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Drytek

Drytek S100 RF Wafer Power System Jennings RB2A-26N00 Cardwell Plasma Etch

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SKU:
48459
MPN:
S100
Condition:
Used
Availability:
Usually ships within 1-2 business days.
Weight:
55.00 LBS
Shipping:
Calculated at Checkout
  • Drytek S100 RF Wafer Power System – angled front-right view showing aluminum chassis, coaxial fittings, and RF matching network assembly on turntable
  • Drytek S100 RF Wafer Power System – angled left-side view showing internal matching network components and side panel with red component visible
  • Drytek S100 RF Wafer Power System – interior top-down view showing Cardwell roller inductor coil, copper bus straps, and ceramic feedthrough insulators
  • Drytek S100 RF Wafer Power System – close-up of Cardwell roller inductor coil with copper bus strap connections and drive gear mechanism
  • Drytek S100 RF Wafer Power System – close-up of top interior showing four ceramic feedthrough capacitors with copper bus bars and coaxial fittings
  • Drytek S100 RF Wafer Power System – close-up of Jennings RB2A-26N00 glass relay with copper strap connections and blue ceramic insulator visible
  • Drytek S100 RF Wafer Power System – right-side exterior view showing brass mounting blocks and machined aluminum enclosure panels
  • Drytek S100 RF Wafer Power System – rear view showing cooling fan, numbered port openings, and brass coaxial connector blocks
  • Drytek S100 RF Wafer Power System – close-up of cooling fan label (appears to be Boxer brand, Matsushita/Panasonic division)
  • Drytek S100 RF Wafer Power System – rear-right angle view showing perforated top panel, coaxial fittings, and full chassis profile
$450.00
Was: $900.00
Current Stock: 1

Sold Out

Description

Drytek S100 RF Wafer Power System Jennings RB2A-26N00 Cardwell Plasma Etch

RF matching network and power delivery system for plasma wafer etching equipment. Manages RF signal impedance matching and power distribution in semiconductor processing applications.

Specifications & What's Included

  • Jennings RB2A-26N00 glass relay, 20kVDC
  • Cardwell 229-207-2 roller inductor coil
  • Cardwell 154-3-1 air variable capacitor
  • Four HECHT50 120pF ceramic capacitors
  • High Energy Corp. CRC850 surge suppressor
  • Aluminum chassis: 18.5 x 17 x 13.5 in; 6.0 x 6.25 in mounting plate
  • Forced-air cooling fan integrated

Applications

Used in Drytek 100S Plasma Wafer Etcher systems for semiconductor RF power delivery and impedance matching. Typical in production and lab environments for plasma etching processes on silicon wafers. Provides stable RF matching across varying load conditions during plasma discharge.

Condition: Used
This Drytek S100 RF Wafer Power System has been inspected and is in good used condition. The unit was pulled from a working Drytek 100S Plasma Wafer Etcher where it was in active service. The aluminum chassis and internal components — including the Jennings RB2A-26N00 glass relay, Cardwell roller inductor coil, Cardwell air variable capacitor, ceramic capacitors, and surge suppressor — are all present and show normal wear consistent with production use. The cooling fan is intact and visible on the rear panel. No major damage or missing components are observed in the photos. Please view our photo set and contact us if you have any questions.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Drytek
Model:
S100
MPN:
S100
Type:
RF Wafer Power System / RF Matching Network
SKU:
48459
Condition:
Used – Pulled from Working Environment
Seller Notes:
Includes Jennings RB2A-26N00 relay, Cardwell 229-207-2 inductor, Cardwell 154-3-1 capacitor, 4x HECHT50 caps, 1x CRC850
Compatible With:
Drytek 100S Plasma Wafer Etcher
Application:
Plasma Wafer Etching, Semiconductor RF Power Delivery
Included Component 1:
Jennings RB2A-26N00 Glass Relay, 20kVDC
Included Component 2:
Cardwell 229-207-2 Roller Inductor Coil
Included Component 3:
Cardwell 154-3-1 Air Variable Capacitor
Included Component 4:
High Energy Corp. HECHT50 120pF Ceramic Capacitors (Qty 4)
Included Component 5:
High Energy Corp. CRC850 Surge Suppressor (Qty 1)
Aluminum Plate Dimensions:
6.0 x 6.25 in
Overall Dimensions:
18.5 x 17 x 13.5 in
Cooling:
Forced air — cooling fan mounted on chassis
Country/Region of Manufacture:
United States
Form Factor:
Benchtop / Standalone Chassis
Condition Notes:
Drytek S100 RF Wafer Power System in good used condition. Pulled from a working Drytek 100S Plasma Wafer Etcher. All components present including Jennings relay, Cardwell inductor/capacitor, ceramic caps, and surge suppressor. Normal wear.
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SKU:
48413
Availability:
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Weight:
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Brand:
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MPN:
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SKU:
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Seller Notes:
Includes 2x PA-500A amplifier modules and 1x DR-100A driver module
Form Factor:
Rackmount, 7U
Compatible With:
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Application / Use Case:
Plasma Wafer Etching, Semiconductor Fabrication, PVD/CVD
Type:
RF Power Supply
Modules Included:
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Rack Height:
7U (12.25 in)
Overall Dimensions:
23 x 19 x 12.25 in
Country of Manufacture:
United States
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This Drytek DRY-KW1 RF Power Supply shows normal cosmetic wear consistent with prior service use — the front panel finish has some scuffing and paint wear visible on the lower section.
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$3,000.00
Was: $6,000.00
Tegal 803 Inline Automatic Wafer RF Plasma Etcher Semiconductor Etch SystemRF plasma dry etch tool designed for automated inline semiconductor wafer processing. Performs plasma-based material removal...
42618
SKU:
42618
Availability:
Usually ships within 3-5 business days via freight carrier; contact us to arrange shipping.
Weight:
370.00 LBS
Brand:
Tegal
Model:
803
MPN:
803
Type:
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SKU:
42618
Condition:
As-Is / For Parts or Not Working
Seller Notes:
RF power supply intact; sold as-is for parts or repair; freight shipping required
Country/Region of Manufacture:
United States
Application / Use Case:
Semiconductor wafer plasma etching, dry etch processing
Process Type:
RF Plasma Etch (Dry Etch)
Wafer Handling:
Inline automatic wafer transport
Gas Inputs:
Multiple gas channels (Gas 1, Gas 2, Gas 3, Gas 4, Cleaning Gas)
Mass Flow Controller:
Mass flow controller module present (visible internally)
RF Power Supply:
Intact (confirmed present)
Form Factor:
Freestanding benchtop/floor unit on casters
Control Interface:
Front panel digital displays and switches
Approximate Weight:
~400 lbs (freight shipping required)
Condition Notes:
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