Fluoroware Entegris A182-60MU 13-Slot 6" 150mm Silicon Wafer Carrier Cassette

Fluoroware Entegris A182-60MU 13-Slot 6" 150mm Silicon Wafer Carrier Cassette

The Fluoroware Entegris A182-60MU is a 6" (150mm) silicon wafer carrier cassette made from translucent polypropylene. This unit was originally configured for 25 wafers and has been modified to hold 13 wafers. It provides secure, slot-based horizontal storage and transport of 150mm silicon wafers in cleanroom semiconductor environments.

Specifications & What's Included

• Manufacturer: Fluoroware (now Entegris)
• Model / MPN: A182-60MU
• Wafer size: 6" / 150mm
• Number of slots: 13 (modified from original 25-slot configuration)
• Material: Translucent white polypropylene
• Compatible outer carry case: Fluoroware Entegris E124-60 (may be available separately — contact us)
• Compatible inner wafer carrier: Fluoroware Entegris A182-60MU
• Slot tines and alignment tabs intact and undamaged
• Carrier only — outer case not included with this listing

Applications

150mm wafer carrier cassettes like the A182-60MU are standard handling and transport containers used throughout semiconductor fabrication. They hold silicon wafers during wet bench processing, diffusion, CVD, lithography, and inspection steps, as well as during transfer between tools and between facilities. Fluoroware — later acquired by Entegris — was one of the dominant suppliers of fluoropolymer and polypropylene wafer handling products from the 1970s through the 2000s, and their cassette designs became broadly adopted across the industry. The 150mm (6") wafer size was the production standard through much of the 1980s and 1990s before 200mm and 300mm wafers became prevalent, and 150mm fabs and research facilities continue to use this cassette format today for legacy process lines, R&D, and smaller-volume production. These carriers are also used in solar cell fabrication and other thin-substrate processes that adopted the 150mm form factor.