Lambda Physik NovaLine K2020B Excimer Laser 248nm 80W KrF Lithography NovaTube

Lambda Physik NovaLine K2020B Excimer Laser 248nm 80W KrF Lithography NovaTube

The Lambda Physik NovaLine K2020B is a high-power KrF excimer laser system operating at 248 nm, producing up to 80 watts of average output power. The NovaLine series represents Lambda Physik's production-class deep-UV laser platform engineered specifically for photolithography applications in semiconductor manufacturing. This is the high-power variant of the NovaLine, distinguished by its NovaTube laser chamber technology and NovaPowerSwitch solid-state pulse power module, which together replace conventional thyratron-based designs for extended service life and more consistent pulse-to-pulse energy. The system includes a Wavelength Calibration Module (Part No. 27079428) compatible with the NL-LITHO K1010A/K2010A lithography laser family.

Specifications & What's Included

• Manufacturer: Lambda Physik GmbH, Göttingen, Germany
• Model: NovaLine K2020B
• Laser Type: KrF Excimer (Krypton Fluoride)
• Wavelength: 248 nm (Deep UV)
• Average Output Power: 80 Watts
• Laser Tube: NovaTube (integrated, sealed-module design)
• Pulse Power Module: NovaPowerSwitch (solid-state thyratron replacement)
• Wavelength Calibration Module: included; Part No. 27079428; compatible with NL-LITHO K1010A/K2010A
• Wavelength Calibration Module power: 180–253 V, 50/60 Hz, 30 VA, 0.12 A; manufactured 2001
• Input Voltage: 200–208 V
• Phase: 3-Phase
• Frequency: 50–60 Hz
• Power Consumption: 9 kVA
• Current Draw: 28 A
• Number of Supply Wires: 5
• Year Manufactured: 2000
• Pulse Counter Reading: approximately 1,626,400 (×1000 counts) — total accumulated shots from prior service
• Overall Dimensions: 74" L × 32" D × 61" H
• Electronics bay: control cards with GPIB, DB9 serial, and BNC connectors visible; EXT TRIG and EXT SYNC BNC connectors on front panel
• Gas handling: multi-valve manifold and plumbing assembly present in lower cabinet
• Cooling: integrated fan assemblies visible internally
• Enclosure: blue powder-coated steel lower cabinet; stainless steel upper laser head enclosure
• Certifications: CE marked (visible on serial plate)

Applications

The Lambda Physik NovaLine K2020B is designed for deep-UV photolithography in semiconductor fabrication, where 248 nm KrF excimer lasers serve as the illumination source for steppers and scanners patterning sub-micron feature sizes on silicon wafers. At the 80-watt power level, this system is suited to high-throughput production lithography tools rather than lower-power R&D configurations. Beyond lithography, KrF excimer laser systems at this wavelength have been used in flat-panel display (FPD) laser annealing, micromachining of polymers and ceramics, and advanced photoablation processes in microelectronics research. The NovaLine series was widely deployed in conjunction with ASML, Nikon, and Canon lithography exposure tools during the deep-submicron manufacturing era. Buyers typically include semiconductor fabs maintaining legacy lithography lines, research institutions, and equipment brokers supporting the used semiconductor capital equipment market.