Drytek 100S Plasma Wafer Etcher LED Control Board 2800052 Assy 2800054 C-2800051

Drytek 100S Plasma Wafer Etcher LED Control Board 2800052 Assy 2800054 C-2800051

This is a genuine Drytek LED/Control Board removed from a Drytek 100S Plasma Wafer Etcher. The board carries part number 2800052, assembly number 2800054, and schematic number C-2800051. It serves as the status and control interface panel for the 100S etcher, displaying process state via an array of LED indicators and accepting operator input through two illuminated pushbuttons.

Specifications & What's Included

• Part Number: 2800052
• Assembly Number: 2800054
• Schematic Number: C-2800051
• Compatible System: Drytek 100S Plasma Wafer Etcher
• Form Factor: Rack-panel mounted board/module (brown anodized front panel with rack ears)
• Front Panel Controls: Two illuminated pushbuttons — Load Complete, Cassette Complete
• Front Panel LED Indicators (12 total, green): Arm Not Reset, Arm Extended, Wafer Stop Pin Up, Wafer Vacuum, Electrode Not Down, Electrode Up, Not In Load Position, In Unload Position, Cassette Not Up, Cassette Down, Cassette Not In Place, Cassette Not On Slot
• Rear PCB: Green fiberglass circuit board (Assy 2800054) mounted to rear of panel
• Edge Connector: Multi-pin gold-contact card edge connector (large, approx. 50+ positions)
• External Connectors: Two red keyed locking connectors (J107 labeled on one); one additional smaller red keyed connector
• Wiring: Yellow and multi-color ribbon wiring harness attached
• Transformer/relay component visible on rear PCB

Applications

The Drytek 100S is a plasma dry-etch system used in semiconductor wafer fabrication, primarily for reactive ion etching (RIE) and plasma etching processes used to pattern silicon wafers in IC manufacturing. This LED/Control Board is the operator status panel that monitors and displays the state of key mechanical and process subsystems within the etcher — including the wafer handling arm, electrode position, cassette loading mechanism, and vacuum status. Each LED corresponds to a specific interlock or process state, allowing the operator to quickly identify faults or confirm that the system is ready to cycle. Drytek was a U.S.-based semiconductor equipment manufacturer active in the 1980s and early 1990s, and the 100S was among their dry-etch platforms used in both production and R&D fabs of that era. Replacement control and interface boards like this are sought by facilities still maintaining legacy Drytek equipment, as well as by semiconductor equipment rebuilders and surplus parts dealers supporting older fab lines.