Lambda Physik

Lambda Physik

  • Lambda Physik EMG 102 MSC excimer laser power supply — front-left three-quarter view showing orange cabinet, front control panel, and caster base Lambda Physik EMG 102 MSC front panel close-up showing status indicator lights, digital display, HV Level and Rep Rate controls, and model label

    Lambda Physik EMG 102 MSC Excimer Laser Power Supply 3.8 kVA 208V 3-Phase

    Lambda Physik

    $900.00
    Was: $1,800.00
    Lambda Physik EMG 102 MSC Excimer Laser Power Supply 3.8 kVA 208V 3-PhasePower supply unit designed for Lambda Physik excimer laser systems. Delivers 3.8 kVA at 208V three-phase input, with front...
    52040
    SKU:
    52040
    Availability:
    Usually ships within 1-2 business days.
    Weight:
    238.00 LBS
    Brand:
    Lambda Physik
    Model:
    EMG 102 MSC
    MPN:
    EMG102MSC
    Type:
    Excimer Laser Power Supply
    SKU:
    52040
    Power Rating:
    3.8 kVA
    Input Voltage:
    208V AC
    Phase:
    Three Phase
    Frequency:
    50/60 Hz
    Power Requirements:
    208V AC, 3-Phase, 50/60 Hz
    Form Factor:
    Floor-Standing Cabinet on Casters
    Dimensions:
    25" W x 20" D x 26" H
    Country/Region of Manufacture:
    Germany
    Manufacture Year:
    1987
    Application:
    Excimer Laser Systems
    Front Panel Controls:
    Warm Up Timer, Remote Control, Laser Head, Power Supply, Reset
    Condition:
    Used – Pulled from Working Environment
    Seller Notes:
    Unit only — no external cables or accessories included beyond what is shown in photos.
    Condition Notes:
    Lambda Physik EMG 102 MSC excimer laser power supply. Inspected, in good used condition. Pulled from a working lab environment where it was actively in service. Normal cosmetic wear. Please contact us with any questions.
    California Prop 65 Warning:
    WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
    $900.00
    Was: $1,800.00
  • Lambda Physik NovaLine K2020B excimer laser system – front view showing blue cabinet enclosure and NovaLine branding Lambda Physik NovaLine K2020B – interior view with NovaPowerSwitch module and NovaTube assembly visible

    Lambda Physik NovaLine K2020B Excimer Laser 248nm 80W KrF Lithography NovaTube

    Lambda Physik

    $10,000.00
    Was: $20,000.00
    Lambda Physik NovaLine K2020B Excimer Laser 248nm 80W KrF Lithography NovaTube The Lambda Physik NovaLine K2020B is a high-power KrF excimer laser system operating at 248 nm, producing up to 80...
    52009
    SKU:
    52009
    Availability:
    This is a large industrial laser system; please contact us prior to purchasing to arrange freight shipping and logistics.
    Weight:
    2,098.00 LBS
    Brand:
    Lambda Physik
    Model:
    NovaLine K2020B
    MPN:
    K2020B
    Type:
    KrF Excimer Laser System
    SKU:
    52009
    Wavelength:
    248 nm (KrF)
    Output Power:
    80 Watts
    Laser Medium:
    KrF (Krypton Fluoride)
    Laser Type:
    Excimer
    Application:
    Deep UV Lithography, Semiconductor Processing
    Voltage:
    200-208 V
    Phase:
    3-Phase
    Frequency:
    50-60 Hz
    Power Rating:
    9 kVA
    Current Rating:
    28 A
    Number of Wires:
    5
    Pulse Counter (x1000):
    1,626,400 (approx. 1.63 billion pulses)
    Laser Tube:
    NovaTube
    Sub-Module 1:
    NovaPowerSwitch
    Sub-Module 2:
    Wavelength Calibration Module
    Wavelength Calibration Module PN:
    27079428
    Wavelength Calibration Module Voltage:
    180-253 V, 50/60 Hz, 30 VA, 0.12 A
    Compatible With:
    NL-LITHO K1010A / K2010A
    Manufactured:
    2000, Göttingen, Germany
    Serial Number (internal):
    0007 E 6767
    Country/Region of Manufacture:
    Germany
    Form Factor:
    Floor-Standing Cabinet System
    Overall Dimensions:
    74" L x 32" D x 61" H
    Condition:
    Used – Pulled from Working Environment
    Seller Notes:
    Includes NovaTube, NovaPowerSwitch, and Wavelength Calibration Module
    Condition Notes:
    Lambda Physik NovaLine K2020B KrF Excimer Laser, 248nm/80W. Pulled from working production environment, tested functional. All modules present: NovaTube, NovaPowerSwitch, Wavelength Calibration Module. Normal industrial wear. Pulse counter ~1.6M.
    California Prop 65 Warning:
    WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
    $10,000.00
    Was: $20,000.00
  • Lambda Physik NovaLine K2020B excimer laser system – front panel view showing blue enclosure, NovaLine branding, emergency stop, and lower control panel Lambda Physik NovaLine K2020B excimer laser – right-rear view showing stainless steel upper enclosure and blue base cabinet

