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Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663
Advanced Energy
$15,000.00Was: $30,000.00Advanced Energy Paramount Plus 6060 VHF RF Generator 31550260-663 The Advanced Energy Paramount Plus 6060 is an industrial VHF RF power generator designed for plasma-based semiconductor manufacturing, wafer processing, and materials processing...53327- SKU:
- 53327
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 100.00 LBS
- Brand:
- Advanced Energy Industries
- Model:
- Paramount Plus 6060
- Secondary Model:
- 660-189197R100
- MPN:
- 31550260-663
- SKU:
- 53327
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Includes part numbers 31550260-663 and 660-189197R100. No power supply, cables, or accessories included unless noted separately.
- Form Factor:
- Benchtop / Integrated RF Generator
- Country of Manufacture:
- United States
- Power Requirements:
- 200–208V AC, Three Phase, 50–60 Hz, 40A maximum
- Cooling:
- Water-cooled (facility water connection required; disconnect before servicing)
- Max Water Pressure:
- 6.9 Bar / 690 kPa
- RF Type:
- VHF (Very High Frequency) RF Power Generator
- Application:
- Plasma deposition, wafer processing, ion implantation, semiconductor manufacturing
- Certifications:
- CE, RoHS Compliant, CSA (C/US)
- Date Code:
- 08/2015
- Radiation Warning:
- Non-ionizing radiation present. No user-serviceable parts. Do not remove cover.
- Phase:
- Three Phase
- Voltage Rating:
- 200-208V AC
- Current Rating:
- 40A Maximum
- Frequency:
- 50-60 Hz
- Condition Notes:
- This Advanced Energy Paramount Plus 6060 VHF RF Generator was professionally pulled from a working production environment where it was in operational service.
- Frequency Band:
- VHF (Very High Frequency)
- Water Cooling Pressure Rating:
- 6.9 bar / 690 kPa
- Compatible With:
- Plasma process chambers, CVD/PECVD systems, RIE tools, RF delivery systems
- Secondary Reference:
- 660-189197R100
- Product Type:
- VHF RF Power Generator
- Power Input:
- Three-phase AC
- Maximum Input Current:
- 40A
- Thermal Management:
- Integrated water cooling
- Compatible Systems:
- RF delivery systems, impedance-matching networks, plasma process chambers
- Type:
- VHF RF Power Generator
- Country/Region of Manufacture:
- United States
- Compatible With (2):
- Impedance matching networks, RF delivery networks
$15,000.00Was: $30,000.00 -
Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma
Advanced Energy
$5,000.00Was: $10,000.00Advanced Energy Navigator II 3155999-175 RF Match Network 13.56 MHz Plasma RF impedance matching network for 13.56 MHz plasma systems. Standalone benchtop module that interfaces with Advanced Energy RF generators to optimize power delivery during plasma...53326- SKU:
- 53326
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 26.00 LBS
- Brand:
- Advanced Energy
- Model:
- Navigator II
- MPN:
- 3155999-175
- Secondary Model / Part Number:
- 1335752
- SKU:
- 53326
- Condition:
- Used – Inspected
- Seller Notes:
- Unit only; inspected. Pulled from a working semiconductor process environment.
- Country of Manufacture:
- China
- Form Factor:
- Benchtop / Standalone Module
- Frequency:
- 13.56 MHz
- Application:
- RF Impedance Matching – Plasma Etch / CVD / PVD
- Hardware Revision:
- Rev A
- Interface – Configuration:
- DIP Switch (Configuration Header)
- Interface – Host:
- DB-9 (J1) + RJ-45 EtherCAT (Act/In/Link)
- Interface – Service:
- RJ-45 Ethernet (Out/Link/Error)
- Interface – RF Input:
- Coaxial RF IN (J2)
- Interface – Pulse Sync In:
- SMA / BNC (J5)
- Interface – Interlock:
- DB-9 (J4)
- Interface – DC Power:
- Circular Power Input Connector
- Status Indicators:
- Power, Tuned, Fault LEDs
- Network Protocol:
- EtherCAT
- Compatible With:
- Advanced Energy RF Generators, Plasma Etch / CVD Systems
- Condition Notes:
- Advanced Energy Navigator II 3155999-175 RF Match Network, 13.56 MHz — used, inspected. Pulled from an active semiconductor process environment. Chassis shows light surface wear. All I/O connectors present and intact.
$5,000.00Was: $10,000.00 -
RFPP RF5S 7510313010 RF Generator 500W 13.56MHz 208VAC Semiconductor Plasma Etch
RFPP RF Power Products
$2,000.00Was: $4,000.00RFPP RF5S 7510313010 RF Generator 500W 13.56MHz 208VAC Semiconductor Plasma Etch RF power generator designed for semiconductor plasma processing applications. Benchtop unit manufactured in 1996 by RF Power Products Inc. Specifications & What's...53324- SKU:
- 53324
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 55.00 LBS
- Brand:
- RFPP (RF Power Products Inc)
- Model:
- RF5S
- MPN:
- 7510313010
- Secondary Model:
- 490-0580
- SKU:
- 53324
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold AS-IS for parts or repair. Does not power on.
