Entegris X9150-0406 Ultrapak WaferShield 25-Slot Wafer Carrier 6" 150mm

Entegris X9150-0406 Ultrapak WaferShield 25-Slot Wafer Carrier 6" 150mm

The Entegris X9150-0406 is a 25-slot Ultrapak WaferShield wafer carrier designed for storing, handling, and shipping 6-inch (150mm) silicon wafers. Made from a semi-transparent polypropylene construction, this open-top carrier holds up to 25 wafers in individual vertical slots separated by rigid fins, keeping wafers upright and isolated during transport and inter-tool transfer. Slot index numbers are molded directly into the top edge rail for quick position reference during loading and unloading.

Specifications & What's Included

• Brand: Entegris
• Part Number: X9150-0406
• Product Line: Ultrapak WaferShield
• Wafer Size: 6" / 150mm
• Number of Slots: 25
• Material: Semi-transparent polypropylene plastic
• Slot indexing: Numbered position markers (10, 15, 20, 25) molded into top edge rail
• Corner posts and latch tabs for lid or stacking interface
• Carrier only (no lid pictured or included)

Applications

The Entegris Ultrapak WaferShield line is a standard wafer carrier format used throughout semiconductor fabrication facilities for the storage and transport of bare and processed silicon wafers. The 150mm (6-inch) format was the dominant wafer size in production from the mid-1980s through the mid-1990s and remains widely used today in legacy fab lines, research institutions, universities, MEMS production, compound semiconductor manufacturing, and solar cell R&D. These carriers are used at process steps where wafers must be moved between tools, stored temporarily in cleanrooms, or packaged for shipment between facilities. The rigid plastic construction and individual slot fins prevent wafer-to-wafer contact and reduce particulate contamination risk during handling. Entegris (formerly Mykrolis and, earlier, Fluoroware) is one of the primary manufacturers of wafer-handling consumables for the global semiconductor industry, and their Ultrapak carriers are a recognized standard format compatible with automated wafer-handling equipment used in 150mm process environments.