Photolithography Shutter Control Rackmount Enclosure Relay I/O Astec Corcom

Photolithography Shutter Control Rackmount Enclosure Relay I/O Astec Corcom

This is a custom-built rackmount enclosure designed as a shutter and relay I/O control system, most likely for a photolithography or mask aligner instrument. The front panel carries five labeled status indicators — AC Power, ARC Power, CCD Shutter, Mask Vacuum, and ARC Lamp Shutter — and a main power rocker switch, consistent with control systems used to sequence arc lamp, shutter, and vacuum functions in contact or proximity mask aligners. The enclosure is approximately 4U rackmount size and is constructed in a steel chassis with rack ears. It is being sold AS-IS for parts or repair and has not been tested at our facility.

Specifications & What's Included

• Enclosure: steel rackmount chassis, approximately 4U, with rack ears
• Internal PSU 1: Astec PS ACV 5N9-1 (5V output)
• Internal PSU 2: Astec PS ACV 12N5 (12V output)
• Internal transformer: large toroidal/laminated transformer (yellow-wrapped)
• EMI Filter: Corcom 10VK7 — 10A, 120/250V, 50-60Hz, UL and CSA listed, Made in Mexico
• Solid State Relay: Crydom D2425
• Relay I/O Board: PC 6222 Rev C — labeled STA-U, 9627/D 25249, copyright 1984
• Front panel indicators (5): AC Power, ARC Power, CCD Shutter, Mask Vacuum, ARC Lamp Shutter
• Front panel: illuminated rocker power switch
• Rear panel AC outlet: isolated ground duplex outlet
• Rear panel AC input: IEC C14 inlet
• Rear panel fuse: 15 Amp
• Rear connectors: J5, J6 (XLR-style circular); J7, J8, J9, J10 (large mil-spec circular multi-pin); J4 (gold D-sub connector)
• Internal wiring: rainbow ribbon cables connecting relay I/O board to terminal blocks and output connectors
• Condition: AS-IS, for parts or repair — not tested, no functionality guaranteed

Applications

This type of relay I/O control enclosure was used in photolithography systems — specifically mask aligners and contact printers — to sequence and control arc lamp power, optical shutters, CCD exposure triggers, and vacuum clamping for mask-to-wafer alignment. Mask aligners of this era (mid-1980s through early 1990s) relied on discrete relay-based I/O controllers housed in standalone enclosures to interface the main instrument controller with high-current lamp and solenoid loads, providing electrical isolation between logic-level signals and powered actuators. The isolated ground outlet and mil-spec circular connectors suggest this unit interfaced directly with an aligner's lamp housing, shutter solenoids, and vacuum pump. Equipment of this type was common in university microfabrication labs, semiconductor research facilities, and small-volume IC fabrication lines during the 1980s and early 1990s. The individual components — Astec power supplies, Corcom EMI filter, Crydom solid-state relay, and the relay I/O board — retain value as spare or salvage parts for compatible systems or general relay control applications.