BOC Edwards Systems Chemistry Chemical Daytank Pumping Station Cabinet FSI

BOC Edwards Systems Chemistry Chemical Daytank Pumping Station Cabinet FSI

This is a BOC Edwards Systems Chemistry Chemical Daytank Pumping Station Cabinet, a self-contained floor-standing enclosure designed to store, pressurize, and dispense process chemistry in semiconductor wet process environments. The unit houses a stainless steel daytank inside a white-painted sheet metal cabinet with an acrylic viewing door, mounted on locking casters for mobility. A BOC Edwards Logic Converter B-Box (10x), part number 99-17285-00, is mounted on the rear panel and handles logic control and manual depressurization. This style of daytank cabinet was commonly integrated into FSI and other OEM wet bench systems as the chemical supply side of a bulk-to-point-of-use chemical delivery architecture.

Specifications & What's Included

• Manufacturer: BOC Edwards Systems Chemistry
• Type: Chemical Daytank Pumping Station Cabinet
• Logic Controller: BOC Edwards Logic Converter B-Box (10x), P/N 99-17285-00, with Manual Depressure button
• Internal Tank: Stainless steel daytank with multiple top fittings, fill cap, and sensor wiring
• Cabinet: White-painted enclosure with acrylic front door, blue-lined interior, locking casters
• Exhaust: Top-mounted stainless steel exhaust stack with internal filter/brush ring and dual process tubes
• Pressure Gauge: Process N2 Gauge, 0–100 PSI (labeled: 20 PSI = Full)
• N2 Regulator: Veriflo Process N2 Regulator (labeled: DO NOT ADJUST)
• Pressure Sensor: External pressure sensor (labeled PRESSURE SENSOR) with some chemical residue on housing
• Valve Ports: AV-101, AV-102, AV-103, AV-104 (air-operated valve connections on cabinet side)
• Outlet Ports: EXHAUST, TO AOV 101&102, TO AOV 103 (labeled fittings on lower rear panel)
• Chemical In: CHEMICAL IN port on front panel (white PVC fitting)
• Drain: DRAIN port on rear lower panel (white PVC fitting)
• Process / Cleaning Station: Labeled tube fittings on top surface (PROCESS and TO CLEANING STATION)
• Sensor Connectors: J1 – Level Sensor (multi-pin circular); J2 – MDU Leak Sensor (multi-pin circular)
• I/O Connectors: J3, J4, J5, J6 – multi-pin circular connectors on rear panel
• Chemical Label: NFPA placard — 10% Acetic Acid / 90% DI Water; Health 2, Flammability 1, Reactivity 1; PPE: safety goggles, corrosive, apron
• Interior Plumbing: Tubing manifold, solenoid/check valves, and distribution plumbing visible inside cabinet
• Associated OEM: Integrated with FSI wet bench systems (FSI-branded caution labels visible)

Applications

Chemical daytank pumping stations like this BOC Edwards unit are used in semiconductor and microelectronics fabrication facilities to supply dilute process chemicals — such as acetic acid, HF, H2O2, or other wet process chemistries — from a pressurized local reservoir to wet bench tools at the point of use. The daytank receives chemistry from a bulk delivery system and re-pressurizes it with nitrogen to push measured doses to the process tool on demand, isolating the tool from the bulk supply and providing a controlled, monitored intermediate volume. These cabinets were standard infrastructure in 200mm and 300mm wafer fabs from the 1990s through 2000s, commonly paired with FSI, CFM Technologies, and similar OEM wet cleaning and etching tools. The integrated logic controller, level sensor, leak detection, and automatic start/stop functionality allow the system to operate with minimal manual intervention. Surplus daytank stations are sought by fabs maintaining legacy wet process lines, university research cleanrooms, and facilities building or upgrading chemical delivery infrastructure.