Plasma-Therm Inc

Plasma-Therm HFS 3000D 3kW 13.56MHz RF Generator Eimac 5CX1500A Tube

Plasma-Therm Inc

SKU:

44780

Availability:

Freight shipping required due to size and weight; contact us for a shipping quote.

Weight:

440.00 LBS

Brand:

Plasma-Therm

Model:

HFS 3000D

MPN:

HFS 3000D

Type:

RF Generator

SKU:

44780

Frequency:

13.56 MHz

Output Power:

3 kW (3000 W)

RF Amplifier Tube:

Eimac 5CX1500A (5CX-1-500A)

Vacuum Capacitor:

Jennings UCS300-15D2364 Variable Vacuum Capacitor

Application:

Plasma Etch / Plasma Deposition / Semiconductor Processing

Front Panel Meters:

Incident Kilowatts (0-3 kW), Reflected Watts (0-500 W)

Controls:

Power knob (Min-Max), Power On, RF On, RF Off, O.L. Reset

Overload Indicators:

HV, LV, PA overload indicator lights

Fuses:

4 fuse positions: F1, F2, F3, F4

Circuit Breakers:

Control breaker and Line breaker (3-pole)

RF Hours Meter:

Elapsed RF ON time meter — reads approx. 4976+ hours

RF Output Connector:

Coaxial RF output (top of cabinet)

Control Connectors:

Military-style circular multi-pin connectors (side panel)

Directional Coupler:

External directional coupler box (GEN, LOAD, INC, REF ports)

Power Cable Included:

Large multi-conductor power cable with twist-lock and mil-spec connectors

Form Factor:

Free-Standing Cabinet

Dimensions:

23" W x 26" D x 60" H

Country/Region of Manufacture:

United States

Condition:

Used – Pulled from Working Environment

Seller Notes:

Includes Eimac 5CX1500A tube, Jennings UCS300-15D2364 capacitor, directional coupler, and power cable. Freight shipping required.

Condition Notes:

Plasma-Therm HFS 3000D 3kW RF Generator pulled from working environment; not tested at our facility. Interior and components appear intact. ~4,976 RF hours. Freight shipping required. Sold as-is. Please contact us with questions.

California Prop 65 Warning:

WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov