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Lambda Physik

Lambda Physik

  • Lambda Physik EMG 102 MSC excimer laser power supply — front-left three-quarter view showing orange cabinet, front control panel, and caster base Lambda Physik EMG 102 MSC front panel close-up showing status indicator lights, digital display, HV Level and Rep Rate controls, and model label

    Lambda Physik EMG 102 MSC Excimer Laser Power Supply 3.8 kVA 208V 3-Phase

    Lambda Physik

    $900.00
    Was: $1,800.00
    Lambda Physik EMG 102 MSC Excimer Laser Power Supply 3.8 kVA 208V 3-PhasePower supply unit designed for Lambda Physik excimer laser systems. Delivers 3.8 kVA at 208V three-phase input, with front...
    52040
    SKU:
    52040
    Availability:
    Usually ships within 1-2 business days.
    Weight:
    238.00 LBS
    Brand:
    Lambda Physik
    Model:
    EMG 102 MSC
    MPN:
    EMG102MSC
    Type:
    Excimer Laser Power Supply
    SKU:
    52040
    Power Rating:
    3.8 kVA
    Input Voltage:
    208V AC
    Phase:
    Three Phase
    Frequency:
    50/60 Hz
    Power Requirements:
    208V AC, 3-Phase, 50/60 Hz
    Form Factor:
    Floor-Standing Cabinet on Casters
    Dimensions:
    25" W x 20" D x 26" H
    Country/Region of Manufacture:
    Germany
    Manufacture Year:
    1987
    Application:
    Excimer Laser Systems
    Front Panel Controls:
    Warm Up Timer, Remote Control, Laser Head, Power Supply, Reset
    Condition:
    Used – Pulled from Working Environment
    Seller Notes:
    Unit only — no external cables or accessories included beyond what is shown in photos.
    Condition Notes:
    Lambda Physik EMG 102 MSC excimer laser power supply. Inspected, in good used condition. Pulled from a working lab environment where it was actively in service. Normal cosmetic wear. Please contact us with any questions.
    $900.00
    Was: $1,800.00
  • Lambda Physik NovaLine K2020B excimer laser system – front view showing blue cabinet enclosure and NovaLine branding Lambda Physik NovaLine K2020B – interior view with NovaPowerSwitch module and NovaTube assembly visible

    Lambda Physik NovaLine K2020B Excimer Laser 248nm 80W KrF Lithography NovaTube

    Lambda Physik

    $10,000.00
    Was: $20,000.00
    Lambda Physik NovaLine K2020B Excimer Laser 248nm 80W KrF Lithography NovaTube The Lambda Physik NovaLine K2020B is a high-power KrF excimer laser system operating at 248 nm, producing up to 80...
    52009
    SKU:
    52009
    Availability:
    This is a large industrial laser system; please contact us prior to purchasing to arrange freight shipping and logistics.
    Weight:
    2,098.00 LBS
    Brand:
    Lambda Physik
    Model:
    NovaLine K2020B
    MPN:
    K2020B
    Type:
    KrF Excimer Laser System
    SKU:
    52009
    Wavelength:
    248 nm (KrF)
    Output Power:
    80 Watts
    Laser Medium:
    KrF (Krypton Fluoride)
    Laser Type:
    Excimer
    Application:
    Deep UV Lithography, Semiconductor Processing
    Voltage:
    200-208 V
    Phase:
    3-Phase
    Frequency:
    50-60 Hz
    Power Rating:
    9 kVA
    Current Rating:
    28 A
    Number of Wires:
    5
    Pulse Counter (x1000):
    1,626,400 (approx. 1.63 billion pulses)
    Laser Tube:
    NovaTube
    Sub-Module 1:
    NovaPowerSwitch
    Sub-Module 2:
    Wavelength Calibration Module
    Wavelength Calibration Module PN:
    27079428
    Wavelength Calibration Module Voltage:
    180-253 V, 50/60 Hz, 30 VA, 0.12 A
    Compatible With:
    NL-LITHO K1010A / K2010A
    Manufactured:
    2000, Göttingen, Germany
    Serial Number (internal):
    0007 E 6767
    Country/Region of Manufacture:
    Germany
    Form Factor:
    Floor-Standing Cabinet System
    Overall Dimensions:
    74" L x 32" D x 61" H
    Condition:
    Used – Pulled from Working Environment
    Seller Notes:
    Includes NovaTube, NovaPowerSwitch, and Wavelength Calibration Module
    Condition Notes:
    Lambda Physik NovaLine K2020B KrF Excimer Laser, 248nm/80W. Pulled from working production environment, tested functional. All modules present: NovaTube, NovaPowerSwitch, Wavelength Calibration Module. Normal industrial wear. Pulse counter ~1.6M.
    $10,000.00
    Was: $20,000.00
  • Lambda Physik NovaLine K2020B excimer laser system – front panel view showing blue enclosure, NovaLine branding, emergency stop, and lower control panel Lambda Physik NovaLine K2020B excimer laser – right-rear view showing stainless steel upper enclosure and blue base cabinet

    Lambda Physik NovaLine K2020B 248nm Excimer Laser 9 kVA 200-208V 3-Phase DUV

    Lambda Physik

    $15,300.00
    Was: $40,000.00
    Lambda Physik NovaLine K2020B 248nm Excimer Laser 9 kVA 200-208V 3-Phase DUV KrF excimer laser system operating at 248 nm wavelength for deep ultraviolet applications. Manufactured by Lambda Physik...
    52008
    SKU:
    52008
    Availability:
    This item requires freight shipping due to its size and weight. Please contact us for a shipping quote before purchasing.
    Weight:
    2,098.00 LBS
    Brand:
    Lambda Physik
    Model:
    NovaLine K2020B
    MPN:
    K2020B
    Type:
    KrF Excimer Laser System
    SKU:
    52008
    Wavelength:
    248 nm (KrF)
    Laser Medium:
    KrF (Krypton Fluoride)
    Laser Class:
    Excimer (Deep UV / DUV)
    Power Requirements:
    200-208V, 3-Phase, 50-60Hz, 9 kVA, 28A
    Phase:
    Three Phase
    Voltage:
    200-208V AC
    Frequency:
    50-60 Hz
    Power Rating:
    9 kVA
    Current Rating:
    28A
    Number of Wires:
    5
    Pulse Repetition Rate:
    Up to 2 kHz
    Bandwidth:
    ~50 pm
    Shot Count:
    ~2,027,936,000 (2.03 billion shots)
    Year of Manufacture:
    2000
    Country/Region of Manufacture:
    Germany
    Manufacturer Location:
    Göttingen, Germany
    Application:
    Semiconductor photolithography, DUV wafer scanning
    Compatible With:
    DUV catadioptric imaging lens scanner systems
    Includes:
    NovaTube, NovaPowerSwitch, Wavelength Calibration Module
    Wavelength Calibration Module P/N:
    27079427
    Wavelength Calibration Module Component:
    NL-LITHO 248-0.6
    Calibration Module Voltage:
    180-253V, 50/60Hz, 30VA, 0.12A
    Dimensions:
    74" L x 32" W x 61" H
    Form Factor:
    Freestanding Floor Unit
    Condition:
    Used – Pulled from Working Environment
    Seller Notes:
    Includes NovaTube, NovaPowerSwitch, and Wavelength Calibration Module. Freight shipping required.
    Condition Notes:
    This Lambda Physik NovaLine K2020B 248nm KrF excimer laser system has been inspected and is in good used condition. The unit was pulled from a working semiconductor fabrication environment where it was previously in active service.
    $15,300.00
    Was: $40,000.00