Description
FSI 2134N Semiconductor Wafer Acid Cleaning Solvent Processor w/ Controls
Benchtop acid cleaning and solvent processing system for semiconductor wafer preparation. Freestanding stainless steel cabinet with integrated control and chemical delivery systems.
Specifications & What's Included
- Brand: FSI; Model: 2134N
- Control: Dayton SCR (Forward/Brake/Reverse, On/Off) with integrated Model 2000 programmable cycle controller
- Chemical system: Pressurized canisters, tubing manifold, multiple spray nozzles
- Monitoring: 4 inline flow meters, multiple analog pressure gauges (etch gas, solvent, etchant gas, process air, exhaust dry)
- Spin bowl: Circular stainless steel carrier fixture with RPM indicator
- Safety: Integrated Halon fire suppression system
Applications
Wafer acid cleaning and solvent processing systems were standard in semiconductor fabrication facilities for substrate preparation and contamination removal. The FSI 2134N handles multi-step chemical and solvent-based cleaning cycles on silicon wafers, typically integrated into pilot-line and production environments.
Condition: Used
This FSI 2134N Semiconductor Wafer Acid Cleaning Solvent Processor has been visually inspected and appears to be a complete system. It includes the main stainless steel cabinet, integrated control rack with Model 2000 programmable cycle controller, Dayton SCR control unit, pressure gauges and flow meters, chemical canister assembly, spin bowl with wafer carrier fixture, and internal pump and plumbing assembly. We were not able to test all of its functions at our facility, so it is being sold in as-inspected condition. The stainless steel cabinet shows normal wear consistent with prior use in a fab environment. Tubing and plumbing connections are present throughout. A Halon fire suppression canister is integrated into the chemical system. Please view our photo set and contact us if you have any questions.
This FSI 2134N Semiconductor Wafer Acid Cleaning Solvent Processor has been visually inspected and appears to be a complete system. It includes the main stainless steel cabinet, integrated control rack with Model 2000 programmable cycle controller, Dayton SCR control unit, pressure gauges and flow meters, chemical canister assembly, spin bowl with wafer carrier fixture, and internal pump and plumbing assembly. We were not able to test all of its functions at our facility, so it is being sold in as-inspected condition. The stainless steel cabinet shows normal wear consistent with prior use in a fab environment. Tubing and plumbing connections are present throughout. A Halon fire suppression canister is integrated into the chemical system. Please view our photo set and contact us if you have any questions.
Warranty Information
We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information
Brand: |
FSI |
Model: |
2134N |
MPN: |
2134N |
Type: |
Semiconductor Wafer Acid Cleaning & Solvent Processor |
SKU: |
16183 |
Condition: |
Used – Inspected, partial function verification only |
Seller Notes: |
Complete system with controls, pumps, flow valves/meters, pressure gauges, and chemical canisters |
Country/Region of Manufacture: |
United States |
Form Factor: |
Freestanding / Benchtop Cabinet |
Application / Use Case: |
Semiconductor wafer acid cleaning and solvent processing |
Control Type: |
Dayton SCR Control (Forward/Brake/Reverse, On/Off) |
Controller / Programmer: |
Integrated Model 2000 programmable cycle controller (IV brand) |
Chemical System: |
Pressurized chemical canisters (red safety cans), tubing manifold |
Fire Suppression: |
Halon suppression system integrated |
Enclosure Material: |
Stainless steel cabinet |
Pressure Monitoring: |
Multiple analog pressure gauges; 4 flow meters visible |
Gauge Types Visible: |
Etch gas, solvent, etchant gas, process air, exhaust dry pressures |
Flow Meters: |
4 inline flow meters on front panel |
Wafer Chuck / Bowl: |
Circular spin bowl with stainless wafer carrier fixture |
Nozzle System: |
Multiple spray nozzles visible in spin bowl lid |
RPM Indicator: |
Analog RPM gauge on control panel |
Outputs / Steps: |
Multi-step programmable output panel (Model 2000 controller) |
Serial Number: |
FSI-5124 (internal reference) |
Condition Notes: |
FSI 2134N wafer cleaning processor — visually inspected, appears complete with controls, pumps, gauges, flow meters, and chemical canisters. Not all functions were tested at our facility. Sold as-inspected. Contact us with questions. |