    Lambda Physik NovaLine K2020B 248nm Excimer Laser 9 kVA 200-208V 3-Phase DUV

    Lambda Physik

    $15,300.00
    Was: $40,000.00
    Lambda Physik NovaLine K2020B 248nm Excimer Laser 9 kVA 200-208V 3-Phase DUV KrF excimer laser system operating at 248 nm wavelength for deep ultraviolet applications. Manufactured by Lambda Physik...
    52008
    SKU:
    52008
    Availability:
    This item requires freight shipping due to its size and weight. Please contact us for a shipping quote before purchasing.
    Weight:
    2,098.00 LBS
    Brand:
    Lambda Physik
    Model:
    NovaLine K2020B
    MPN:
    K2020B
    Type:
    KrF Excimer Laser System
    SKU:
    52008
    Wavelength:
    248 nm (KrF)
    Laser Medium:
    KrF (Krypton Fluoride)
    Laser Class:
    Excimer (Deep UV / DUV)
    Power Requirements:
    200-208V, 3-Phase, 50-60Hz, 9 kVA, 28A
    Phase:
    Three Phase
    Voltage:
    200-208V AC
    Frequency:
    50-60 Hz
    Power Rating:
    9 kVA
    Current Rating:
    28A
    Number of Wires:
    5
    Pulse Repetition Rate:
    Up to 2 kHz
    Bandwidth:
    ~50 pm
    Shot Count:
    ~2,027,936,000 (2.03 billion shots)
    Year of Manufacture:
    2000
    Country/Region of Manufacture:
    Germany
    Manufacturer Location:
    Göttingen, Germany
    Application:
    Semiconductor photolithography, DUV wafer scanning
    Compatible With:
    DUV catadioptric imaging lens scanner systems
    Includes:
    NovaTube, NovaPowerSwitch, Wavelength Calibration Module
    Wavelength Calibration Module P/N:
    27079427
    Wavelength Calibration Module Component:
    NL-LITHO 248-0.6
    Calibration Module Voltage:
    180-253V, 50/60Hz, 30VA, 0.12A
    Dimensions:
    74" L x 32" W x 61" H
    Form Factor:
    Freestanding Floor Unit
    Condition:
    Used – Pulled from Working Environment
    Seller Notes:
    Includes NovaTube, NovaPowerSwitch, and Wavelength Calibration Module. Freight shipping required.
    Condition Notes:
    This Lambda Physik NovaLine K2020B 248nm KrF excimer laser system has been inspected and is in good used condition. The unit was pulled from a working semiconductor fabrication environment where it was previously in active service.
    California Prop 65 Warning:
    WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
    $15,300.00
    Was: $40,000.00