Description
Ebara 40X20 Dry Vacuum Pump 42 CFM 3HP 208V 3-Phase 11A For Parts
The Ebara 40X20 is an industrial-grade dry vacuum pump designed for semiconductor process equipment, vacuum systems, and manufacturing environments requiring oil-free operation. This model delivers 42 CFM of pumping speed and features integrated nitrogen purge capability for contamination control. The pump incorporates a water-cooled three-phase motor and includes a Brooks Instrument flow meter for system monitoring.
Specifications & What's Included
- Make & Model: Ebara 40X20
- System Number: C00349-H
- Pumping Speed: 42 CFM (1100 L/min at 60Hz)
- Motor Power: 3 HP (2.2 kW)
- Motor Voltage: 208V AC, Three Phase, 60Hz
- Motor Current: 11.0 Amps
- Motor Speed: 3460 RPM
- Motor Code: Code B, Class H Insulation
- Motor Type: Three-Phase Induction Motor
- Cooling: Water-Cooled Design
- Features: Integrated Nitrogen Purge Port
- Flow Meter: Brooks Instrument 1358EZ122N/C (included)
- Form Factor: Freestanding, mounted on wheeled transport dolly
- Country of Manufacture: United States
Applications
Dry vacuum pumps in the Ebara 40X20 class are standard equipment in semiconductor process lines, plasma deposition systems, and industrial vacuum applications where oil-free operation is essential. These units work in manufacturing environments requiring contamination control and integration with process monitoring systems. The nitrogen purge port allows for system purging and protection during idle periods. This pump would typically support moderate-capacity vacuum requirements in research facilities, industrial manufacturing, and equipment maintenance operations.
This Ebara 40X20 dry vacuum pump is being sold AS-IS for parts or repair. During testing, the unit blew a fuse, indicating the motor or pump mechanism is seized. The pump shows signs of operation without adequate water cooling, with visible evidence of thermal stress. It is not functional and carries no performance guarantee. The unit is mounted on a wheeled transport dolly with an intact external enclosure in reasonable cosmetic condition. Internal plumbing, the included Brooks Instrument flow meter, pressure gauge, and nitrogen purge port remain visible and complete. Please view our photo set carefully and contact us with any questions before purchasing.
Warranty Information
Additional Information
Brand: |
Ebara |
Model: |
40X20 |
MPN: |
40X20 |
Type: |
Dry Vacuum Pump |
SKU: |
38974 |
Seller Notes: |
Includes Brooks Instrument flow meter. Sold AS-IS for parts or repair. |
Country/Region of Manufacture: |
United States |
Pumping Speed: |
42 CFM (1100 L/min at 60Hz USA) |
Motor Power: |
3 HP (2.2 kW) |
Voltage: |
208V AC |
Current: |
11.0 Amps |
Phase: |
Three Phase |
Frequency: |
60 Hz |
Motor Speed: |
3460 RPM |
Motor Type: |
Three Phase Induction Motor |
Insulation Class: |
Class H |
Motor Code: |
Code B |
Cooling Method: |
Water Cooled |
Features: |
Nitrogen Purge Port |
Flow Meter: |
Brooks Instrument 1358EZ122N/C |
System Number: |
C00349-H |
Form Factor: |
Freestanding / Cart-Mounted |
Application: |
Semiconductor process, vacuum systems, dry process equipment |
Review Status: |
Auto-Approved (needs review) 2026-07-04 |
Condition Notes: |
Ebara 40X20 dry vacuum pump sold AS-IS for parts or repair. Motor or pump mechanism seized; blew fuse during testing. Shows signs of overheating from operation without water cooling. Not functional, no guarantee. |