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Lambda Physik

Lambda Physik NovaLine K2020B 248nm Excimer Laser 9 kVA 200-208V 3-Phase DUV

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SKU:
52008
MPN:
Novaline K2020B
Condition:
Used
Availability:
This item requires freight shipping due to its size and weight. Please contact us for a shipping quote before purchasing.
Weight:
2,098.00 LBS
Shipping:
Calculated at Checkout
  • Lambda Physik NovaLine K2020B excimer laser system – front panel view showing blue enclosure, NovaLine branding, emergency stop, and lower control panel
  • Lambda Physik NovaLine K2020B excimer laser – right-rear view showing stainless steel upper enclosure and blue base cabinet
  • Lambda Physik NovaLine K2020B excimer laser – left-side view showing gas exhaust cylinder, emergency stop, and front panel access doors
  • Lambda Physik NovaLine K2020B excimer laser – rear panel view showing beam output port mounting flange, laser aperture, and danger label
  • Lambda Physik NovaLine K2020B rating plate – model K2020B, serial 0006 E 6497, manufactured 2000, 200-208V, 3-phase, 9 kVA, 28A, 50-60Hz
  • Lambda Physik NovaLine K2020B interior view – top access panels open showing NovaTube laser tube, NovaPowerSwitch module, and internal wiring
  • Lambda Physik NovaLine K2020B gas handling bay – pressure gauges, gas manifold, flow controllers, and pneumatic plumbing
  • Lambda Physik NovaLine K2020B electronics bay – control boards, D-sub connectors, cabling harnesses, and interlock wiring
  • Lambda Physik NovaLine K2020B shot counter display – reads 2,027,936 (x1000) indicating approximately 2.03 billion total shots
  • Lambda Physik NovaLine K2020B internal beam path area – NovaTube laser tube housing and optical bench visible with mounting hardware
  • Lambda Physik NovaLine K2020B NovaPowerSwitch label and water circuit diagram showing cooling loop schematic for NovaPowerSwitch and laser tube
  • Lambda Physik NovaLine K2020B lower electronics cabinet – power supplies, PLC modules, relay banks, and terminal strip wiring
  • Lambda Physik NovaLine K2020B Wavelength Calibration Module – part number 27079427, component NL-LITHO 248-0.6, manufactured 2000, 180-253V 30VA
  • Lambda Physik NovaLine K2020B NovaTube rating plate – manufactured 2000, max operating pressure 3.0 bar, max temperature +50°C, min temperature +10°C, gas processor specs
$15,300.00
Was: $40,000.00
Current Stock: 1

Sold Out

Description

Lambda Physik NovaLine K2020B 248nm Excimer Laser 9 kVA 200-208V 3-Phase DUV

KrF excimer laser system operating at 248 nm wavelength for deep ultraviolet applications. Manufactured by Lambda Physik in Germany, designed for high-repetition-rate industrial photolithography and precision UV processing.

Specifications & What's Included

  • Wavelength: 248 nm (KrF laser medium)
  • Power: 9 kVA, 200-208V 3-Phase, 50-60 Hz, 28A
  • Pulse Repetition Rate: Up to 2 kHz
  • Bandwidth: ~50 pm
  • Dimensions: 74" L × 32" W × 61" H (freestanding unit)
  • Includes: NovaTube, NovaPowerSwitch, Wavelength Calibration Module (P/N 27079427)

Applications

DUV excimer lasers at 248 nm are standard in semiconductor photolithography for wafer processing and pattern transfer. This system is compatible with DUV catadioptric imaging lens scanner systems used in semiconductor manufacturing. KrF excimer sources provide the narrow bandwidth and high repetition rates required for precision microfabrication and lithographic processes.

