VAT Series 108 UHV Gate Valve DN100 Pneumatic Bellows Sealed Stainless Steel

VAT Series 108 UHV Gate Valve DN100 Pneumatic Bellows Sealed Stainless Steel

The VAT Series 108 is an ultra-high vacuum (UHV) gate valve designed for demanding semiconductor process and R&D vacuum systems. This unit features a pneumatic double-acting actuator, a bellows feedthrough, and VAT's proprietary VATLOCK sealing system, which provides a virtually shock-free gate locking action without the use of lubricants in the mechanism. The body is constructed of stainless steel and the valve is rated for 50,000 cycles before first service in the DN63–200 size range. Part number F-60020-41.

Specifications & What's Included

• Manufacturer: VAT
• Series: 108 (UHV Gate Valve)
• Part Number: F-60020-41
• Nominal Size: DN100 (approx. 4 in.)
• Flange OD: 6 in.
• Flange ID (bore): 3-7/8 in.
• Flange type: CF-style with copper gasket groove (visible in photos)
• Body material: Stainless steel
• Feedthrough: Metal bellows (lubricant-free mechanism)
• Sealing technology: VATLOCK System
• Bonnet seal material: Metal
• Gate seal material: Viton
• Actuator type: Pneumatic, double-acting cylinder
• Solenoid valve block with multi-pin electrical connector (visible in photos)
• Copper pneumatic tubing connecting actuator to solenoid block
• Service life: 50,000 cycles until first service (DN63–200)
• Included: Valve with pneumatic actuator assembly only — no manual, cables, or peripherals

Applications

VAT Series 108 UHV gate valves are a well-established standard for isolation and flow control in ultra-high vacuum systems. They are used extensively in semiconductor wafer processing equipment — including PVD/CVD deposition systems, etch chambers, ion implanters, and load-lock chambers — where a clean, reliable vacuum seal and long service life are required. The bellows-sealed, lubricant-free design makes them suitable for the cleanest UHV environments, and the VATLOCK mechanism is specifically engineered to prevent particulate generation from gate impact. Beyond semiconductor fabs, Series 108 valves are used in particle accelerators, surface science apparatus, synchrotron beamlines, molecular beam epitaxy (MBE) systems, and university/national lab R&D vacuum setups. The pneumatic double-acting actuator allows remote or automated operation, making the valve suitable for process automation and interlock-controlled systems.