Ebara
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Ebara 323-0084 CryoCompressor 4.8 Helium Compressor 208/200V 3-Phase 18-22A
Ebara
$550.00Was: $1,100.00Ebara 323-0084 CryoCompressor 4.8 Helium Compressor 208/200V 3-Phase 18-22AHelium cryocompressor for driving cryopumps in vacuum and semiconductor systems. Operates on 208V or 200V three-phase power...52036- SKU:
- 52036
- Availability:
- Usually ships within 3–5 business days due to size and weight.
- Weight:
- 293.00 LBS
- Brand:
- Ebara
- Model:
- 323-0084
- MPN:
- 323-0084
- Type:
- Helium Cryocompressor / Cryopump Compressor
- SKU:
- 52036
- Condition:
- Used – Inspected, Not Bench-Tested
- Series:
- CryoCompressor 4.8
- Voltage Rating:
- 208V AC @ 60Hz / 200V AC @ 50Hz
- Current Rating:
- 19–22A @ 60Hz / 18–21A @ 50Hz
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Charge Pressure:
- 210 ± 5 psi (1448 ± 34 kPa)
- Helium Purity Required:
- 99.995%
- Dew Point:
- < -80°F
- Water Content:
- < 8 PPM
- Min Water Flow:
- 2 gpm (7.6 L/min)
- Max Supply Water Pressure:
- 150 psi (1035 kPa)
- Max Water Temperature:
- 40°F–95°F (4°C–35°C)
- Hobbs Meter Reading:
- 34,492 hours
- Adsorber Serial Number:
- K1H3594
- Adsorber Install Interval:
- Install @ 108 HR, Replace @ 30,108 HR
- Dimensions:
- 21" W x 19" D x 25" H
- Country/Region of Manufacture:
- United States
- Form Factor:
- Freestanding Cabinet / Desktop
- Application:
- Cryopump drive; semiconductor, vacuum, and lab systems
- Seller Notes:
- Includes power cable, water supply/return fittings, helium return port. Not bench-tested.
- Condition Notes:
- Ebara 323-0084 CryoCompressor 4.8. Inspected, good physical condition. Cannot test at our facility — sold as-inspected. Hobbs meter: 34,492 hrs. Includes power cable, water fittings, helium return port. View photos; contact us with questions.
$550.00Was: $1,100.00 -
Ebara 40X20 Dry Vacuum Pump 42 CFM 3HP 208V 3-Phase 11A For Parts
Ebara
$750.00Was: $1,500.00Ebara 40X20 Dry Vacuum Pump 42 CFM 3HP 208V 3-Phase 11A For PartsThe Ebara 40X20 is an industrial-grade dry vacuum pump designed for semiconductor process equipment, vacuum systems, and manufacturing...38974- SKU:
- 38974
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 413.00 LBS
- Brand:
- Ebara
- Model:
- 40X20
- MPN:
- 40X20
- Type:
- Dry Vacuum Pump
- SKU:
- 38974
- Seller Notes:
- Includes Brooks Instrument flow meter. Sold AS-IS for parts or repair.
- Country/Region of Manufacture:
- United States
- Pumping Speed:
- 42 CFM (1100 L/min at 60Hz USA)
- Motor Power:
- 3 HP (2.2 kW)
- Voltage:
- 208V AC
- Current:
- 11.0 Amps
- Phase:
- Three Phase
- Frequency:
- 60 Hz
- Motor Speed:
- 3460 RPM
- Motor Type:
- Three Phase Induction Motor
- Insulation Class:
- Class H
- Motor Code:
- Code B
- Cooling Method:
- Water Cooled
- Features:
- Nitrogen Purge Port
- Flow Meter:
- Brooks Instrument 1358EZ122N/C
- System Number:
- C00349-H
- Form Factor:
- Freestanding / Cart-Mounted
- Application:
- Semiconductor process, vacuum systems, dry process equipment
- Review Status:
- Auto-Approved (needs review) 2026-07-04
- Condition Notes:
- Ebara 40X20 dry vacuum pump sold AS-IS for parts or repair. Motor or pump mechanism seized; blew fuse during testing. Shows signs of overheating from operation without water cooling. Not functional, no guarantee.
$750.00Was: $1,500.00