purchasing. Please view our photo set and contact us if you have any questions.
This Plasma-Therm HFS 3000D 3kW 13.56MHz RF Generator was pulled from a working environment but has not been powered or tested at our facility. The cabinet exterior shows scuffing and paint wear typical of a unit that has seen active service. The internal components — including the Eimac 5CX1500A tube, Jennings UCS300-15D2364 variable vacuum capacitor, helical coil, directional coupler, and wiring assemblies — appear intact and complete as shown in the photos. The RF ON-time meter reads approximately 4,976 hours. Included with the unit are the directional coupler box and the original multi-conductor power cable with military-style and twist-lock connectors. Due to its size (23" W x 26" D x 60" H) and weight (approximately 395 lbs), this unit requires freight shipping — please contact us for a freight quote before purchasing. Please view our photo set and contact us if you have any questions.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
Plasma-Therm |
Model: |
HFS 3000D |
MPN: |
HFS 3000D |
Type: |
RF Generator |
SKU: |
44780 |
Frequency: |
13.56 MHz |
Output Power: |
3 kW (3000 W) |
RF Amplifier Tube: |
Eimac 5CX1500A (5CX-1-500A) |
Vacuum Capacitor: |
Jennings UCS300-15D2364 Variable Vacuum Capacitor |
Application: |
Plasma Etch / Plasma Deposition / Semiconductor Processing |
Front Panel Meters: |
Incident Kilowatts (0-3 kW), Reflected Watts (0-500 W) |
Controls: |
Power knob (Min-Max), Power On, RF On, RF Off, O.L. Reset |
Overload Indicators: |
HV, LV, PA overload indicator lights |
Fuses: |
4 fuse positions: F1, F2, F3, F4 |
Circuit Breakers: |
Control breaker and Line breaker (3-pole) |
RF Hours Meter: |
Elapsed RF ON time meter — reads approx. 4976+ hours |
RF Output Connector: |
Coaxial RF output (top of cabinet) |
Control Connectors: |
Military-style circular multi-pin connectors (side panel) |
Directional Coupler: |
External directional coupler box (GEN, LOAD, INC, REF ports) |
Power Cable Included: |
Large multi-conductor power cable with twist-lock and mil-spec connectors |
Form Factor: |
Free-Standing Cabinet |
Dimensions: |
23" W x 26" D x 60" H |
Country/Region of Manufacture: |
United States |
Condition: |
Used – Pulled from Working Environment |
Seller Notes: |
Includes Eimac 5CX1500A tube, Jennings UCS300-15D2364 capacitor, directional coupler, and power cable. Freight shipping required. |
Condition Notes: |
Plasma-Therm HFS 3000D 3kW RF Generator pulled from working environment; not tested at our facility. Interior and components appear intact. ~4,976 RF hours. Freight shipping required. Sold as-is. Please contact us with questions. |