- Country of Manufacture:
- USA
- Form Factor:
- Benchtop
- Power Requirements:
- 198-240VAC, 50/60Hz
- Output Frequency:
- 13.56 MHz
- Power Rating:
- 500 Watts
- Interface Type:
- RS232C / RS485, Analog Interface
- RF Output Connector:
- N-Type (RF OUT)
- Additional Connectors:
- CEX IN, CEX OUT, J1
- Application:
- Plasma Etch, CVD, Semiconductor Processing
- Date of Manufacture:
- 03/96
- Condition Notes:
- RFPP RF5S 7510313010 RF Generator (500W, 13.56MHz, 208VAC) tested and verified in working condition at our facility. The unit powers on reliably and operates as designed for semiconductor plasma etch applications.
$2,000.00Was: $4,000.00 -
Advanced Energy RFDS 2000-2V RF Generator 3155038-013 13.56MHz 5kW 208V 3P
Advanced Energy
$2,500.00Was: $5,000.00Advanced Energy RFDS 2000-2V RF Generator 3155038-013 13.56MHz 5kW 208V 3P RF power generator for semiconductor processing applications. Operates at 13.56 MHz with 5 kW output power, water-cooled design. Specifications & What's Included Input: 208V,...53323- SKU:
- 53323
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 32.00 LBS
- Brand:
- Advanced Energy
- Model:
- RFDS 2000-2V
- MPN:
- 3155038-013
- SKU:
- 53323
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold AS-IS for parts or repair. Not tested. Unit only — no cables included.
- Form Factor:
- Benchtop / Enclosed Module
- Power Requirements:
- 208V, 3-Phase, 50/60Hz, 5kW
- Output Frequency:
- 13.56 MHz
- Power Rating:
- 5 kW
- Voltage Rating:
- 208V
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Output Voltage:
- 387V (labeled on output panel)
- Cooling Method:
- Water Cooled
- Max Water Pressure:
- 6.90 Bar / 690 kPa
- Control Interface:
- D-Sub (DB-25 style) Control Connector
- Input Connector:
- High-current multi-pin circular connector
- Output Connector:
- Coaxial RF output port
- Status Indicators:
- AC On, RF On, Alarm LED indicators
- Certifications:
- CSA NRTL/C, CE, LR 106911
- Application:
- Plasma etch, CVD, PVD, semiconductor processing
- Country of Manufacture:
- USA
- Hardware Revision:
- C
- Compatible With:
- Plasma etch and deposition systems using 13.56 MHz RF
- Condition Notes:
- Advanced Energy RFDS 2000-2V RF Generator 3155038-013 sold AS-IS for parts or repair. Pulled from working environment; not tested at our facility. No functionality guarantee. Cosmetically good. Contact us with questions.
$2,500.00Was: $5,000.00 -
Hiden Analytical EPIU ESPion Advanced Langmuir Probe 115V Plasma Diagnostics
Hiden Analytical
$2,600.00Was: $5,200.00Hiden Analytical EPIU ESPion Advanced Langmuir Probe 115V Plasma Diagnostics Rackmount plasma diagnostics controller for Langmuir probe measurements. The ESPion unit processes probe data and interfaces with laboratory plasma systems for ion density,...53321- SKU:
- 53321
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 25.00 LBS
- Brand:
- Hiden Analytical
- Model:
- ESPion
- MPN:
- EPIU
- SKU:
- 53321
- Condition:
- Used – Inspected
- Seller Notes:
- Unit only; no probe tip or cables included unless shown in photos
- Form Factor:
- Rackmount, 2U
- Power Requirements:
- 115V AC, 300VA Max, 6.3AT 250V Fuse
- Application / Use Case:
- Plasma diagnostics, Langmuir probe measurements
- Interface Type:
- RS232 (MC-04), RS485/RS422 (MC-03), 10 BASE 2 (MC-02)
- I/O Ports:
- Trigger (ESP-01), Z-Drive (ESP-02), AUX I/O (ESP-03)
- Probe Port:
- ESP-04 (DB9), Analogue Input ESP-07 (DIN connector)
- Standards:
- CE Marked
- Country of Manufacture:
- United Kingdom
- Condition Notes:
- This Hiden Analytical EPIU ESPion Advanced Langmuir Probe has been inspected and is in good used cosmetic condition. It was pulled from a working plasma diagnostics environment where it was previously in active use.
