Fluoroware E124-60 150mm 6in Silicon Wafer Case Box Robox A182-60MU Cassette

Fluoroware E124-60 150mm 6in Silicon Wafer Case Box Robox A182-60MU Cassette

The Fluoroware E124-60 is a hard-shell polypropylene wafer transport and storage case designed for 150mm (6-inch) silicon wafers. This listing includes the yellow E124-60 outer case and the A182-60MU Robox no-latch wafer cassette insert. The no-latch cassette design allows wafers to be loaded and unloaded without engaging mechanical latches, simplifying handling in cleanroom environments.

Specifications & What's Included

• Outer Case Model: Fluoroware E124-60
• Cassette Part Number: A182-60MU
• Cassette Type: Robox No-Latch Wafer Cassette
• Compatible Wafer Size: 150mm / 6-inch silicon wafers
• Outer Case Material: Yellow polypropylene
• Cassette Insert Material: Natural/translucent polypropylene
• Closure: Integrated snap-latch clips on outer case
• Includes: E124-60 outer case + A182-60MU cassette insert

Applications

Fluoroware (now part of Entegris) wafer carriers and transport cases are standard equipment in semiconductor fabrication facilities. The E124-60 series is designed for safe transport and short-term storage of 150mm silicon wafers between process steps — including lithography, etch, deposition, and metrology stations. The hard outer shell protects wafers from mechanical shock and contamination during inter-tool and inter-facility transfers, while the inner Robox cassette holds wafers in precise slots to prevent contact damage. These carriers are used across wafer fabs, R&D labs, university semiconductor programs, and solar cell manufacturers working with 150mm substrates. Fluoroware established this carrier format in the 1980s and 1990s as 150mm became the dominant wafer size, and 150mm fabs — including legacy production lines and research facilities — continue to use compatible cassettes and boxes today.