Drytek

Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals

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SKU:
19334
MPN:
DRIE-100
Condition:
Used
Weight:
1,370.00 LBS
Shipping:
Calculated at Checkout
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
  • Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals
$5,835.00
Was: $20,000.00
Current Stock: 1

Sold Out

Description

Drytek DRIE-100 Cassette Planar Plasma Wafer Etcher System w/Manuals


  • Uses chlorine- and fluorine-based chemistries for etching various Si, polysilicon, nitride, tungsten, tungsten silicide films.+
  • Low energy etching for minimal substrate damage.
  • Excellent selectivity, e.g., 20:1 poly Si:SiO2
  • Laser interferometer for etch rate determination and end-point detection.
  • Leybold-Heraeus D60A Trivac Rotary Vane Vacuum Pump w/Breaker Box available for unit
  • Various Accessories & Wafer Holders Included
  • Complete Manuals Included

     

    Condition: Used

    This Drytek plasma wafer etching system came from a R&D application for superconductor cellular tower switching manufacturer. Because of its age and lack of recent use we are selling it in AS-IS condition. Please view our photo set and contact us if you have any questions.

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    Additional Information

    California Prop 65 Warning:
    WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
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