$2,600.00Was: $5,200.00 -
Hiden Analytical LMC Linear Motion Driver 100-240V 300VA Max LMD-01 LMD-02
Hiden Analytical
$1,500.00Was: $3,000.00Hiden Analytical LMC Linear Motion Driver 100-240V 300VA Max LMD-01 LMD-02 2U rackmount linear motion driver manufactured by Hiden Analytical in the United Kingdom. Controls stepper or servo motor positioning for precision analytical instrumentation via...53320- SKU:
- 53320
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 24.00 LBS
- Brand:
- Hiden Analytical
- Model:
- LMC
- MPN:
- LMC
- SKU:
- 53320
- Condition:
- As-Is / For Parts or Not Working
- Seller Notes:
- Sold as-is for parts or repair. Not tested.
- Form Factor:
- Rackmount, 2U
- Power Requirements:
- 100-240V AC, 50-60Hz, 300VA Max
- Fuse Rating:
- 6.3AT 250V
- Interface / Connectors:
- Control I/O (LMD-01), Linear Motion (LMD-02)
- Motor Connector:
- LMD-07 (4-pin circular)
- Application / Use Case:
- Linear motion control for analytical instruments
- Compatible With:
- Hiden Analytical mass spectrometer systems
- Country of Manufacture:
- United Kingdom
- Condition Notes:
- Hiden Analytical LMC Linear Motion Driver 100-240V 300VA Max (LMD-01/LMD-02) in used condition. This unit has been tested and is in working order. Cosmetically, the silver front panel is clean with minor scuffing, while the black top cover shows
$1,500.00Was: $3,000.00 -
Hiden Analytical ESPION Advanced Langmuir Probe Controller 115V 300VA
Hiden Analytical
$2,500.00Was: $4,999.99Hiden Analytical ESPION Advanced Langmuir Probe Controller 115V 300VA Rackmount controller unit for Langmuir probe plasma diagnostics. Measures plasma parameters in discharge chambers and etch systems using external probe hardware. Specifications &...53319- SKU:
- 53319
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 25.00 LBS
- Brand:
- Hiden Analytical
- Model:
- ESPION
- MPN:
- ESPION
- SKU:
- 53319
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Unit only; no probe or accessories included
- Form Factor:
- Rackmount, 2U
- Power Requirements:
- 115V AC, 300VA Max, 6.3AT 250V Fuse
- Country of Manufacture:
- United Kingdom
- Application / Use Case:
- Langmuir probe plasma diagnostics
- Interface Type:
- RS232, RS485/RS422, 10 Base 2, AUX I/O
- Connector Types:
- DB-9, DB-25, BNC, DIN Analogue Input
- Rear Ports:
- ESP-01 Trigger, ESP-02 Z-Drive, ESP-03 AUX I/O, ESP-04 Probe
- Communication Ports:
- MC-04 RS232, MC-03 RS485/RS422, MC-02 10Base2
- Analogue Input:
- ESP-07 DIN connector
- Compatible With:
- Hiden Langmuir probe systems, plasma etch chambers
- Measurement Type:
- Plasma parameter measurement via Langmuir probe
- Condition Notes:
- Hiden Analytical ESPION Advanced Langmuir Probe Controller 115V 300VA in used condition. This unit was removed from a working laboratory environment during a system upgrade and has been tested and verified to power on and function properly.
$2,500.00Was: $4,999.99 -
Hiden Analytical HAL RC ESP HAL IV Plasma Probe Controller 100-240V 300VA
Hiden Analytical
$1,500.00Was: $2,999.99Hiden Analytical HAL RC ESP HAL IV Plasma Probe Controller 100-240V 300VA Rackmount controller for Hiden Analytical electrostatic plasma probe (ESP) systems. Manages probe operation and data acquisition for plasma diagnostics in semiconductor processing...53318- SKU:
- 53318
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 20.00 LBS
- Brand:
- Hiden Analytical
- Model:
- HAL RC ESP
- Secondary Model:
- HAL IV ESP
- MPN:
- HAL RC ESP
- SKU:
- 53318
- Condition:
- Used – Pulled from Working Environment
- Seller Notes:
- Controller only; no probe or accessories confirmed included. Please contact us with questions before purchasing.
- Form Factor:
- Rackmount, 2U
- Power Requirements:
- 100-240V AC, 50-60Hz, 300VA Max
- Fuse Rating:
- 6.3AT 250V
- Interface Type:
- RS-232, RS-485
- Connector Types:
- BNC (Probe ESP-01, Guard ESP-02, Drive ESP-11), DB9 RS-232, DB15 RS-485, DB25 AUX I/O, DB15 Trips, DB15 Limit Switch, Multi-pin Motor connector
- Application / Use Case:
- Electrostatic plasma probe (ESP) control for plasma etch, CVD, and semiconductor process diagnostics
- Indicator Lights:
- Run (green LED), Fault (red LED) on front panel
- Compatible With:
- Hiden Analytical HAL series electrostatic plasma probe systems
- Country of Manufacture:
- United Kingdom
- Condition Notes:
- Hiden Analytical HAL IV Plasma Probe Controller pulled from working environment. Shows normal wear from active use. 100-240V, 300VA. Ready to use.
$1,500.00Was: $2,999.99
