Stainless Steel Tick Mark Flange OD 8.75" ID 5.87" 0.071" Thick Wafer Ring

Stainless Steel Tick Mark Flange OD 8.75" ID 5.87" 0.071" Thick Wafer Ring

This is a precision machined stainless steel tick mark flange ring measuring 8.75" outside diameter, 5.87" inside diameter, and 0.071" thick. The ring features an octagonal outer perimeter, multiple radially-spaced bolt holes, an O-ring groove channel on the inner bore, and four spring-loaded alignment clip assemblies with L-hook tabs and two-screw locking blocks. No manufacturer markings or part numbers are visible on the piece.

Specifications & What's Included

• Material: Stainless steel (unbranded, no visible alloy markings)
• Outside Diameter (OD): 8.75"
• Inside Diameter (ID): 5.87"
• Thickness: 0.071"
• Outer perimeter: Octagonal flat-sided profile
• Alignment features: 4 spring-loaded clip assemblies with L-hook tabs
• Locking blocks: 4 two-screw locking clip blocks on inner ring face
• O-ring groove: Visible on inner bore face
• Bolt holes: Multiple radially-spaced through-holes and countersunk holes on outer body
• No additional accessories or hardware included

Applications

Tick mark flanges of this type are used in semiconductor wafer processing and vacuum chuck tooling systems. The tick mark (indexed) design allows precise rotational registration of wafers or substrates on a chuck or stage, ensuring repeatable placement for processes such as photolithography, etch, deposition, or inspection. The spring-loaded alignment clips retain the wafer or substrate edge while the O-ring groove provides a sealing interface for vacuum-based holding. Flanges in this size range — approximately 8" inner bore — are commonly associated with 200mm (8") wafer handling equipment. This type of component is found in semiconductor fabrication and R&D tool sets from the 1990s through the 2000s, including etch chambers, CVD platforms, and metrology stages, where precision stainless hardware is standard for cleanroom-compatible operation.