Ebara
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Ebara 323-0084 CryoCompressor 4.8 Helium Compressor 208/200V 3-Phase 18-22A
Ebara
$550.00Was: $1,100.00Ebara 323-0084 CryoCompressor 4.8 Helium Compressor 208/200V 3-Phase 18-22AHelium cryocompressor for driving cryopumps in vacuum and semiconductor systems. Operates on 208V or 200V three-phase power...52036- SKU:
- 52036
- Availability:
- Usually ships within 3–5 business days due to size and weight.
- Weight:
- 293.00 LBS
- Brand:
- Ebara
- Model:
- 323-0084
- MPN:
- 323-0084
- Type:
- Helium Cryocompressor / Cryopump Compressor
- SKU:
- 52036
- Condition:
- Used – Inspected, Not Bench-Tested
- Series:
- CryoCompressor 4.8
- Voltage Rating:
- 208V AC @ 60Hz / 200V AC @ 50Hz
- Current Rating:
- 19–22A @ 60Hz / 18–21A @ 50Hz
- Phase:
- Three Phase
- Frequency:
- 50/60 Hz
- Charge Pressure:
- 210 ± 5 psi (1448 ± 34 kPa)
- Helium Purity Required:
- 99.995%
- Dew Point:
- < -80°F
- Water Content:
- < 8 PPM
- Min Water Flow:
- 2 gpm (7.6 L/min)
- Max Supply Water Pressure:
- 150 psi (1035 kPa)
- Max Water Temperature:
- 40°F–95°F (4°C–35°C)
- Hobbs Meter Reading:
- 34,492 hours
- Adsorber Serial Number:
- K1H3594
- Adsorber Install Interval:
- Install @ 108 HR, Replace @ 30,108 HR
- Dimensions:
- 21" W x 19" D x 25" H
- Country/Region of Manufacture:
- United States
- Form Factor:
- Freestanding Cabinet / Desktop
- Application:
- Cryopump drive; semiconductor, vacuum, and lab systems
- Seller Notes:
- Includes power cable, water supply/return fittings, helium return port. Not bench-tested.
- Condition Notes:
- Ebara 323-0084 CryoCompressor 4.8. Inspected, good physical condition. Cannot test at our facility — sold as-inspected. Hobbs meter: 34,492 hrs. Includes power cable, water fittings, helium return port. View photos; contact us with questions.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$550.00Was: $1,100.00 -
Ebara 40X20 Dry Vacuum Pump 42 CFM 3HP 208V 3-Phase 11A For Parts
Ebara
$750.00Was: $1,500.00Ebara 40X20 Dry Vacuum Pump 42 CFM 3HP 208V 3-Phase 11A For PartsThe Ebara 40X20 is an industrial-grade dry vacuum pump designed for semiconductor process equipment, vacuum systems, and manufacturing...38974- SKU:
- 38974
- Availability:
- Usually ships within 1-2 business days.
- Weight:
- 413.00 LBS
- Brand:
- Ebara
- Model:
- 40X20
- MPN:
- 40X20
- Type:
- Dry Vacuum Pump
- SKU:
- 38974
- Seller Notes:
- Includes Brooks Instrument flow meter. Sold AS-IS for parts or repair.
- Country/Region of Manufacture:
- United States
- Pumping Speed:
- 42 CFM (1100 L/min at 60Hz USA)
- Motor Power:
- 3 HP (2.2 kW)
- Voltage:
- 208V AC
- Current:
- 11.0 Amps
- Phase:
- Three Phase
- Frequency:
- 60 Hz
- Motor Speed:
- 3460 RPM
- Motor Type:
- Three Phase Induction Motor
- Insulation Class:
- Class H
- Motor Code:
- Code B
- Cooling Method:
- Water Cooled
- Features:
- Nitrogen Purge Port
- Flow Meter:
- Brooks Instrument 1358EZ122N/C
- System Number:
- C00349-H
- Form Factor:
- Freestanding / Cart-Mounted
- Application:
- Semiconductor process, vacuum systems, dry process equipment
- Condition Notes:
- Ebara 40X20 dry vacuum pump sold AS-IS for parts or repair. Motor or pump mechanism seized; blew fuse during testing. Shows signs of overheating from operation without water cooling. Not functional, no guarantee.
- California Prop 65 Warning:
- WARNING: This product can expose you to chemicals including lead and lead compounds, and DEHP (a phthalate), which are known to the State of California to cause cancer and birth defects or other reproductive harm. Go to P65Warnings.ca.gov
$750.00Was: $1,500.00