Condition: Used
This Lambda Physik NovaLine K2020B 248nm KrF excimer laser system has been inspected and is in good used condition. The unit was pulled from a working semiconductor fabrication environment where it was previously in active service. Externally, the blue sheet-metal enclosure and stainless steel panels are in good shape with normal wear consistent with industrial fab use. The internal components — including the NovaTube laser tube, NovaPowerSwitch module, gas manifold, pressure gauges, and control electronics — are present and appear intact. The shot counter visible in the photos reads 2,027,936 (×1,000), indicating approximately 2.03 billion total shots. The Wavelength Calibration Module (P/N 27079427, component NL-LITHO 248-0.6, manufactured 2000) is present and included. Due to the specialized nature and size of this system (74" × 32" × 61", ~2,100 lbs), freight shipping is required. Please view our full photo set and contact us with any questions prior to purchasing.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Lambda Physik
Model:
NovaLine K2020B
MPN:
K2020B
Type:
KrF Excimer Laser System
SKU:
52008
Wavelength:
248 nm (KrF)
Laser Medium:
KrF (Krypton Fluoride)
Laser Class:
Excimer (Deep UV / DUV)
Power Requirements:
200-208V, 3-Phase, 50-60Hz, 9 kVA, 28A
Phase:
Three Phase
Voltage:
200-208V AC
Frequency:
50-60 Hz
Power Rating:
9 kVA
Current Rating:
28A
Number of Wires:
5
Pulse Repetition Rate:
Up to 2 kHz
Bandwidth:
~50 pm
Shot Count:
~2,027,936,000 (2.03 billion shots)
Year of Manufacture:
2000
Country/Region of Manufacture:
Germany
Manufacturer Location:
Göttingen, Germany
Application:
Semiconductor photolithography, DUV wafer scanning
Compatible With:
DUV catadioptric imaging lens scanner systems
Includes:
NovaTube, NovaPowerSwitch, Wavelength Calibration Module
Wavelength Calibration Module P/N:
27079427
Wavelength Calibration Module Component:
NL-LITHO 248-0.6
Calibration Module Voltage:
180-253V, 50/60Hz, 30VA, 0.12A
Dimensions:
74" L x 32" W x 61" H
Form Factor:
Freestanding Floor Unit
Condition:
Used – Pulled from Working Environment
Seller Notes:
Includes NovaTube, NovaPowerSwitch, and Wavelength Calibration Module. Freight shipping required.
Condition Notes:
This Lambda Physik NovaLine K2020B 248nm KrF excimer laser system has been inspected and is in good used condition. The unit was pulled from a working semiconductor fabrication environment where it was previously in active service.
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Lambda Physik NovaLine K2020B excimer laser system – front view showing blue cabinet enclosure and NovaLine branding Lambda Physik NovaLine K2020B – interior view with NovaPowerSwitch module and NovaTube assembly visible
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Lambda Physik NovaLine K2020B Excimer Laser 248nm 80W KrF Lithography NovaTube

Lambda Physik

$10,000.00
Was: $20,000.00
Lambda Physik NovaLine K2020B Excimer Laser 248nm 80W KrF Lithography NovaTube The Lambda Physik NovaLine K2020B is a high-power KrF excimer laser system operating at 248 nm, producing up to 80...
52009
SKU:
52009
Availability:
This is a large industrial laser system; please contact us prior to purchasing to arrange freight shipping and logistics.
Weight:
2,098.00 LBS
Brand:
Lambda Physik
Model:
NovaLine K2020B
MPN:
K2020B
Type:
KrF Excimer Laser System
SKU:
52009
Wavelength:
248 nm (KrF)
Output Power:
80 Watts
Laser Medium:
KrF (Krypton Fluoride)
Laser Type:
Excimer
Application:
Deep UV Lithography, Semiconductor Processing
Voltage:
200-208 V
Phase:
3-Phase
Frequency:
50-60 Hz
Power Rating:
9 kVA
Current Rating:
28 A
Number of Wires:
5
Pulse Counter (x1000):
1,626,400 (approx. 1.63 billion pulses)
Laser Tube:
NovaTube
Sub-Module 1:
NovaPowerSwitch
Sub-Module 2:
Wavelength Calibration Module
Wavelength Calibration Module PN:
27079428
Wavelength Calibration Module Voltage:
180-253 V, 50/60 Hz, 30 VA, 0.12 A
Compatible With:
NL-LITHO K1010A / K2010A
Manufactured:
2000, Göttingen, Germany
Serial Number (internal):
0007 E 6767
Country/Region of Manufacture:
Germany
Form Factor:
Floor-Standing Cabinet System
Overall Dimensions:
74" L x 32" D x 61" H
Condition:
Used – Pulled from Working Environment
Seller Notes:
Includes NovaTube, NovaPowerSwitch, and Wavelength Calibration Module
Condition Notes:
Lambda Physik NovaLine K2020B KrF Excimer Laser, 248nm/80W. Pulled from working production environment, tested functional. All modules present: NovaTube, NovaPowerSwitch, Wavelength Calibration Module. Normal industrial wear. Pulse counter ~1.6M.