Description
FSI ChemFill Chemical Canister Module Delivery System Dual Tank GE Fanuc PLC
Dual-tank chemical delivery system controlled by GE Fanuc Series 90 Micro PLC. Designed for point-of-use chemical dispensing in semiconductor cleanroom wet process applications.
Specifications & What's Included
- Dual stainless steel tanks (Canister A and B) with nitrogen pressurization
- GE Fanuc Series 90 Micro PLC controller
- Cabinet dimensions: 26" W × 49" H × 30" D (21" interior depth)
- Door opening: 21" W × 39" H
- Polypropylene valve manifold with solenoid valves
- Monitoring: chemical level, system pressure, alarms (N2 High/Low, Cabinet Leak, Low Exhaust, Full/Low/Low Low)
- ETL Listed
- Power On/Off key switch and EPO Reset
Applications
Delivers chemicals at point-of-use for semiconductor manufacturing and cleanroom processes. Integrates with wet process tools requiring dual-tank redundancy and automated chemical level and pressure monitoring. GE Fanuc PLC provides local control and alarm management for cleanroom chemical systems.
Condition: Used
This FSI ChemFill Chemical Canister Module Delivery System has been inspected and is in good condition overall. It was pulled from a working clean room environment where it was previously in active service. Both stainless steel tanks have been thoroughly cleaned and triple washed. The system shows normal wear consistent with cleanroom use and is cosmetically clean. There are two noted exceptions: the red emergency stop button for Canister A is missing, and the amber indicator light cover for the Door A indicator is missing. All other controls, indicators, tubing, valve manifold, and internal wiring appear intact. Please view our photo set and contact us if you have any questions.
This FSI ChemFill Chemical Canister Module Delivery System has been inspected and is in good condition overall. It was pulled from a working clean room environment where it was previously in active service. Both stainless steel tanks have been thoroughly cleaned and triple washed. The system shows normal wear consistent with cleanroom use and is cosmetically clean. There are two noted exceptions: the red emergency stop button for Canister A is missing, and the amber indicator light cover for the Door A indicator is missing. All other controls, indicators, tubing, valve manifold, and internal wiring appear intact. Please view our photo set and contact us if you have any questions.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
FSI (Fluid Systems International / ChemFill) |
Model: |
ChemFill Chemical Canister Module |
MPN: |
ChemFill Canister Module |
Type: |
Chemical Canister Module Delivery System |
SKU: |
42536 |
Condition: |
Used – Pulled from Working Environment |
Controller / PLC: |
GE Fanuc Series 90 Micro PLC |
Number of Tanks: |
2 (Dual Tank — Canister A and Canister B) |
Tank Material: |
Stainless Steel |
Pressurization Gas: |
Nitrogen (N2) |
Interior Bay Height: |
49 inches |
Interior Bay Width: |
26 inches |
Interior Bay Depth: |
21 inches |
Exterior Depth: |
30 inches |
Door Opening Size: |
21" W x 39" H |
Interior Depth (back wall to front door): |
21 inches (11" extra space behind back wall) |
Application / Use Case: |
Cleanroom chemical delivery, point of use (POU) |
Monitoring / Control: |
Chemical level, system valving, alarms, POU interface |
Indicators / Alarms: |
N2 High, N2 Low, Cabinet Leak, Low Exhaust, High High, Full, Low, Low Low |
Controls: |
Power Off/On key switch, EPO Reset, pressure gauges (PI 3 visible) |
Valve Manifold: |
Rear-panel polypropylene valve manifold (multiple solenoid valves) |
Certifications: |
ETL Listed (label visible on panel) |
Form Factor: |
Freestanding Cabinet |
Seller Notes: |
Missing red E-stop button and amber light cover for Door A indicator. Tanks cleaned and triple washed. |
Country/Region of Manufacture: |
United States |
Compatible With: |
Semiconductor / cleanroom wet process tools, point of use chemical systems |
Condition Notes: |
FSI ChemFill Chemical Canister Module Delivery System. Inspected, good condition. Pulled from working clean room. Tanks cleaned and triple washed. Missing: red E-stop button and amber light cover for Door A indicator. |
