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Ebara

Ebara 323-0084 CryoCompressor 4.8 Helium Compressor 208/200V 3-Phase 18-22A

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SKU:
52036
MPN:
323-0084
Condition:
Used
Availability:
Usually ships within 3–5 business days due to size and weight.
Weight:
293.00 LBS
Shipping:
Calculated at Checkout
  • Ebara CryoCompressor 4.8 323-0084 front panel view showing EBARA logo, pressure gauge, indicator lights, and power switch
  • Ebara CryoCompressor 4.8 323-0084 rear view showing water supply/return fittings, helium return port, rear control panel, and power cable
  • Ebara CryoCompressor 4.8 323-0084 front panel close-up showing EBARA logo, CryoCompressor 4.8 label, pressure gauge, and model number sticker 323-0084
  • Adsorber label on Ebara CryoCompressor showing serial number K1H3594, install at 108 HR, replace at 30108 HR
  • Pressure gauge close-up on Ebara CryoCompressor 4.8 showing supply pressure scale, charge pressure 210 ±5 psi, helium purity 99.995%, dew point below -80°F, water content below 8 PPM
  • Ebara CryoCompressor 4.8 label panel showing COMP #02 LL-BL-UL STA#2 sticker, CryoCompressor 4.8 nameplate, and station identification labels
  • Ebara CryoCompressor 4.8 front control panel detail showing Hobbs quartz hour meter reading 34492 hours, Phase Error, Power, Low Helium Pressure, Water Overtemp indicator lights, ON/OFF rocker switch, and MODEL 323-0084 designation
  • Ebara CryoCompressor 4.8 rear panel detail showing caution/installation label, adsorber sticker, water supply and helium return fittings, pump terminal blocks, system remote connector, expander circuit breaker, and input power requirements label
$550.00
Was: $1,100.00
Current Stock: 2

Sold Out

Description

Ebara 323-0084 CryoCompressor 4.8 Helium Compressor 208/200V 3-Phase 18-22A

Helium cryocompressor for driving cryopumps in vacuum and semiconductor systems. Operates on 208V or 200V three-phase power and requires high-purity helium supply with integrated water cooling.

Specifications & What's Included

  • Model: 323-0084 CryoCompressor 4.8
  • Power: 208V AC 60Hz / 200V AC 50Hz, three-phase, 18–22A
  • Charge Pressure: 210 ± 5 psi
  • Helium Requirements: 99.995% purity; dew point < -80°F; water content < 8 PPM
  • Water Cooling: 2–7.6 gpm minimum, max 150 psi supply, 40–95°F operating range
  • Cabinet: 21" W × 19" D × 25" H
  • Hobbs Meter: 34,492 hours
  • Includes: Power cable, water supply/return fittings, helium return port

Applications

CryoCompressors drive cryopumps in semiconductor manufacturing, vacuum systems, and laboratory applications. These units compress and recirculate helium through cryogenic pump heads for ultra-high vacuum environments.

Condition: Used
This Ebara 323-0084 CryoCompressor 4.8 helium compressor has been inspected and appears to be in good physical condition. We were not able to test it at our facility, so it is sold as-inspected with no functionality guarantee. The cabinet exterior shows normal wear consistent with industrial service use. The front control panel indicators, pressure gauge, rocker switch, and Hobbs hour meter are all intact — the Hobbs meter reads 34,492 hours. The adsorber label (S/N K1H3594) is present on the rear panel. The unit includes the attached power cable, water supply and return fittings, and helium return port. Please view our photo set and contact us if you have any questions. Please note: We have multiple units in stock — yours may not be the one shown in the photos, however, it will be similar in condition and function.
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Warranty Information

We stand behind every item we sell with a 30-day money-back guarantee. If your item arrives not as described, you may return it within 30 days for a full refund. Please inspect your purchase upon arrival and contact us with any questions.
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Additional Information

Brand:
Ebara
Model:
323-0084
MPN:
323-0084
Type:
Helium Cryocompressor / Cryopump Compressor
SKU:
52036
Condition:
Used – Inspected, Not Bench-Tested
Series:
CryoCompressor 4.8
Voltage Rating:
208V AC @ 60Hz / 200V AC @ 50Hz
Current Rating:
19–22A @ 60Hz / 18–21A @ 50Hz
Phase:
Three Phase
Frequency:
50/60 Hz
Charge Pressure:
210 ± 5 psi (1448 ± 34 kPa)
Helium Purity Required:
99.995%
Dew Point:
< -80°F
Water Content:
< 8 PPM
Min Water Flow:
2 gpm (7.6 L/min)
Max Supply Water Pressure:
150 psi (1035 kPa)
Max Water Temperature:
40°F–95°F (4°C–35°C)
Hobbs Meter Reading:
34,492 hours
Adsorber Serial Number:
K1H3594
Adsorber Install Interval:
Install @ 108 HR, Replace @ 30,108 HR
Dimensions:
21" W x 19" D x 25" H
Country/Region of Manufacture:
United States
Form Factor:
Freestanding Cabinet / Desktop
Application:
Cryopump drive; semiconductor, vacuum, and lab systems
Seller Notes:
Includes power cable, water supply/return fittings, helium return port. Not bench-tested.
Condition Notes:
Ebara 323-0084 CryoCompressor 4.8. Inspected, good physical condition. Cannot test at our facility — sold as-inspected. Hobbs meter: 34,492 hrs. Includes power cable, water fittings, helium return port. View photos; contact us with questions.
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