Description
FSI 292066-400 Rev C Power Control Board PCB FSI Polaris Semiconductor Wafer
The FSI 292066-400 Rev C is a power control board (PCB) designed for use in FSI International Polaris wafer processing systems. This board manages power switching and control functions within the Polaris platform, incorporating high-current relays, a power transformer, filter capacitors, and a power transistor in a compact module format. It is made in the USA and carries assembly number A/N292066.
Specifications & What's Included
- Manufacturer: FSI International
- Part / Assembly Number: 292066-400 (also referenced as 29066-400)
- Board Number: B/N292066-200 (Rev-B, visible on sub-board label)
- Revision: Rev C
- Type: Power Control Board PCB
- Country of Manufacture: USA (printed on board label)
- Approximate Dimensions: 6" x 5" x 3"
- Form Factor: Standalone PCB / card module
- Key Components (visible on board):
- Two large power relays (black, mounted on solder side)
- Power transformer (yellow, mounted on component side)
- Large electrolytic filter capacitors (component and solder sides)
- TO-3 style power transistor
- IC chip (solder side; markings not fully legible in photos)
- Trimmer potentiometer
- Green screw terminal blocks (power connections)
- Red LED/status indicator
- Board only — no additional accessories or documentation included
Applications
FSI International (Floating Solids International, later known simply as FSI) was a major manufacturer of wet cleaning, surface conditioning, and thermal processing equipment for the semiconductor industry. The Polaris platform was FSI's wet wafer processing system, widely used in silicon wafer fabrication for cleaning and surface preparation steps in IC manufacturing. Power control boards like this one manage the switching and regulation of power to motors, heaters, or other actuators within the system's process modules. This type of board is a common spare part requirement in fabs that operate legacy FSI Polaris tools, as ongoing production depends on keeping these systems running. Semiconductor equipment maintenance teams and refurbishers sourcing FSI Polaris spare parts will find this board directly applicable to keeping their systems operational.
This FSI 292066-400 Rev C Power Control Board PCB has been inspected and is in good condition. It was kept as a backup spare by a local semiconductor company and is no longer needed, making it available for sale. The board shows typical light handling wear consistent with storage. Both the component side and solder side appear clean with no obvious damage, broken traces, or burned components. Please view our photo set and contact us if you have any questions.
Warranty Information
Additional Information
Brand: |
FSI International |
Model: |
292066-400 |
MPN: |
292066-400 |
Secondary Model: |
29066-400 |
Type: |
Power Control Board PCB |
SKU: |
32490 |
Revision: |
Rev C |
Board Number: |
B/N292066-200 Rev-B (sub-board) |
Compatible With: |
FSI Polaris Wafer Processing System |
Application: |
Semiconductor Wafer Processing |
Form Factor: |
PCB / Card Module |
Dimensions: |
6" x 5" x 3" |
Country/Region of Manufacture: |
United States |
Condition: |
Used – Inspected, Former Backup Spare |
Seller Notes: |
Board only, no additional accessories included. |
Condition Notes: |
FSI 292066-400 Rev C Power Control Board PCB. Inspected, in good condition. Former backup spare from a semiconductor facility — never deployed. Shows light storage wear, no visible damage. |