Dison Technology AMC068 AMC069 Vacuum Controller Card PCB Rev B 1994

Dison Technology AMC068 AMC069 Vacuum Controller Card PCB Rev B 1994

The Dison Technology AMC068 / AMC069 is a large-format vacuum process controller card (PWB AMC068 Rev B / CCA AMC069) designed to serve as the central I/O and control interface board within a PVD vacuum deposition or sputtering system. Dating from 1994, this card aggregates control signals, sensor inputs, valve drive outputs, power supply interfaces, and thermocouple channels across a single PCB, connecting the system controller to the physical hardware of the process chamber.

Specifications & What's Included

• Brand: Dison Technology
• PWB Number: AMC068 Rev B
• CCA Number: AMC069
• Copyright / Production Date: 1994
• Form Factor: PCB / Card Module (large format, single board)
• Connector Types: Multiple D-sub connectors (DB-9, DB-15, DB-25), BNC connectors, and multi-pin board headers
• Chamber Interlocks (J19): chamber safety interlock interface
• Cryo Heater (J18): cryopump heater control connector
• Helium Valve: helium valve drive interface
• Cap. Man. (Capacitance Manometer): pressure sensor input
• Cryo Power: cryopump power interface
• Plasma Ignite: plasma ignition control output
• Target Water: target cooling water interlock/sensor
• Shutter Sensors: shutter position sensor inputs
• Pneumatic Valves: pneumatic valve drive outputs
• Argon Overpressure: argon overpressure sensor/interlock
• Argon Flow: argon mass flow control interface
• Subst Water: substrate water cooling interlock/sensor
• MKS 250 (J30): interface connector for MKS 250 pressure/flow controller
• Common Oscillator (Osc.): common oscillator interface
• Pump T/C (J23): pump thermocouple input (BNC)
• Cham. T/C (J22): chamber thermocouple input (BNC)
• Subst T/C: substrate thermocouple input (BNC)
• Target T/C: target thermocouple input (BNC)
• 10KW Supply x2: dual 10KW power supply interfaces
• 1KW Supply: 1KW power supply interface
• +24V Input: +24V DC power input connector
• UPS Alarm: UPS alarm signal interface
• Analog Input: analog sensor input connector
• Analog Output: analog control output connector
• Digital Input: digital signal input connector
• Digital Out #1 and Digital Out #2: digital control output connectors
• Oatel module (DATEL BWR-15/100-D48 or similar DC/DC converter) visible on component side
• Spare connector position present on board
• Card only — no external cables or mounting hardware included

Applications

This card was designed for use in vacuum deposition and physical vapor deposition (PVD) sputtering systems — the type of equipment used in semiconductor fabrication, thin-film coating, and related industrial processes to deposit metal or oxide layers onto substrates. In a sputtering system, a controller card like the AMC068/AMC069 serves as the central I/O hub: it routes interlock signals from chamber sensors (pressure, temperature, water flow, gas overpressure) to the system controller, drives pneumatic and solenoid valves, interfaces with power supplies (including RF or DC magnetron sputter power at 1KW and 10KW levels), and communicates with instruments like the MKS 250 pressure/flow controller. The silkscreen labels on this board — Plasma Ignite, Argon Flow, Cryo Power, Helium Valve, Pneumatic Valves, Shutter Sensors — are characteristic of a multi-zone PVD sputter tool. Dison Technology was active in this market in the early-to-mid 1990s, and this 1994-dated board reflects the era when dedicated PCB-based I/O controller cards were standard in research and production sputtering equipment. This type of card is primarily sought today as a spare or replacement part for existing Dison Technology vacuum systems still in service.