Advanced Energy

Advanced Energy RFDS 2000-2V RF Generator 3155038-013 13.56MHz 5kW 208V 3P

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SKU:
53323
MPN:
RFDS 2000-2V
Condition:
Used
Availability:
Usually ships within 1-2 business days.
Weight:
32.00 LBS
Shipping:
Calculated at Checkout
  • Advanced Energy RFDS 2000-2V left side view showing enclosure panels and small asset label sticker
  • Advanced Energy RFDS 2000-2V rear panel close-up showing 13.56 MHz 387V output label, water-out port, and max pressure placard
  • Advanced Energy RFDS 2000-2V close-up of front-left corner showing model label RFDS 2000-2V and RF output coaxial port
  • Advanced Energy RFDS 2000-2V rear panel upper section close-up showing 208V 3P 5kW rating label, input connector, and control D-sub
  • Advanced Energy RFDS 2000-2V interior view showing internal PCB assemblies, transformer, wiring harness, and power components
  • Advanced Energy RFDS 2000-2V interior close-up showing contactor or relay component with manufacturer label visible
  • Advanced Energy RFDS 2000-2V rear panel lower section showing water-in and water-out fittings, max pressure label, and CSA NRTL/C certification
  • Advanced Energy RFDS 2000-2V rear panel close-up showing M/N 3155038-013 C label, S/N 207143, F/R C revision, and LED indicators
  • Advanced Energy RFDS 2000-2V top view showing full warning label placard sheet in multiple languages
  • Advanced Energy RFDS 2000-2V bottom view showing enclosure base and corner hardware
  • Advanced Energy RFDS 2000-2V interior close-up showing internal component assembly with asset/lab label visible on central module
  • Advanced Energy RFDS 2000-2V interior top-down view showing red capacitor bank, transformer, control boards, and wiring
  • Advanced Energy RFDS 2000-2V RF Generator front-left angle view showing RF output port and side panel label
  • Advanced Energy RFDS 2000-2V right side view showing top label sheet with warning placards and model designation
  • Advanced Energy RFDS 2000-2V rear panel showing 208V 3-phase input, control D-sub connector, water in/out ports, and status LEDs
$2,500.00
Was: $5,000.00
Current Stock: 1

Sold Out

Description

Advanced Energy RFDS 2000-2V RF Generator 3155038-013 13.56MHz 5kW 208V 3P

RF power generator for semiconductor processing applications. Operates at 13.56 MHz with 5 kW output power, water-cooled design.

Specifications & What's Included

  • Input: 208V, 3-Phase, 50/60Hz
  • Output: 13.56 MHz, 387V, 5 kW
  • Water-cooled (max pressure 6.90 bar)
  • Control via D-Sub DB-25 connector
  • RF output coaxial port
  • Status indicators: AC On, RF On, Alarm
  • CSA, CE certified
  • Unit only — no cables included

Applications

Used in plasma etch, CVD, PVD, and semiconductor processing systems.

Condition: For Parts or Not Working
Advanced Energy RFDS 2000-2V RF Generator 3155038-013 sold AS-IS for parts or repair. Pulled from working environment; not tested at our facility. No functionality guarantee. Cosmetically good. Contact us with questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Advanced Energy
Model:
RFDS 2000-2V
MPN:
3155038-013
SKU:
53323
Condition:
As-Is / For Parts or Not Working
Seller Notes:
Sold AS-IS for parts or repair. Not tested. Unit only — no cables included.
Form Factor:
Benchtop / Enclosed Module
Power Requirements:
208V, 3-Phase, 50/60Hz, 5kW
Output Frequency:
13.56 MHz
Power Rating:
5 kW
Voltage Rating:
208V
Phase:
Three Phase
Frequency:
50/60 Hz
Output Voltage:
387V (labeled on output panel)
Cooling Method:
Water Cooled
Max Water Pressure:
6.90 Bar / 690 kPa
Control Interface:
D-Sub (DB-25 style) Control Connector
Input Connector:
High-current multi-pin circular connector
Output Connector:
Coaxial RF output port
Status Indicators:
AC On, RF On, Alarm LED indicators
Certifications:
CSA NRTL/C, CE, LR 106911
Application:
Plasma etch, CVD, PVD, semiconductor processing
Country of Manufacture:
USA
Hardware Revision:
C
Compatible With:
Plasma etch and deposition systems using 13.56 MHz RF
Condition Notes:
Advanced Energy RFDS 2000-2V RF Generator 3155038-013 sold AS-IS for parts or repair. Pulled from working environment; not tested at our facility. No functionality guarantee. Cosmetically good. Contact us with questions.
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Advanced Energy MDX 2011-011-C 5KW DC Magnetron Drive Power Supply 208V 3Ph

Advanced Energy

$950.00
Was: $2,200.00
Advanced Energy MDX 2011-011-C 5KW DC Magnetron Drive Power Supply 208V 3Ph 50/60Hz The Advanced Energy MDX 2011-011-C is a 5-kilowatt DC power supply engineered for magnetron drive applications in...
52058
SKU:
52058
Availability:
Usually ships within 1-2 business days.
Weight:
65.00 LBS
User Manual:
Available — Advanced Energy MDX Magnetron Drive User Manual
Brand:
Advanced Energy
Model:
MDX 2011-011-C
MPN:
2011-011-C
SKU:
52058
Condition:
Used – Pulled from Working Environment
Seller Notes:
Unit only. User manual available separately.
Series:
MDX Series
Form Factor:
Rackmount – 24in W × 20in D × 7in H
Power Rating:
5 kW DC output
Voltage Rating:
208V AC
Phase:
Three Phase (3Ø)
Frequency:
50/60 Hz
Output Type:
DC
Application:
Magnetron drive, PVD, CVD, thin-film deposition, sputtering
Interface Connectors:
USER (DB-25), DISPLAY (DB-25)
Breakers:
Three-position circuit breaker array — rear panel
Front Panel Controls:
Dual digital displays, Emergency Stop button, status indicators
Cooling:
Dual large-diameter axial exhaust fans
Dimensions:
24 inches W × 20 inches D × 7 inches H
Country of Manufacture:
USA – Fort Collins, Colorado
Compatible With:
Advanced Energy MDX Series magnetron sputtering systems, PVD/CVD thin film deposition platforms
Condition Notes:
This Advanced Energy MDX 2011-011-C 5KW DC magnetron drive power supply has not been powered up or tested at our facility, but was pulled from a working industrial environment where it was previously in service.
Front Panel Features:
Dual digital displays (Left and Right, switchable to Actual readout), KW/Volts/Amps monitoring, Arc/Ramp/Setpoint/Plasma/Output/Target Life/Temp/Water/Vacuum/Aux status indicators, Emergency Stop button
Circuit Protection:
Three-position circuit breaker array, rear panel
Front Panel Displays:
Dual digital displays, KW/Volts/Amps readout
Status Indicators:
Arc, Ramp, Setpoint, Plasma, Output, Target Life, Temp, Water, Vacuum, Auxiliary
Compatible With 2:
PVD/CVD thin-film deposition platforms
Rear Connectors:
USER (DB-25), DISPLAY (DB-25)
Power Output Rating:
5 kW DC
Input Voltage:
208V AC, three-phase, 50/60 Hz
Compatible With 1:
Advanced Energy MDX Series magnetron sputtering systems
Display Features:
KW/Volts/Amps readout, switchable to Actual values