Plasma-Therm Inc

Plasma-Therm HFS 3000D 3kW 13.56MHz RF Generator Eimac 5CX1500A Tube

Plasma-Therm Inc

SKU:

44780

Availability:

Freight shipping required due to size and weight; contact us for a shipping quote.

Weight:

440.00 LBS

Brand:

Plasma-Therm

Model:

HFS 3000D

MPN:

HFS 3000D

Type:

RF Generator

SKU:

44780

Frequency:

13.56 MHz

Output Power:

3 kW (3000 W)

RF Amplifier Tube:

Eimac 5CX1500A (5CX-1-500A)

Vacuum Capacitor:

Jennings UCS300-15D2364 Variable Vacuum Capacitor

Application:

Plasma Etch / Plasma Deposition / Semiconductor Processing

Front Panel Meters:

Incident Kilowatts (0-3 kW), Reflected Watts (0-500 W)

Controls:

Power knob (Min-Max), Power On, RF On, RF Off, O.L. Reset

Overload Indicators:

HV, LV, PA overload indicator lights

Fuses:

4 fuse positions: F1, F2, F3, F4

Circuit Breakers:

Control breaker and Line breaker (3-pole)

RF Hours Meter:

Elapsed RF ON time meter — reads approx. 4976+ hours

RF Output Connector:

Coaxial RF output (top of cabinet)

Control Connectors:

Military-style circular multi-pin connectors (side panel)

Directional Coupler:

External directional coupler box (GEN, LOAD, INC, REF ports)

Power Cable Included:

Large multi-conductor power cable with twist-lock and mil-spec connectors

Form Factor:

Free-Standing Cabinet

Dimensions:

23" W x 26" D x 60" H

Country/Region of Manufacture:

United States

Condition:

Used – Pulled from Working Environment

Seller Notes:

Includes Eimac 5CX1500A tube, Jennings UCS300-15D2364 capacitor, directional coupler, and power cable. Freight shipping required.

Condition Notes:

Plasma-Therm HFS 3000D 3kW RF Generator pulled from working environment; not tested at our facility. Interior and components appear intact. ~4,976 RF hours. Freight shipping required. Sold as-is. Please contact us with questions.