Description
Advanced Energy RFDS 2000-2V RF Generator 3155038-013 13.56MHz 5kW 208V 3P
RF power generator for semiconductor processing applications. Operates at 13.56 MHz with 5 kW output power, water-cooled design.
Specifications & What's Included
- Input: 208V, 3-Phase, 50/60Hz
- Output: 13.56 MHz, 387V, 5 kW
- Water-cooled (max pressure 6.90 bar)
- Control via D-Sub DB-25 connector
- RF output coaxial port
- Status indicators: AC On, RF On, Alarm
- CSA, CE certified
- Unit only — no cables included
Applications
Used in plasma etch, CVD, PVD, and semiconductor processing systems.
Please note: We may have multiple units of this item in stock. The unit you receive may vary slightly from the one shown in the photos. All units are functionally equivalent and inspected to the same standard.
Condition: For Parts or Not Working
Advanced Energy RFDS 2000-2V RF Generator 3155038-013 sold AS-IS for parts or repair. Pulled from working environment; not tested at our facility. No functionality guarantee. Cosmetically good. Contact us with questions.
Advanced Energy RFDS 2000-2V RF Generator 3155038-013 sold AS-IS for parts or repair. Pulled from working environment; not tested at our facility. No functionality guarantee. Cosmetically good. Contact us with questions.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
Advanced Energy |
Model: |
RFDS 2000-2V |
MPN: |
3155038-013 |
SKU: |
53323 |
Condition: |
As-Is / For Parts or Not Working |
Seller Notes: |
Sold AS-IS for parts or repair. Not tested. Unit only — no cables included. |
Form Factor: |
Benchtop / Enclosed Module |
Power Requirements: |
208V, 3-Phase, 50/60Hz, 5kW |
Output Frequency: |
13.56 MHz |
Power Rating: |
5 kW |
Voltage Rating: |
208V |
Phase: |
Three Phase |
Frequency: |
50/60 Hz |
Output Voltage: |
387V (labeled on output panel) |
Cooling Method: |
Water Cooled |
Max Water Pressure: |
6.90 Bar / 690 kPa |
Control Interface: |
D-Sub (DB-25 style) Control Connector |
Input Connector: |
High-current multi-pin circular connector |
Output Connector: |
Coaxial RF output port |
Status Indicators: |
AC On, RF On, Alarm LED indicators |
Certifications: |
CSA NRTL/C, CE, LR 106911 |
Application: |
Plasma etch, CVD, PVD, semiconductor processing |
Country of Manufacture: |
USA |
Hardware Revision: |
C |
Compatible With: |
Plasma etch and deposition systems using 13.56 MHz RF |
Condition Notes: |
Advanced Energy RFDS 2000-2V RF Generator 3155038-013 sold AS-IS for parts or repair. Pulled from working environment; not tested at our facility. No functionality guarantee. Cosmetically good. Contact us with questions. |
